 chenzk
|
6f0b9879cc
add reservoir1 io and twincat releated
|
hai 1 mes |
|
chenzk
|
301233e909
1 revise lp wafersize io，add wafersize releated
|
hai 2 meses |
 chenkui
|
c48d398268
update cassete place io
|
hai 2 meses |
|
chenkui
|
3811a9b925
update EFEM View
|
hai 2 meses |
|
chenzk
|
0ae3f020eb
add facility all
|
hai 2 meses |
|
chenzk
|
d8ddc42656
add safety module all
|
hai 2 meses |
|
chenzk
|
d2a498218c
1revise facility device
|
hai 2 meses |
|
chenkui
|
4de27837d1
update safetyData
|
hai 2 meses |
|
chenzk
|
df95347b40
add facility I/O releated
|
hai 2 meses |
|
chenzk
|
5dfc09d488
add safety view and twincat releated
|
hai 3 meses |
|
chenkui
|
960a907e5d
update Beckhoffcfg.xml
|
hai 3 meses |
|
chenkui
|
802ecf62cb
add VPWMain Persistent value speed variable;
|
hai 3 meses |
|
chenkui
|
587667fd0f
update VPW MainIO content
|
hai 3 meses |
|
chenkui
|
32f216fca2
add VPWMain/VPW1/VPW2 into Beckhoffcfg.xml;
|
hai 3 meses |
|
chenkui
|
7957a5c8af
Update VPWCell1/VPWCell2 to VPW1/VPW2;
|
hai 3 meses |
|
chenkui
|
c2d9da3983
Initialize
|
hai 3 meses |
