 chenzk
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d49038500b
1 add platingcell run recipe pre check
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1 day ago |
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chenzk
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0f907ac87e
1revise platingcell init routine
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1 day ago |
 chenkui
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de63db15fc
update vertical position
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2 days ago |
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chenkui
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314d538524
add vertical routine into plating cell recipe
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2 days ago |
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chenkui
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b11c469645
add Plating cell vertical Module
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2 days ago |
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chenzk
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19158728c5
add reservoir/platingcell persistent releated
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4 days ago |
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chenkui
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3eca239970
update scheduler
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4 days ago |
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chenzk
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0599ba5489
revise vpw releated bug
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4 days ago |
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chenzk
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160bb916f7
1revise axis run timeout
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1 week ago |
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chenkui
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d2df24ff44
update VPW Home
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1 week ago |
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chenzk
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b1596be753
add efem/operation view aligner wafer module
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1 week ago |
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chenkui
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e0e29761ad
robot scheduler add vpw prepare
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1 week ago |
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chenzk
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4917ae0176
add beckhoff
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1 week ago |
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chenzk
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39d520ecab
add srd2 beckhoff and safety power status
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1 week ago |
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chenzk
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716a44e7ff
revise efem robot view
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1 week ago |
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chenzk
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5c2acda55f
add platingcell/vpw wafersize
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2 weeks ago |
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chenkui
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494e4efb12
update scheduler sequence
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2 weeks ago |
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chenzk
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4dd2120614
revise sequence recipe and srd facility check not
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2 weeks ago |
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chenzk
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b46edee329
revise efem simulation
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2 weeks ago |
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chenzk
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8c714316dc
releated power supply and simulator
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2 weeks ago |
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chenkui
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d8a916beb6
start develop scheduler
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2 weeks ago |
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chenkui
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8a6a157a2b
update top view;
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2 weeks ago |
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chenzk
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08107a729c
add power manual adjust power grade
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2 weeks ago |
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chenzk
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ed769dc4ec
revise ui menu
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2 weeks ago |
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chenzk
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2106d9df67
add ccr timeremain and step
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2 weeks ago |
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chenzk
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cf2e7df7e5
add platingcell ccr
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4 weeks ago |
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chenzk
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3f42924935
add platingcell rotation axis reletaed
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1 month ago |
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chenzk
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90051f8533
add platingcell setup view
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1 month ago |
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chenzk
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7b4c861e65
revise platingcell vertical set，add platingcell3_4 vertical
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1 month ago |
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chenzk
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75c78e1d46
revise platingcell ui
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1 month ago |
