Commit History

Author SHA1 Message Date
  chenzk 30b86c960b add vpw rotation interlock 1 week ago
  chenkui 250aa4aede update cell device rotation 1 week ago
  chenzk 04c2ef879c 1revise vpw recipe step view 1 week ago
  chenkui 23d36eb63c update Galil/GalilAxis StopPositionOperation 1 week ago
  chenkui 2fff18b027 update axis stop routine 1 week ago
  chenzk 18d5d1933c revise vpw home routine 1 week ago
  chenkui a6ca057bac add reservoir 1 week ago
  chenzk 34be630592 add chamber up/down check config 1 week ago
  chenkui 58c1d4bc0c upload missing files 1 week ago
  chenkui eea1c94dc9 update vpw motion view 1 week ago
  chenzk 285e938803 1add vpw cell strat/stop rotation 1 week ago
  chenkui 1e3a0c9c46 Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/PunkHPX8 2 weeks ago
  chenkui 09f5be5798 update BeckhoffIOManager write aoValue 2 weeks ago
  chenzk 469149c326 1add vpw main create wafer 2 weeks ago
  chenzk 7cf1fd838c add vpw cell waferinfo 2 weeks ago
  chenzk 1919481acd add vpw abort 2 weeks ago
  chenkui 3a7be5771d update VPW recipe issue 2 weeks ago
  chenzk 265900f343 1 add vpw cell create Wafer 2 weeks ago
  chenkui f918b35c00 complete vpw recipe 2 weeks ago
  chenkui 34c2eee806 fixed Prepare routine 2 weeks ago
  chenkui 9ed5517270 update vpw recipe 2 weeks ago
  chenzk 1698f6d95b 1add loop run vpw Recipe 2 weeks ago
  chenzk 18d82fedb3 1revise vpw main/cell ui 2 weeks ago
  chenzk 1faa7077b3 revise vpw recipe 2 weeks ago
  guojun b193d3a023 修改CellFlowStartLowLimit上限 2 weeks ago
  chenkui 28e1e8e4ab add VPW Prepare routine 2 weeks ago
  chenzk c87ec4e86a add vpw purge 2 weeks ago
  chenzk 87240de05b revise vpw main ui 3 weeks ago
  chenkui b027222d74 update vpw recipe UI 3 weeks ago
  chenkui bfd0b53b4a update VPW Initialize 3 weeks ago