 chenzk
|
8c714316dc
releated power supply and simulator
|
1 week ago |
 chenkui
|
d8a916beb6
start develop scheduler
|
1 week ago |
|
chenzk
|
2106d9df67
add ccr timeremain and step
|
1 week ago |
|
chenzk
|
cf2e7df7e5
add platingcell ccr
|
3 weeks ago |
|
chenzk
|
d47bd2870a
add platingcell initialize releated
|
4 weeks ago |
|
chenzk
|
f6a9ac36e5
1 revise srd switch off
|
1 month ago |
|
chenzk
|
0d3e5c67b6
add reservoir&platingcell 1/2/3/4
|
1 month ago |
|
chenzk
|
0e26d8e4cc
add dm reservoir releated monitor
|
1 month ago |
|
chenzk
|
263b4c3df5
add dm reservoir ca direplenin releated
|
1 month ago |
|
chenzk
|
5602545842
add dm reservoir initialized routine
|
1 month ago |
|
chenzk
|
7244d4257d
add reservoir initialize routine releated
|
1 month ago |
|
chenzk
|
0d4a115d4f
1 add reservoir tc releated
|
2 months ago |
|
chenzk
|
6f0b9879cc
add reservoir1 io and twincat releated
|
2 months ago |
|
chenkui
|
ac4ae70a0d
update Reservoir
|
2 months ago |
|
chenzk
|
d821fc973a
add robot pick/place cartoon
|
2 months ago |
|
chenzk
|
8c6fa5e5e3
1.Add new module station number
|
2 months ago |
|
chenzk
|
dcd0d75f4c
1 add robotcycle plating cell Module
|
2 months ago |
|
chenzk
|
9ee6d50c0f
1revise robot cycle
|
2 months ago |
|
chenzk
|
28abb1ea49
add res/dep recipe
|
2 months ago |
|
chenzk
|
0ae3f020eb
add facility all
|
2 months ago |
|
chenzk
|
d2a498218c
1revise facility device
|
3 months ago |
|
chenzk
|
579a398b22
1 revise vpw vacuum prewet routine retry bug
|
3 months ago |
|
chenzk
|
9139d8f851
1. revise vpw total flow Monitor
|
3 months ago |
|
chenzk
|
0ed2fa049e
1 add vpw auto drip valve on
|
3 months ago |
|
chenzk
|
30b86c960b
add vpw rotation interlock
|
3 months ago |
|
chenzk
|
34be630592
add chamber up/down check config
|
3 months ago |
|
chenkui
|
f918b35c00
complete vpw recipe
|
3 months ago |
|
chenkui
|
9ed5517270
update vpw recipe
|
3 months ago |
 guojun
|
b193d3a023
修改CellFlowStartLowLimit上限
|
3 months ago |
|
chenkui
|
28e1e8e4ab
add VPW Prepare routine
|
3 months ago |
