Mars200VCE/Metis/EfemDualRT/Config/VIDs/_DVID.xml

<?xml version="1.0" encoding="utf-8"?>
<ArrayOfVIDItem xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <VIDItem Name="Clock" Index="3" DataType="String" Description="Present date time&#xD;&#xA;YYYYMMDDhhmmsscc" Module="System" Type="" Unit="" Parameter="Clock" />
  <VIDItem Name="ControlState" Index="4" DataType="String" Description="Current control state&#xD;&#xA;&quot;1&quot;= Not defined&#xD;&#xA;&quot;2&quot;= Offline-Equipment OffLine&#xD;&#xA;&quot;3&quot;= Offline-Attempt OnLine&#xD;&#xA;&quot;4&quot;= On-Line Local&#xD;&#xA; &quot;5&quot;= On-Line Remote" Module="System" Type="" Unit="" Parameter="ControlState" />
  <VIDItem Name="ECChangedID" Index="3007" DataType="Int" Description="Changed ECID list L,n&lt;ECID&gt;" Module="System" Type="" Unit="" Parameter="ECChangedID" />
  <VIDItem Name="LotID" Index="3102" DataType="String" Module="System" Type="" Unit="" Parameter="LotID" />
  <VIDItem Name="RecipeID" Index="3103" DataType="String" Module="System" Type="" Unit="" Parameter="RecipeID" />
  <VIDItem Name="JobID" Index="3104" DataType="String" Module="System" Type="" Unit="" Parameter="JobID" />
  <VIDItem Name="CarrierID" Index="3105" DataType="String" Description="The ID of the carrier." Module="System" Type="" Unit="" Parameter="CarrierID" />
  <VIDItem Name="SlotMap" Index="3106" DataType="String" Description="Presence status of wafers in the carrier.&#xD;&#xA;L, n (n = Number of SLOTSTATEs)&#xD;&#xA;&lt;SLOTSTATE&gt;&#xD;&#xA;0=UNDEFINED&#xD;&#xA;1=EMPTY&#xD;&#xA;2=NOT EMPTY&#xD;&#xA;3=CORRECTLY OCCUPIED&#xD;&#xA;4=DOUBLE SLOTTED&#xD;&#xA;5=CROSS SLOTTED" Module="System" Type="" Unit="" Parameter="SlotMap" />
  <VIDItem Name="SequenceID" Index="3107" DataType="String" Module="System" Type="" Unit="" Parameter="SequenceID" />
  <VIDItem Name="StationName" Index="3108" DataType="String" Module="System" Type="" Unit="" Parameter="StationName" />
  <VIDItem Name="RecipeStepNumber" Index="3109" DataType="String" Module="System" Type="" Unit="" Parameter="RecipeStepNumber" />
  <VIDItem Name="SlotID" Index="3110" DataType="String" Module="System" Type="" Unit="" Parameter="SlotID" />
  <VIDItem Name="PortID" Index="3113" DataType="Int" Description="Load port ID" Module="System" Type="" Unit="" Parameter="PortID" />
  <VIDItem Name="ProcessedWaferCount" Index="3124" DataType="Int" Module="System" Type="" Unit="" Parameter="ProcessedWaferCount" />
  <VIDItem Name="SubstID" Index="3404" DataType="String" Description="Identifier of substrate associated with last event." Module="System" Type="" Unit="" Parameter="SubstID" />
  <VIDItem Name="SubstLocID" Index="3405" DataType="String" Description="Identifier for equipment substrate location associated with the last event." Module="System" Type="" Unit="" Parameter="SubstLocID" />
  <VIDItem Name="SubstLocState" Index="3406" DataType="Int" Description="State of substrate location associated with the last event.&#xD;&#xA;0=UNOCCUPIED&#xD;&#xA;1=OCCUPIED" Module="System" Type="" Unit="" Parameter="SubstLocState" />
</ArrayOfVIDItem>