TM.cs 4.3 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. using Aitex.Core.RT.DataCenter;
  7. using Aitex.Core.RT.Device;
  8. using Aitex.Core.RT.Device.Unit;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
  12. namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs
  13. {
  14. public class TM : BaseDevice, IDevice, ITM
  15. {
  16. public virtual double ChamberPressure { get; }
  17. public virtual double ForelinePressure { get; }
  18. public TM(string module ) : base(module, module, module, module)
  19. {
  20. }
  21. public virtual bool Initialize()
  22. {
  23. DATA.Subscribe($"{Name}.IsAtm", () => { return CheckAtm(); });
  24. DATA.Subscribe($"{Name}.IsVacuum", () => { return CheckVacuum(); });
  25. DATA.Subscribe($"{Name}.ChamberPressure", () => ChamberPressure);
  26. DATA.Subscribe($"{Name}.ForelinePressure", () => ForelinePressure);
  27. return true;
  28. }
  29. public virtual bool CheckAtm()
  30. {
  31. return false;
  32. }
  33. public virtual bool CheckVacuum()
  34. {
  35. return false;
  36. }
  37. public virtual bool CheckIsPumping()
  38. {
  39. return false;
  40. }
  41. public virtual bool SetFastVentValve(bool isOpen, out string reason)
  42. {
  43. reason = string.Empty;
  44. return true;
  45. }
  46. public virtual bool SetSlowVentValve(bool isOpen, out string reason)
  47. {
  48. reason = string.Empty;
  49. return true;
  50. }
  51. public virtual bool SetFastPumpValve(bool isOpen, out string reason)
  52. {
  53. reason = string.Empty;
  54. return true;
  55. }
  56. public virtual bool SetSlowPumpValve(bool isOpen, out string reason)
  57. {
  58. reason = string.Empty;
  59. return true;
  60. }
  61. public virtual bool SetTurboPumpIsoValve(bool isOpen, out string reason)
  62. {
  63. reason = string.Empty;
  64. return true;
  65. }
  66. public virtual bool SetTurboPumpBackingValve(bool isOpen, out string reason)
  67. {
  68. reason = string.Empty;
  69. return true;
  70. }
  71. public virtual bool SetMfcVentValve(bool isOpen, out string reason)
  72. {
  73. reason = string.Empty;
  74. return true;
  75. }
  76. public virtual bool SetAllValves(bool isOpen, out string reason)
  77. {
  78. reason = string.Empty;
  79. return true;
  80. }
  81. public virtual bool SetVentMfc(double flow, out string reason)
  82. {
  83. reason = string.Empty;
  84. return true;
  85. }
  86. public virtual bool SetVentMfcFullFlow(out string reason)
  87. {
  88. reason = string.Empty;
  89. return true;
  90. }
  91. public virtual bool CheckTurboPumpStable()
  92. {
  93. return true;
  94. }
  95. public virtual bool CheckTurboPumpOn()
  96. {
  97. return true;
  98. }
  99. public virtual bool CheckTurboPumpOff()
  100. {
  101. return true;
  102. }
  103. public virtual bool CheckTurboPumpError()
  104. {
  105. return true;
  106. }
  107. public virtual bool TurboPumpOn()
  108. {
  109. return true;
  110. }
  111. public virtual bool TurboPumpOff()
  112. {
  113. return true;
  114. }
  115. public virtual IoSlitValve GetSlitValve(ModuleName module)
  116. {
  117. return null;
  118. }
  119. public virtual bool SetSlitValve(ModuleName module, bool isOpen, out string reason)
  120. {
  121. reason = string.Empty;
  122. return true;
  123. }
  124. public virtual bool CheckSlitValveOpen(ModuleName module)
  125. {
  126. return true;
  127. }
  128. public virtual bool CheckSlitValveClose(ModuleName module)
  129. {
  130. return true;
  131. }
  132. public virtual bool CheckIsoValveClose()
  133. {
  134. return true;
  135. }
  136. public virtual bool CheckIsoValveOpen()
  137. {
  138. return true;
  139. }
  140. public virtual void Monitor()
  141. {
  142. }
  143. public virtual void Terminate()
  144. {
  145. }
  146. public virtual void Reset()
  147. {
  148. }
  149. }
  150. }