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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Device.Unit;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
- namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs
- {
- public class TM : BaseDevice, IDevice, ITM
- {
- public virtual double ChamberPressure { get; }
- public virtual double ForelinePressure { get; }
- public TM(string module ) : base(module, module, module, module)
- {
- }
-
- public virtual bool Initialize()
- {
- DATA.Subscribe($"{Name}.IsAtm", () => { return CheckAtm(); });
- DATA.Subscribe($"{Name}.IsVacuum", () => { return CheckVacuum(); });
- DATA.Subscribe($"{Name}.ChamberPressure", () => ChamberPressure);
- DATA.Subscribe($"{Name}.ForelinePressure", () => ForelinePressure);
- return true;
- }
- public virtual bool CheckAtm()
- {
- return false;
- }
- public virtual bool CheckVacuum()
- {
- return false;
- }
- public virtual bool CheckIsPumping()
- {
- return false;
- }
- public virtual bool SetFastVentValve(bool isOpen, out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public virtual bool SetSlowVentValve(bool isOpen, out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public virtual bool SetFastPumpValve(bool isOpen, out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public virtual bool SetSlowPumpValve(bool isOpen, out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public virtual bool SetTurboPumpIsoValve(bool isOpen, out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public virtual bool SetTurboPumpBackingValve(bool isOpen, out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public virtual bool SetMfcVentValve(bool isOpen, out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public virtual bool SetAllValves(bool isOpen, out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public virtual bool SetVentMfc(double flow, out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public virtual bool SetVentMfcFullFlow(out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public virtual bool CheckTurboPumpStable()
- {
- return true;
- }
- public virtual bool CheckTurboPumpOn()
- {
- return true;
- }
- public virtual bool CheckTurboPumpOff()
- {
- return true;
- }
- public virtual bool CheckTurboPumpError()
- {
- return true;
- }
- public virtual bool TurboPumpOn()
- {
- return true;
- }
- public virtual bool TurboPumpOff()
- {
- return true;
- }
- public virtual IoSlitValve GetSlitValve(ModuleName module)
- {
- return null;
- }
- public virtual bool SetSlitValve(ModuleName module, bool isOpen, out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public virtual bool CheckSlitValveOpen(ModuleName module)
- {
- return true;
- }
- public virtual bool CheckSlitValveClose(ModuleName module)
- {
- return true;
- }
- public virtual bool CheckIsoValveClose()
- {
- return true;
- }
- public virtual bool CheckIsoValveOpen()
- {
- return true;
- }
- public virtual void Monitor()
- {
- }
- public virtual void Terminate()
- {
- }
- public virtual void Reset()
- {
- }
-
- }
- }
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