 chenzk
|
ed1923e293
add DM reservoir view/viewModel
|
hai 1 semana |
|
chenzk
|
06b4b1f386
add AN direplen releated
|
hai 1 semana |
|
chenzk
|
0aa55ce909
1 revise efem view
|
hai 1 semana |
 chenkui
|
ac4ae70a0d
update Reservoir
|
hai 1 semana |
|
chenzk
|
301233e909
1 revise lp wafersize io，add wafersize releated
|
hai 2 semanas |
|
chenzk
|
2ab01da9c2
add WaferRobotFAction None
|
hai 2 semanas |
|
chenzk
|
91b9a1f384
revise robot flip cartoon
|
hai 2 semanas |
|
chenzk
|
02069c13bc
add robot pick/place parameter upper/down releate
|
hai 2 semanas |
|
chenkui
|
aa612ce417
update EFEM LoadPort Image
|
hai 2 semanas |
|
chenzk
|
1683bda19a
revise robot pick/place cartoon in platingcell 3/4
|
hai 2 semanas |
|
chenzk
|
f1e242d81e
add operation blade2 wafer information
|
hai 2 semanas |
|
chenzk
|
9678b3fb49
1 revise robot cycle only one module bug
|
hai 2 semanas |
|
chenkui
|
c48d398268
update cassete place io
|
hai 2 semanas |
|
chenkui
|
5f6b2088cf
Update OperationOverViewModelNew.cs name
|
hai 2 semanas |
|
chenzk
|
d821fc973a
add robot pick/place cartoon
|
hai 2 semanas |
|
chenkui
|
3811a9b925
update EFEM View
|
hai 2 semanas |
|
chenzk
|
57d22c6c02
add punk robot control
|
hai 2 semanas |
|
chenzk
|
751e38538e
1 add dummy rinse time check with linked dep recipe
|
hai 3 semanas |
|
chenzk
|
8c6fa5e5e3
1.Add new module station number
|
hai 3 semanas |
|
chenzk
|
ad86e0d238
add efem view flip select
|
hai 3 semanas |
|
chenzk
|
dcd0d75f4c
1 add robotcycle plating cell Module
|
hai 3 semanas |
|
chenzk
|
a7b9c3e65c
revise pick/place bug
|
hai 3 semanas |
|
chenzk
|
787f73f714
revise pick/place check precondition bug
|
hai 3 semanas |
|
chenkui
|
e66519b753
add EFEM Arm/Flip interlock
|
hai 4 semanas |
|
chenzk
|
4807c5bf6d
revise filp/noflip to down/upper
|
hai 4 semanas |
|
chenkui
|
b16bfd18db
update robot cycle add placeRobotFlip parameter
|
hai 4 semanas |
|
chenkui
|
47ff767d1a
update EFEM Place Routine with flip;
|
hai 4 semanas |
|
chenzk
|
0a500c4757
add EFEM platingcell pick/place
|
hai 4 semanas |
|
chenzk
|
9ee6d50c0f
1revise robot cycle
|
hai 1 mes |
|
chenzk
|
514c820d3b
revise vent prewet bug
|
hai 1 mes |
