 chenkui
|
281b6f9109
update vpw home all
|
1 week ago |
|
chenkui
|
cf0371f18e
update wafer scheduler
|
1 week ago |
|
chenkui
|
4feb3d9e24
update plating cell run recipe
|
1 week ago |
|
chenkui
|
b11c469645
add Plating cell vertical Module
|
1 week ago |
|
chenkui
|
e0e29761ad
robot scheduler add vpw prepare
|
2 weeks ago |
|
chenkui
|
494e4efb12
update scheduler sequence
|
3 weeks ago |
|
chenkui
|
d8a916beb6
start develop scheduler
|
3 weeks ago |
 chenzk
|
cf2e7df7e5
add platingcell ccr
|
1 month ago |
|
chenzk
|
dcaa79e82b
1 revise reservoir retrun flow vlave
|
2 months ago |
|
chenkui
|
a6ca057bac
add reservoir
|
3 months ago |
|
chenzk
|
7cf1fd838c
add vpw cell waferinfo
|
4 months ago |
|
chenkui
|
9ed5517270
update vpw recipe
|
4 months ago |
|
chenzk
|
1698f6d95b
1add loop run vpw Recipe
|
4 months ago |
|
chenkui
|
28e1e8e4ab
add VPW Prepare routine
|
4 months ago |
|
chenzk
|
c87ec4e86a
add vpw purge
|
4 months ago |
|
chenkui
|
2482ad69d1
add VPWMain HomeRoutine
|
4 months ago |
|
chenkui
|
c2d9da3983
Initialize
|
4 months ago |
