 chenzk
|
5ab36c422a
revise platingcell run recipe bug
|
1 week ago |
|
chenzk
|
8988c15c72
revise platingcell run recipe start bug
|
1 week ago |
|
chenzk
|
139861bd89
revise platingcell run recipe bug
|
1 week ago |
|
chenzk
|
698880cb75
add platingcell run recipe releated
|
1 week ago |
|
chenzk
|
673ea4850b
add platingcell reclaim/rinse/dry routine
|
1 week ago |
|
chenzk
|
28830d558c
add platingcell interval rinse/entry/ deposition routine
|
1 week ago |
 chenkui
|
2847543692
update vertical wait matcher
|
1 week ago |
|
chenkui
|
0e3066b669
update vertical position judge
|
1 week ago |
|
chenkui
|
dd048ffe7c
update cell vertical position
|
1 week ago |
|
chenzk
|
a009691fb5
revise vpw abort
|
1 week ago |
|
chenzk
|
f9327c9289
revise releated view bug
|
1 week ago |
|
chenzk
|
cbdb1fbeef
1 revise vpw recipe
|
1 week ago |
|
chenzk
|
c79a314283
add rotation bi-rotaiton
|
1 week ago |
|
chenzk
|
c23ae5e67f
1 add platingcell run recipe entry part
|
2 weeks ago |
|
chenzk
|
6cf7114d68
reivse platingcell initialize button
|
2 weeks ago |
|
chenkui
|
76dc0707de
add dummy station number config;
|
2 weeks ago |
|
chenzk
|
aed5bc98a1
1 revise vpw vent prewet routine
|
2 weeks ago |
|
chenkui
|
b20562da35
update ReservoirCellHomeRoutine
|
2 weeks ago |
|
chenkui
|
281b6f9109
update vpw home all
|
2 weeks ago |
|
chenkui
|
27ef723aba
update scheduler vpw
|
2 weeks ago |
|
chenkui
|
cf0371f18e
update wafer scheduler
|
2 weeks ago |
|
chenzk
|
fd895d2038
add interval rinse routine
|
2 weeks ago |
|
chenkui
|
4feb3d9e24
update plating cell run recipe
|
2 weeks ago |
|
chenzk
|
d49038500b
1 add platingcell run recipe pre check
|
2 weeks ago |
|
chenzk
|
0f907ac87e
1revise platingcell init routine
|
2 weeks ago |
|
chenkui
|
de63db15fc
update vertical position
|
2 weeks ago |
|
chenkui
|
314d538524
add vertical routine into plating cell recipe
|
2 weeks ago |
|
chenkui
|
b11c469645
add Plating cell vertical Module
|
2 weeks ago |
|
chenzk
|
19158728c5
add reservoir/platingcell persistent releated
|
3 weeks ago |
|
chenkui
|
3eca239970
update scheduler
|
3 weeks ago |
