 chenzk
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3ac5e77e45
add srd io config releated
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1 month ago |
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chenzk
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0d3e5c67b6
add reservoir&platingcell 1/2/3/4
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1 month ago |
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chenzk
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ac14c8448a
add platingcell1 io releated config
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1 month ago |
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chenzk
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dcaa79e82b
1 revise reservoir retrun flow vlave
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1 month ago |
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chenzk
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9979e9efa7
1 revise ca level monitor bug
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2 months ago |
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chenzk
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0d4a115d4f
1 add reservoir tc releated
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2 months ago |
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chenzk
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6f0b9879cc
add reservoir1 io and twincat releated
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2 months ago |
|
chenzk
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301233e909
1 revise lp wafersize io，add wafersize releated
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2 months ago |
 chenkui
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c48d398268
update cassete place io
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2 months ago |
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chenzk
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d821fc973a
add robot pick/place cartoon
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2 months ago |
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chenkui
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3811a9b925
update EFEM View
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2 months ago |
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chenzk
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8c6fa5e5e3
1.Add new module station number
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2 months ago |
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chenzk
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0a500c4757
add EFEM platingcell pick/place
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2 months ago |
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chenkui
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a22406bc3a
update EFEM Signal tower
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2 months ago |
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chenzk
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0ae3f020eb
add facility all
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2 months ago |
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chenzk
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d8ddc42656
add safety module all
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2 months ago |
|
chenzk
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df95347b40
add facility I/O releated
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3 months ago |
|
chenzk
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5dfc09d488
add safety view and twincat releated
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3 months ago |
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chenzk
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0ed2fa049e
1 add vpw auto drip valve on
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3 months ago |
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chenzk
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7cf1fd838c
add vpw cell waferinfo
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3 months ago |
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chenkui
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f918b35c00
complete vpw recipe
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3 months ago |
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chenkui
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9ed5517270
update vpw recipe
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3 months ago |
|
chenzk
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b079fb0436
add vpw recipe releated，vpw main/cell UI module
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3 months ago |
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chenzk
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823131cd5b
add vpw recipe view partly
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3 months ago |
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chenkui
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960a907e5d
update Beckhoffcfg.xml
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3 months ago |
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chenkui
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1cdd2160ec
update kollmorgen axis
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3 months ago |
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chenzk
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fe78b81136
add vpwmain persistent
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3 months ago |
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chenkui
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802ecf62cb
add VPWMain Persistent value speed variable;
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3 months ago |
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chenzk
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3283e7d38d
add vpw main UI
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3 months ago |
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chenkui
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32f216fca2
add VPWMain/VPW1/VPW2 into Beckhoffcfg.xml;
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3 months ago |
