 chenkui
|
281b6f9109
update vpw home all
|
hai 2 días |
|
chenkui
|
cf0371f18e
update wafer scheduler
|
hai 2 días |
|
chenkui
|
314d538524
add vertical routine into plating cell recipe
|
hai 3 días |
|
chenkui
|
b11c469645
add Plating cell vertical Module
|
hai 3 días |
|
chenkui
|
3eca239970
update scheduler
|
hai 6 días |
|
chenkui
|
e0e29761ad
robot scheduler add vpw prepare
|
hai 1 semana |
|
chenkui
|
494e4efb12
update scheduler sequence
|
hai 2 semanas |
|
chenkui
|
d8a916beb6
start develop scheduler
|
hai 2 semanas |
|
chenkui
|
8a6a157a2b
update top view;
|
hai 2 semanas |
 chenzk
|
cf2e7df7e5
add platingcell ccr
|
hai 1 mes |
|
chenzk
|
d47bd2870a
add platingcell initialize releated
|
hai 1 mes |
|
chenzk
|
dcaa79e82b
1 revise reservoir retrun flow vlave
|
hai 2 meses |
|
chenzk
|
5c7fdbf322
add reservoir1 ca direplen twincat logci
|
hai 2 meses |
|
chenzk
|
5602545842
add dm reservoir initialized routine
|
hai 2 meses |
|
chenkui
|
ac4ae70a0d
update Reservoir
|
hai 2 meses |
|
chenzk
|
0a500c4757
add EFEM platingcell pick/place
|
hai 3 meses |
|
chenzk
|
f26ddacf34
add robot cycle
|
hai 3 meses |
|
chenkui
|
3576d8b86f
add robot cycle parameter
|
hai 3 meses |
|
chenkui
|
443fa4a0dd
update safety routine
|
hai 3 meses |
|
chenkui
|
a6ca057bac
add reservoir
|
hai 3 meses |
|
chenkui
|
eea1c94dc9
update vpw motion view
|
hai 3 meses |
|
chenkui
|
3a7be5771d
update VPW recipe issue
|
hai 3 meses |
|
chenkui
|
f918b35c00
complete vpw recipe
|
hai 3 meses |
|
chenkui
|
9ed5517270
update vpw recipe
|
hai 3 meses |
|
chenzk
|
1698f6d95b
1add loop run vpw Recipe
|
hai 3 meses |
|
chenkui
|
28e1e8e4ab
add VPW Prepare routine
|
hai 3 meses |
|
chenzk
|
c87ec4e86a
add vpw purge
|
hai 3 meses |
|
chenkui
|
bfd0b53b4a
update VPW Initialize
|
hai 4 meses |
|
chenzk
|
c8074c102c
add vpw main home rotation
|
hai 4 meses |
|
chenkui
|
2482ad69d1
add VPWMain HomeRoutine
|
hai 4 meses |
