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Mars200VCE
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Mars200VCE
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Metis
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EfemDualRT
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Config
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VIDs
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_DVID.xml

_DVID.xml 3.0 KB
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <ArrayOfVIDItem xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3.   <VIDItem Name="Clock" Index="3" DataType="String" Description="Present date time&#xD;&#xA;YYYYMMDDhhmmsscc" Module="System" Type="" Unit="" Parameter="Clock" />
    4. 

  4.   <VIDItem Name="ControlState" Index="4" DataType="String" Description="Current control state&#xD;&#xA;&quot;1&quot;= Not defined&#xD;&#xA;&quot;2&quot;= Offline-Equipment OffLine&#xD;&#xA;&quot;3&quot;= Offline-Attempt OnLine&#xD;&#xA;&quot;4&quot;= On-Line Local&#xD;&#xA; &quot;5&quot;= On-Line Remote" Module="System" Type="" Unit="" Parameter="ControlState" />
    5. 

  5.   <VIDItem Name="ECChangedID" Index="3007" DataType="Int" Description="Changed ECID list L,n&lt;ECID&gt;" Module="System" Type="" Unit="" Parameter="ECChangedID" />
    6. 

  6.   <VIDItem Name="LotID" Index="3102" DataType="String" Module="System" Type="" Unit="" Parameter="LotID" />
    7. 

  7.   <VIDItem Name="RecipeID" Index="3103" DataType="String" Module="System" Type="" Unit="" Parameter="RecipeID" />
    8. 

  8.   <VIDItem Name="JobID" Index="3104" DataType="String" Module="System" Type="" Unit="" Parameter="JobID" />
    9. 

  9.   <VIDItem Name="CarrierID" Index="3105" DataType="String" Description="The ID of the carrier." Module="System" Type="" Unit="" Parameter="CarrierID" />
    10. 

  10.   <VIDItem Name="SlotMap" Index="3106" DataType="String" Description="Presence status of wafers in the carrier.&#xD;&#xA;L, n (n = Number of SLOTSTATEs)&#xD;&#xA;&lt;SLOTSTATE&gt;&#xD;&#xA;0=UNDEFINED&#xD;&#xA;1=EMPTY&#xD;&#xA;2=NOT EMPTY&#xD;&#xA;3=CORRECTLY OCCUPIED&#xD;&#xA;4=DOUBLE SLOTTED&#xD;&#xA;5=CROSS SLOTTED" Module="System" Type="" Unit="" Parameter="SlotMap" />
    11. 

  11.   <VIDItem Name="SequenceID" Index="3107" DataType="String" Module="System" Type="" Unit="" Parameter="SequenceID" />
    12. 

  12.   <VIDItem Name="StationName" Index="3108" DataType="String" Module="System" Type="" Unit="" Parameter="StationName" />
    13. 

  13.   <VIDItem Name="RecipeStepNumber" Index="3109" DataType="String" Module="System" Type="" Unit="" Parameter="RecipeStepNumber" />
    14. 

  14.   <VIDItem Name="SlotID" Index="3110" DataType="String" Module="System" Type="" Unit="" Parameter="SlotID" />
    15. 

  15.   <VIDItem Name="PortID" Index="3113" DataType="Int" Description="Load port ID" Module="System" Type="" Unit="" Parameter="PortID" />
    16. 

  16.   <VIDItem Name="ProcessedWaferCount" Index="3124" DataType="Int" Module="System" Type="" Unit="" Parameter="ProcessedWaferCount" />
    17. 

  17.   <VIDItem Name="SubstID" Index="3404" DataType="String" Description="Identifier of substrate associated with last event." Module="System" Type="" Unit="" Parameter="SubstID" />
    18. 

  18.   <VIDItem Name="SubstLocID" Index="3405" DataType="String" Description="Identifier for equipment substrate location associated with the last event." Module="System" Type="" Unit="" Parameter="SubstLocID" />
    19. 

  19.   <VIDItem Name="SubstLocState" Index="3406" DataType="Int" Description="State of substrate location associated with the last event.&#xD;&#xA;0=UNOCCUPIED&#xD;&#xA;1=OCCUPIED" Module="System" Type="" Unit="" Parameter="SubstLocState" />
    20. 

  20. </ArrayOfVIDItem>
    21.