 chenzk
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39d520ecab
add srd2 beckhoff and safety power status
|
1 week ago |
 chenkui
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d8a916beb6
start develop scheduler
|
1 week ago |
|
chenzk
|
cf2e7df7e5
add platingcell ccr
|
3 weeks ago |
|
chenzk
|
3f42924935
add platingcell rotation axis reletaed
|
3 weeks ago |
|
chenzk
|
7b4c861e65
revise platingcell vertical set，add platingcell3_4 vertical
|
4 weeks ago |
|
chenzk
|
04c679e231
add platingcell vertical and power releated
|
4 weeks ago |
|
chenzk
|
86f1673590
1 add reservoir tc Monitor
|
1 month ago |
|
chenzk
|
3ac5e77e45
add srd io config releated
|
1 month ago |
|
chenzk
|
0d3e5c67b6
add reservoir&platingcell 1/2/3/4
|
1 month ago |
|
chenzk
|
ac14c8448a
add platingcell1 io releated config
|
1 month ago |
|
chenzk
|
dcaa79e82b
1 revise reservoir retrun flow vlave
|
1 month ago |
|
chenzk
|
9979e9efa7
1 revise ca level monitor bug
|
2 months ago |
|
chenzk
|
0d4a115d4f
1 add reservoir tc releated
|
2 months ago |
|
chenzk
|
6f0b9879cc
add reservoir1 io and twincat releated
|
2 months ago |
|
chenzk
|
301233e909
1 revise lp wafersize io，add wafersize releated
|
2 months ago |
|
chenkui
|
c48d398268
update cassete place io
|
2 months ago |
|
chenzk
|
d821fc973a
add robot pick/place cartoon
|
2 months ago |
|
chenkui
|
3811a9b925
update EFEM View
|
2 months ago |
|
chenzk
|
8c6fa5e5e3
1.Add new module station number
|
2 months ago |
|
chenzk
|
0a500c4757
add EFEM platingcell pick/place
|
2 months ago |
|
chenkui
|
a22406bc3a
update EFEM Signal tower
|
2 months ago |
|
chenzk
|
0ae3f020eb
add facility all
|
3 months ago |
|
chenzk
|
d8ddc42656
add safety module all
|
3 months ago |
|
chenzk
|
df95347b40
add facility I/O releated
|
3 months ago |
|
chenzk
|
5dfc09d488
add safety view and twincat releated
|
3 months ago |
|
chenzk
|
0ed2fa049e
1 add vpw auto drip valve on
|
3 months ago |
|
chenzk
|
7cf1fd838c
add vpw cell waferinfo
|
3 months ago |
|
chenkui
|
f918b35c00
complete vpw recipe
|
3 months ago |
|
chenkui
|
9ed5517270
update vpw recipe
|
3 months ago |
|
chenzk
|
b079fb0436
add vpw recipe releated，vpw main/cell UI module
|
3 months ago |
