SimulatorSystem.cs 131 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. using MECF.Framework.Common.CommonData;
  15. using MECF.Framework.Common.DataCenter;
  16. using System.Configuration;
  17. namespace Venus_Simulator.Instances
  18. {
  19. public class SimulatorSystem : Singleton<SimulatorSystem>
  20. {
  21. private PeriodicJob _thread;
  22. private Random _rd = new Random();
  23. ConfigType type;
  24. private RD_TRIG _trigATM = new RD_TRIG();
  25. private RD_TRIG _trigVAC = new RD_TRIG();
  26. private R_TRIG _trigLLExtend = new R_TRIG();
  27. private R_TRIG _trigLLRetract = new R_TRIG();
  28. private static int count = 0;
  29. private readonly float ATM_THRESHOLD = 750000;
  30. private readonly float ATM_PRESSURE = 760000;
  31. //private readonly float ATM_LoadLock_PRESSURE = 760000;
  32. private readonly uint VAC_SW_PRESSURE = 9500;
  33. private readonly uint PROCESS_GAUGE = 10000;
  34. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  35. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  36. public SimulatorSystem()
  37. {
  38. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  39. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  40. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  41. // TODO
  42. var section = ConfigurationManager.GetSection("customSettings") as System.Collections.Specialized.NameValueCollection;
  43. type = (ConfigType)Convert.ToInt32(section["SimulatorType"]);
  44. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  45. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  46. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  47. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  48. //double _OffsetTemp = SystemConfig.Instance.GetValue<double>($"PMA.Chiller.ChillerTemperatureOffset");
  49. }
  50. ~SimulatorSystem()
  51. {
  52. _thread?.Stop();
  53. }
  54. public void Initialize()
  55. {
  56. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  57. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  58. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  59. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  60. if (type == ConfigType.Kepler2200)
  61. {
  62. SetKepler2200TMDefaultValue();
  63. }
  64. else if (type == ConfigType.Kepler2300)
  65. {
  66. SetKepler2300TMDefaultValue();
  67. }
  68. else if (type == ConfigType.VenusSE)
  69. {
  70. SetSETMDefaultValue();
  71. }
  72. else if (type == ConfigType.VenusDE)
  73. {
  74. SetDETMDefaultValue();
  75. }
  76. Singleton<DataManager>.Instance.Initialize(false);
  77. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  78. }
  79. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  80. {
  81. switch (jetChamber)
  82. {
  83. case JetChamber.Kepler2300:
  84. // chamber
  85. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  86. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  87. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  88. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  89. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  90. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  91. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  92. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  93. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  94. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  95. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  96. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  97. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  98. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  99. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  100. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  101. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  102. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  103. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  104. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  105. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  106. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  107. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  108. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  109. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  110. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  111. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  112. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  113. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  114. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  115. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  116. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  117. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  118. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  119. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  120. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  121. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  122. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  123. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  124. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  125. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  126. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  127. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  128. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  129. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  130. //// pressure
  131. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  132. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  133. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  134. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  135. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  136. //// Temperature
  137. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  138. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  139. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  140. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  141. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  142. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  143. // Datetime
  144. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  145. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  146. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  147. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  148. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  149. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  150. break;
  151. case JetChamber.Kepler2200A:
  152. case JetChamber.Kepler2200B:
  153. if (jetChamber == JetChamber.Kepler2200B)
  154. {
  155. IO.DI[$"{mod}.DI_RF_Box_Interlock"].Value = true;
  156. }
  157. IO.DI[$"{mod}.DI_Wafer_Transfer_Posi_SW"].Value = true;
  158. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  159. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  160. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  161. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  162. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  163. IO.DI[$"{mod}.DI_Source_RF_Match_Interlock"].Value = true;
  164. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  165. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  166. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  167. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  168. IO.DI[$"{mod}.DI_TOP_Shield_Cover_closed"].Value = true;
  169. IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
  170. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
  171. IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
  172. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  173. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  174. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  175. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  176. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  177. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  178. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  179. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  180. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  181. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  182. IO.DI[$"{mod}.DI_GasBox_N2_Flow_Switch"].Value = true;
  183. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  184. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  185. //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  186. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  187. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  188. //IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  189. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  190. IO.DI[$"{mod}.DI_CHB_Water_Flow_Switch"].Value = true;
  191. IO.DI[$"{mod}.DI_SCRUBBER_OK"].Value = true;
  192. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  193. //IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  194. //// pressure
  195. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 100);
  196. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 100);
  197. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  198. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  199. //// Temperature
  200. // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  201. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
  202. SetAiValue($"{mod}.AI_Penning_Gauge_Pressure1", 100);
  203. // Datetime
  204. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  205. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  206. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  207. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  208. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  209. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  210. break;
  211. }
  212. }
  213. private void SetKepler2200TMDefaultValue()
  214. {
  215. ModuleName mod = ModuleName.TM;
  216. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  217. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  218. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  219. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  220. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  221. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  222. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  223. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  224. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  225. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  226. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  227. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  228. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  229. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  230. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  231. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  232. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  233. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  234. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  235. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  236. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  237. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  238. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  239. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  240. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  241. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  242. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  243. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  244. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  245. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  246. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  247. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  248. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  249. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  250. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  251. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  252. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  253. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  254. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  255. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  256. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  257. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  258. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  259. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  260. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  261. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  262. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  263. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  264. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  265. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  266. // Datetime
  267. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  268. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  269. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  270. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  271. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  272. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  273. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  274. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  275. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  276. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  277. {
  278. SetAiValue($"{mod}.AI_TM_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  279. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  280. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  281. }
  282. else
  283. {
  284. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 666);
  285. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 666);
  286. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 666);
  287. }
  288. }
  289. private void SetKepler2300TMDefaultValue()
  290. {
  291. ModuleName mod = ModuleName.TM;
  292. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  293. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  294. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  295. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  296. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  297. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  298. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  299. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  300. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  301. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  302. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  303. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  304. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  305. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  306. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  307. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  308. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  309. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  310. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  311. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  312. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  313. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  314. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  315. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  316. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  317. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  318. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  319. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  320. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  321. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  322. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  323. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  324. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  325. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  326. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  327. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  328. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  329. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  330. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  331. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  332. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  333. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  334. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  335. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  336. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  337. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  338. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  339. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  340. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  341. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  342. // Datetime
  343. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  344. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  345. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  346. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  347. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  348. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  349. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  350. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  351. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  352. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  353. {
  354. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  355. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  356. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  357. }
  358. else
  359. {
  360. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  361. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  362. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  363. }
  364. }
  365. private void SetSETMDefaultValue()
  366. {
  367. string mod = "SETM";
  368. IO.DI[$"{mod}.DI_System_CDA_Pressure_OK"].Value = true;
  369. IO.DI[$"{mod}.DI_LID_DOOR_CLOSED"].Value = true;
  370. IO.DI[$"{mod}.DI_VCE_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  371. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  372. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  373. IO.DI[$"{mod}.DI_VCE_ATM_SW"].Value = true;
  374. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  375. IO.DI[$"{mod}.DI_VCE_Wafer_Senser"].Value = true;
  376. IO.DI[$"{mod}.DI_PMA_Wafer_Senser"].Value = true;
  377. IO.DI[$"{mod}.DI_PMB_Wafer_Senser"].Value = true;
  378. IO.DI[$"{mod}.DI_PMC_Wafer_Senser"].Value = true;
  379. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  380. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW1"].Value = false;
  381. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW2"].Value = false;
  382. IO.DI[$"{mod}.DI_FA_Smoke_SW"].Value = false;
  383. IO.DI[$"{mod}.DI_Gas_Treatment_Alarm"].Value = false;
  384. IO.DI[$"{mod}.DI_SYSTEM_N2_Pressure_SW"].Value = true;
  385. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  386. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  387. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  388. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  389. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  390. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  391. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  392. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  393. IO.DI[$"{mod}.DI_TM_HE_Pressure_SW"].Value = true;
  394. IO.DI[$"{mod}.DI_TM_N2_Pressure_SW"].Value = true;
  395. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  396. IO.DI[$"{mod}.DI_PCW_Leak_SW"].Value = true;
  397. IO.DI[$"{mod}.DI_TM_CDA_Pressure_SW"].Value = true;
  398. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = false;
  399. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = false;
  400. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_VCE"].Value = true;
  401. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMA"].Value = true;
  402. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMB"].Value = true;
  403. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMC"].Value = true;
  404. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  405. SetAiValue($"{mod}.AI_VCE_Pressure", 3000);
  406. SetAiValue($"{mod}.AI_Foreline_Pressure", 3000);
  407. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  408. }
  409. private void SetDETMDefaultValue()
  410. {
  411. string mod = "DETM";
  412. IO.DI[$"{mod}.DI_Smif1_Ready_to_load"].Value = true;
  413. IO.DI[$"{mod}.DI_Smif1_Ready_to_unload"].Value = true;
  414. IO.DI[$"{mod}.DI_Smif2_Ready_to_load"].Value = true;
  415. IO.DI[$"{mod}.DI_Smif2_Ready_to_unload"].Value = true;
  416. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  417. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  418. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  419. IO.DI[$"{mod}.DI_ROBOT_TO_VCEA_RETRACT"].Value = true;
  420. IO.DI[$"{mod}.DI_ROBOT_TO_VCEB_RETRACT"].Value = true;
  421. IO.DI[$"{mod}.DI_ROBOT_TO_PMA_RETRACT"].Value = true;
  422. IO.DI[$"{mod}.DI_ROBOT_TO_PMB_RETRACT"].Value = true;
  423. IO.DI[$"{mod}.DI_ROBOT_TO_PMC_RETRACT"].Value = true;
  424. IO.DI[$"{mod}.DI_ROBOT_TO_PMD_RETRACT"].Value = true;
  425. IO.DI[$"{mod}.DI_VCEA_Wafer_Sensor"].Value = true;
  426. IO.DI[$"{mod}.DI_VCEB_Wafer_Sensor"].Value = true;
  427. IO.DI[$"{mod}.DI_PMA_Wafer_Sensor"].Value = true;
  428. IO.DI[$"{mod}.DI_PMB_Wafer_Sensor"].Value = true;
  429. IO.DI[$"{mod}.DI_PMC_Wafer_Sensor"].Value = true;
  430. IO.DI[$"{mod}.DI_PMD_Wafer_Sensor"].Value = true;
  431. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  432. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  433. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  434. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  435. IO.DI[$"{mod}.DI_TM_N2_1_SW"].Value = true;
  436. IO.DI[$"{mod}.DI_TM_N2_2_SW"].Value = true;
  437. IO.DI[$"{mod}.DI_TM_CDA_SW"].Value = true;
  438. IO.DI[$"{mod}.DI_TM_He_SW"].Value = true;
  439. IO.DI[$"{mod}.DI_LEAK"].Value = true;
  440. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = true;
  441. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = true;
  442. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  443. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  444. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out1"].Value = false;
  445. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out2"].Value = false;
  446. IO.DI[$"{mod}.DI_FACTORY_SMOKE_Out"].Value = false;
  447. IO.DI[$"{mod}.DI_Abnormal_Exhaust_Gas"].Value = true;
  448. IO.DI[$"{mod}.DI_VCEA_Cassette_Present"].Value = true;
  449. IO.DI[$"{mod}.DI_VCEB_Cassette_Present"].Value = true;
  450. IO.DI[$"{mod}.DI_VCEA_ADR_LOCKED"].Value = true;
  451. IO.DI[$"{mod}.DI_VCEB_ADR_LOCKED"].Value = true;
  452. IO.DI[$"{mod}.DI_TM_LID_Close"].Value = true;
  453. IO.DI[$"{mod}.DI_LEFT_SMIF_READY"].Value = true;
  454. IO.DI[$"{mod}.DI_LEFT_SMIF_POD_INPLACE"].Value = true;
  455. IO.DI[$"{mod}.DI_RIGHT_SMIF_POD_INPLACE"].Value = true;
  456. IO.DI[$"{mod}.DI_LEFT_SMIF_ERROR"].Value = true;
  457. IO.DI[$"{mod}.DI_RIGHT_SMIF_ERROR"].Value = true;
  458. IO.DI[$"{mod}.DI_VCEA_EXTEND_ENABLE"].Value = true;
  459. IO.DI[$"{mod}.DI_VCEB_EXTEND_ENABLE"].Value = true;
  460. IO.DI[$"{mod}.DI_PMA_EXTEND_ENABLE"].Value = true;
  461. IO.DI[$"{mod}.DI_PMB_EXTEND_ENABLE"].Value = true;
  462. IO.DI[$"{mod}.DI_PMC_EXTEND_ENABLE"].Value = true;
  463. IO.DI[$"{mod}.DI_EMO"].Value = false;
  464. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  465. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  466. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  467. SetAiValue($"{mod}.AI_Left_VCE_Pressure", 3000);
  468. SetAiValue($"{mod}.AI_Right_VCE_Pressure", 3000);
  469. SetAiValue($"{mod}.AI_VCE_Foreline_Pressure", 20);
  470. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 20);
  471. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  472. }
  473. private bool OnMonitor()
  474. {
  475. try
  476. {
  477. foreach (var item in jetChambers)
  478. {
  479. switch (item.Value)
  480. {
  481. case JetChamber.Kepler2300:
  482. MonitorSlitDoorInTM(item.Key);
  483. MonitorPin(item.Key);
  484. MonitorPressure_Kepler(item.Key);
  485. //MonitorTemperature(item.Key);
  486. MonitorGas(item.Key);
  487. this.SimulateHe(item.Key);
  488. //MonitorRF(item.Key);
  489. ChangeTime(item.Key);
  490. //MonitorIOPumpCtrl(item.Key);
  491. MonitorLid(item.Key);
  492. break;
  493. case JetChamber.Kepler2200A:
  494. case JetChamber.Kepler2200B:
  495. MonitorSlitDoorInTM(item.Key);
  496. MonitorPressure_Kepler2200(item.Key);
  497. //MonitorTemperature(item.Key);
  498. MonitorGas(item.Key);
  499. MonitorKeplerTMGas();
  500. // MonitorRF(item.Key);
  501. ChangeTime(item.Key);
  502. //MonitorIOPumpCtrl(item.Key);
  503. MonitorLid(item.Key);
  504. MonitorIOHighTemperatureHeater(item.Key);
  505. MonitorKepler2200Heater(item.Key);
  506. break;
  507. }
  508. }
  509. //ChangeTime(ModuleName.TM);
  510. if (type == ConfigType.Kepler2200)
  511. {
  512. ChangeTime(ModuleName.TM);
  513. MonitorMFSlitDoor();
  514. MonitorMFKepler2200Pressure();
  515. }
  516. else if (type == ConfigType.Kepler2300)
  517. {
  518. ChangeTime(ModuleName.TM);
  519. MonitorMFSlitDoor();
  520. MonitorMFKepler2300Pressure();
  521. }
  522. else if (type == ConfigType.VenusSE)
  523. {
  524. MonitorSEMFSlitDoor();
  525. MonitorSEMFPressure();
  526. //MonitorDEMFSlitDoor();
  527. //MonitorDEMFPressure();
  528. }
  529. else if (type == ConfigType.VenusDE)
  530. {
  531. MonitorDEMFSlitDoor();
  532. MonitorDEMFPressure();
  533. }
  534. }
  535. catch (Exception e)
  536. {
  537. LOG.WriteExeption(e);
  538. }
  539. return true;
  540. }
  541. private void ChangeTime(ModuleName mod)
  542. {
  543. // Heartbeat with PLC
  544. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  545. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  546. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  547. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  548. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  549. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  550. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  551. }
  552. //void MonitorVenuSESlitDoor(ModuleName mod)
  553. //{
  554. //}
  555. void MonitorSlitDoorInPM(ModuleName mod)
  556. {
  557. // slit door open
  558. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  559. {
  560. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  561. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  562. }
  563. // slit door close
  564. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  565. {
  566. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  567. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  568. }
  569. }
  570. void MonitorLinerDoor(ModuleName mod)
  571. {
  572. // slit door open
  573. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Open"].Value)
  574. {
  575. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  576. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  577. }
  578. // slit door close
  579. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Close"].Value)
  580. {
  581. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = false;
  582. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = true;
  583. }
  584. }
  585. void MonitorSlitDoorInTM(ModuleName mod)
  586. {
  587. // slit door open
  588. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Open"].Value)
  589. {
  590. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  591. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  592. }
  593. // slit door close
  594. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Close"].Value)
  595. {
  596. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  597. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  598. }
  599. }
  600. void MonitorMFSlitDoor()
  601. {
  602. ModuleName mod = ModuleName.TM;
  603. // LLA T door open
  604. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  605. {
  606. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  607. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  608. }
  609. // LLB T door open
  610. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  611. {
  612. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  613. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  614. }
  615. // LLA E door open
  616. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  617. {
  618. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  619. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  620. }
  621. // LLB E door open
  622. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  623. {
  624. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  625. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  626. }
  627. // LLA T door close
  628. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  629. {
  630. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  631. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  632. }
  633. // LLB T door close
  634. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  635. {
  636. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  637. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  638. }
  639. // LLA E door close
  640. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  641. {
  642. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  643. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  644. }
  645. // LLB E door close
  646. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  647. {
  648. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  649. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  650. }
  651. // PMA slitdoor door close/open
  652. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  653. {
  654. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  655. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  656. }
  657. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  658. {
  659. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = true;
  660. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = false;
  661. }
  662. // PMB slitdoor door close/open
  663. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  664. {
  665. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  666. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  667. }
  668. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  669. {
  670. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = true;
  671. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = false;
  672. }
  673. // PMC slitdoor door close/open
  674. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  675. {
  676. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  677. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  678. }
  679. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  680. {
  681. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = true;
  682. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = false;
  683. }
  684. // PMD slitdoor door close/open
  685. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  686. {
  687. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  688. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  689. }
  690. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  691. {
  692. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = true;
  693. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = false;
  694. }
  695. SetAiValue($"{mod}.AI_CDA_PRES_PV", 1);
  696. SetAiValue($"{mod}.AI_N2_PRES_PV", 2);
  697. SetAiValue($"{mod}.AI_TM_WATER_FLOW_PV", 3);
  698. SetAiValue($"{mod}.AI_LLA_WATER_FLOW_PV", 4);
  699. SetAiValue($"{mod}.AI_LLB_WATER_FLOW_PV", 5);
  700. }
  701. void MonitorSEMFSlitDoor()
  702. {
  703. string mod = "SETM";
  704. // VCE T door open
  705. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Open"].Value)
  706. {
  707. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = true;
  708. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = false;
  709. }
  710. // VCE T door Close
  711. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Close"].Value)
  712. {
  713. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  714. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  715. }
  716. //pma
  717. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Open"].Value)
  718. {
  719. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = true;
  720. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = false;
  721. }
  722. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Close"].Value)
  723. {
  724. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  725. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  726. }
  727. //pmb
  728. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Open"].Value)
  729. {
  730. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = true;
  731. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = false;
  732. }
  733. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Close"].Value)
  734. {
  735. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  736. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  737. }
  738. //pmc
  739. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Open"].Value)
  740. {
  741. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = true;
  742. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = false;
  743. }
  744. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Close"].Value)
  745. {
  746. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  747. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  748. }
  749. }
  750. void MonitorDEMFSlitDoor()
  751. {
  752. string mod = "DETM";
  753. // VCE L door open
  754. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Open"].Value)
  755. {
  756. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = true;
  757. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = false;
  758. }
  759. // VCE R door open
  760. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Open"].Value)
  761. {
  762. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = true;
  763. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = false;
  764. }
  765. // VCE L door Close
  766. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Close"].Value)
  767. {
  768. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  769. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  770. }
  771. // VCE R door Close
  772. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Close"].Value)
  773. {
  774. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  775. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  776. }
  777. //pma
  778. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  779. {
  780. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = true;
  781. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = false;
  782. }
  783. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  784. {
  785. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = false;
  786. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = true;
  787. }
  788. //pmb
  789. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  790. {
  791. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = true;
  792. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = false;
  793. }
  794. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  795. {
  796. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = false;
  797. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = true;
  798. }
  799. //pmc
  800. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  801. {
  802. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = true;
  803. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = false;
  804. }
  805. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  806. {
  807. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = false;
  808. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = true;
  809. }
  810. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  811. {
  812. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_POS"].Value = true;
  813. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_POS"].Value = false;
  814. }
  815. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  816. {
  817. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_POS"].Value = false;
  818. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_POS"].Value = true;
  819. }
  820. if (IO.DO[$"{mod}.DO_TM_Soft_Pump"].Value)
  821. {
  822. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  823. }
  824. else
  825. {
  826. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = false;
  827. }
  828. if (IO.DO[$"{mod}.DO_TM_Fast_Pump"].Value)
  829. {
  830. IO.DI[$"{mod}.DI_TM_Fast_Pump"].Value = true;
  831. }
  832. else
  833. {
  834. IO.DI[$"{mod}.DI_TM_Fast_Pump"].Value = false;
  835. }
  836. if (IO.DO[$"{mod}.DO_TM_Soft_Vent"].Value)
  837. {
  838. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  839. }
  840. else
  841. {
  842. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = false;
  843. }
  844. }
  845. void MonitorPin(ModuleName mod)
  846. {
  847. // lift pin up
  848. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  849. {
  850. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  851. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  852. }
  853. }
  854. void MonitorLid(ModuleName mod)
  855. {
  856. // lift pin up
  857. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  858. {
  859. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  860. }
  861. }
  862. void MonitorExtendAndRetract(ModuleName mod)
  863. {
  864. // Extend
  865. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  866. if (_trigLLExtend.Q)
  867. {
  868. _trigLLRetract.RST = true;
  869. Thread.Sleep(500);
  870. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  871. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  872. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  873. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  874. }
  875. // Retract
  876. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  877. if (_trigLLRetract.Q)
  878. {
  879. count++;
  880. _trigLLExtend.RST = true;
  881. Thread.Sleep(500);
  882. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  883. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  884. if (count == 1)
  885. {
  886. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  887. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  888. }
  889. else if (count == 2)
  890. {
  891. count = 0;
  892. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  893. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  894. }
  895. }
  896. }
  897. void MonitorPressure(ModuleName mod)
  898. {
  899. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  900. // Loadlock pressure
  901. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  902. // Foreline
  903. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  904. {
  905. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  906. }
  907. else
  908. {
  909. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  910. }
  911. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  912. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  913. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  914. //float chamber_pressure = GetMockChamberPressure(mod);
  915. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  916. // soft pump & fast pump
  917. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  918. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  919. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  920. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  921. {
  922. //任意泵打开
  923. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  924. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  925. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  926. {//开双泵
  927. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  928. {
  929. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  930. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  931. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  932. }
  933. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  934. {
  935. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  936. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  937. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  938. }
  939. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  940. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  941. }
  942. else if (fast_pump_vlv.Value)//开
  943. {
  944. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  945. {
  946. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  947. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  948. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  949. }
  950. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  951. {
  952. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  953. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  954. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  955. }
  956. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  957. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  958. }
  959. else if (soft_pump_vlv.Value)
  960. {
  961. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  962. {
  963. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  964. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  965. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  966. }
  967. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  968. {
  969. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  970. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  971. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  972. }
  973. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  974. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  975. }
  976. else if (turbo_pump_vlv.Value)
  977. {
  978. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  979. if ((getAiValue_ChamberPressure - 500) >= 0)
  980. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  981. else
  982. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  983. if ((getAiValue_ProcessPressure - 500) >= 0)
  984. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  985. else
  986. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  987. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  988. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  989. }
  990. }
  991. // fast vent & purge
  992. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  993. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  994. //if (vent_vlv.Value || purge_vlv.Value)
  995. //{
  996. // if (vent_vlv.Value && purge_vlv.Value)
  997. // {
  998. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  999. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1000. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1001. // {
  1002. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  1003. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1004. // }
  1005. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1006. // {
  1007. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1008. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1009. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1010. // }
  1011. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  1012. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  1013. // }
  1014. // else
  1015. //
  1016. if (vent_vlv.Value)
  1017. {
  1018. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1019. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1020. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1021. {
  1022. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1023. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1024. }
  1025. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1026. {
  1027. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1028. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1029. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1030. }
  1031. else
  1032. {
  1033. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1034. }
  1035. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1036. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1037. }
  1038. // Loadlock Pumping Valve
  1039. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  1040. if (Loadlock_pump_vlv.Value)
  1041. {
  1042. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  1043. }
  1044. // Loadlock vent
  1045. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  1046. if (Loadlock_vent_vlv.Value)
  1047. {
  1048. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  1049. }
  1050. // 压力值越界,复位
  1051. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1052. if (chamber_pressure1 > ATM_PRESSURE)
  1053. {
  1054. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1055. }
  1056. else if (chamber_pressure1 < 20)
  1057. {
  1058. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1059. }
  1060. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1061. if (process_pressure1 > PROCESS_GAUGE)
  1062. {
  1063. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1064. }
  1065. else if (process_pressure1 < 20)
  1066. {
  1067. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1068. }
  1069. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1070. if (foreline_pressure > 10000)
  1071. {
  1072. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  1073. }
  1074. else if (foreline_pressure < 150)
  1075. {
  1076. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  1077. }
  1078. // 模拟压力计漂移
  1079. //int p1 = (int)GetMockChamberPressure(mod);
  1080. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  1081. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  1082. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  1083. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  1084. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  1085. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1086. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  1087. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  1088. // 根据当前压力值设定信号
  1089. //float chamber_pressure2 = GetMockChamberPressure(mod);
  1090. // ATM switch
  1091. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1092. // VAC switch
  1093. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1094. // Throttle valve
  1095. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  1096. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  1097. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  1098. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  1099. // 压力值
  1100. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1101. //{
  1102. // short increase = (short)_rd.Next(20, 30);
  1103. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  1104. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1105. // {
  1106. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1107. // }
  1108. //}
  1109. //else
  1110. //{
  1111. // short increase = (short)_rd.Next(20, 30);
  1112. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  1113. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1114. // {
  1115. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1116. // }
  1117. //}
  1118. //// 位置值
  1119. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1120. //{
  1121. // short increase = (short)_rd.Next(20, 30);
  1122. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  1123. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1124. // {
  1125. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1126. // }
  1127. //}
  1128. //else
  1129. //{
  1130. // short increase = (short)_rd.Next(20, 30);
  1131. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  1132. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1133. // {
  1134. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1135. // }
  1136. //}
  1137. }
  1138. void MonitorSEPressure(ModuleName mod)
  1139. {
  1140. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1141. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1142. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1143. // Foreline
  1144. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1145. {
  1146. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1147. }
  1148. else
  1149. {
  1150. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1151. }
  1152. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1153. // soft pump & fast pump
  1154. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1155. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1156. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1157. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1158. {
  1159. //任意泵打开
  1160. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1161. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1162. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1163. {//开双泵
  1164. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1165. {
  1166. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1167. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1168. }
  1169. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1170. {
  1171. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1172. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1173. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1174. }
  1175. }
  1176. else if (fast_pump_vlv.Value)//开
  1177. {
  1178. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1179. {
  1180. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1181. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1182. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1183. }
  1184. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1185. {
  1186. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1187. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1188. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1189. }
  1190. }
  1191. else if (soft_pump_vlv.Value)
  1192. {
  1193. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1194. {
  1195. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1196. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1197. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1198. }
  1199. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1200. {
  1201. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1202. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1203. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1204. }
  1205. }
  1206. else if (turbo_pump_vlv.Value)
  1207. {
  1208. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1209. if ((getAiValue_ChamberPressure - 500) >= 0)
  1210. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1211. else
  1212. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1213. if ((getAiValue_ProcessPressure - 500) >= 0)
  1214. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1215. else
  1216. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1217. }
  1218. }
  1219. // fast vent & purge
  1220. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1221. if (vent_vlv.Value)
  1222. {
  1223. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1224. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1225. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1226. {
  1227. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1228. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1229. }
  1230. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1231. {
  1232. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1233. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1234. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1235. }
  1236. else
  1237. {
  1238. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1239. }
  1240. }
  1241. // Loadlock Pumping Valve
  1242. // 压力值越界,复位
  1243. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1244. if (chamber_pressure1 > ATM_PRESSURE)
  1245. {
  1246. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1247. }
  1248. else if (chamber_pressure1 < 20)
  1249. {
  1250. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1251. }
  1252. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1253. if (process_pressure1 > PROCESS_GAUGE)
  1254. {
  1255. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1256. }
  1257. else if (process_pressure1 < 20)
  1258. {
  1259. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1260. }
  1261. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1262. if (foreline_pressure > 1999)
  1263. {
  1264. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1999);
  1265. }
  1266. else if (foreline_pressure < 150)
  1267. {
  1268. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1269. }
  1270. // ATM switch
  1271. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1272. // VAC switch
  1273. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1274. }
  1275. void MonitorDEPressure(ModuleName mod)
  1276. {
  1277. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1278. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1279. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1280. // Foreline
  1281. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1282. {
  1283. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1284. }
  1285. else
  1286. {
  1287. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1288. }
  1289. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1290. // soft pump & fast pump
  1291. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1292. //DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1293. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1294. if (fast_pump_vlv.Value || turbo_pump_vlv.Value)
  1295. {
  1296. //任意泵打开
  1297. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1298. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1299. if (fast_pump_vlv.Value)
  1300. {//开双泵
  1301. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1302. {
  1303. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1304. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1305. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1306. }
  1307. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1308. {
  1309. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1310. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1311. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1312. }
  1313. }
  1314. else if (turbo_pump_vlv.Value)
  1315. {
  1316. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1317. if ((getAiValue_ChamberPressure - 500) >= 0)
  1318. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1319. else
  1320. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1321. if ((getAiValue_ProcessPressure - 500) >= 0)
  1322. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1323. else
  1324. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1325. }
  1326. }
  1327. // fast vent & purge
  1328. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1329. if (vent_vlv.Value)
  1330. {
  1331. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1332. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1333. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1334. {
  1335. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1336. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1337. }
  1338. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1339. {
  1340. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1341. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1342. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1343. }
  1344. else
  1345. {
  1346. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1347. }
  1348. }
  1349. // Loadlock Pumping Valve
  1350. // 压力值越界,复位
  1351. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1352. if (chamber_pressure1 > ATM_PRESSURE)
  1353. {
  1354. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1355. }
  1356. else if (chamber_pressure1 < 20)
  1357. {
  1358. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1359. }
  1360. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1361. if (process_pressure1 > PROCESS_GAUGE)
  1362. {
  1363. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1364. }
  1365. else if (process_pressure1 < 20)
  1366. {
  1367. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1368. }
  1369. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1370. if (foreline_pressure > 10000)
  1371. {
  1372. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1373. }
  1374. else if (foreline_pressure < 150)
  1375. {
  1376. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1377. }
  1378. // ATM switch
  1379. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1380. // VAC switch
  1381. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1382. }
  1383. void MonitorPressure_Kepler(ModuleName mod)
  1384. {
  1385. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1386. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1387. {
  1388. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1389. }
  1390. else
  1391. {
  1392. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1393. }
  1394. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1395. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1396. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1397. //float chamber_pressure = GetMockChamberPressure(mod);
  1398. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1399. // soft pump & fast pump
  1400. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1401. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1402. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1403. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1404. {
  1405. //任意泵打开
  1406. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1407. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1408. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1409. {//开双泵
  1410. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1411. {
  1412. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1413. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1414. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1415. }
  1416. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1417. {
  1418. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1419. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1420. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1421. }
  1422. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1423. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1424. }
  1425. else if (fast_pump_vlv.Value)//开
  1426. {
  1427. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1428. {
  1429. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1430. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1431. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1432. }
  1433. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1434. {
  1435. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1436. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1437. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1438. }
  1439. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1440. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1441. }
  1442. else if (soft_pump_vlv.Value)
  1443. {
  1444. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1445. {
  1446. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1447. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1448. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1449. }
  1450. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1451. {
  1452. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1453. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1454. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1455. }
  1456. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1457. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1458. }
  1459. else if (turbo_pump_vlv.Value)
  1460. {
  1461. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1462. if ((getAiValue_ChamberPressure - 500) >= 0)
  1463. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1464. else
  1465. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1466. if ((getAiValue_ProcessPressure - 500) >= 0)
  1467. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1468. else
  1469. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1470. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1471. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1472. }
  1473. }
  1474. // fast vent & purge
  1475. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1476. if (vent_vlv.Value)
  1477. {
  1478. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1479. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1480. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1481. {
  1482. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1483. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1484. }
  1485. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1486. {
  1487. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1488. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1489. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1490. }
  1491. else
  1492. {
  1493. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1494. }
  1495. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1496. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1497. }
  1498. // Loadlock Pumping Valve
  1499. // 压力值越界,复位
  1500. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1501. if (chamber_pressure1 > ATM_PRESSURE)
  1502. {
  1503. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1504. }
  1505. else if (chamber_pressure1 < 20)
  1506. {
  1507. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 1);
  1508. }
  1509. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1510. if (process_pressure1 > PROCESS_GAUGE)
  1511. {
  1512. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1513. }
  1514. else if (process_pressure1 < 20)
  1515. {
  1516. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1517. }
  1518. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1519. if (foreline_pressure > 10000)
  1520. {
  1521. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1522. }
  1523. else if (foreline_pressure < 150)
  1524. {
  1525. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1526. }
  1527. // ATM switch
  1528. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1529. // VAC switch
  1530. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1531. }
  1532. void MonitorPressure_Kepler2200(ModuleName mod)
  1533. {
  1534. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1535. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1536. {
  1537. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(50, 60));
  1538. }
  1539. else
  1540. {
  1541. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(50, 60));
  1542. }
  1543. //SetAiValue($"{mod}.{sAI_Foreline}", 3000);
  1544. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1545. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1546. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1547. //float chamber_pressure = GetMockChamberPressure(mod);
  1548. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1549. // soft pump & fast pump
  1550. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1551. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1552. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1553. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1554. {
  1555. //任意泵打开
  1556. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1557. //float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1558. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1559. {
  1560. //开双泵
  1561. if ((getAiValue_ChamberPressure - 12000) >= 0)
  1562. {
  1563. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 12000);
  1564. }
  1565. else
  1566. {
  1567. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0.00001F);
  1568. }
  1569. //if (getAiValue_ChamberPressure > 1000)
  1570. //{
  1571. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa( getAiValue_ChamberPressure - 3000 > 0 ? getAiValue_ChamberPressure - 3000 : 0);
  1572. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1573. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1574. //}
  1575. //else if ( getAiValue_ChamberPressure <= 1000)
  1576. //{
  1577. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 150 > 0 ? getAiValue_ProcessPressure - 150 : 0);
  1578. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1579. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1580. //}
  1581. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1582. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1583. }
  1584. else if (fast_pump_vlv.Value)//开
  1585. {
  1586. if ((getAiValue_ChamberPressure - 8000) >= 0)
  1587. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 8000);
  1588. else
  1589. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0.00001F);
  1590. }
  1591. else if (soft_pump_vlv.Value)
  1592. {
  1593. if ((getAiValue_ChamberPressure - 4000) >= 0)
  1594. {
  1595. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 4000);
  1596. }
  1597. else
  1598. {
  1599. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0.00001F);
  1600. }
  1601. }
  1602. else if (turbo_pump_vlv.Value)
  1603. {
  1604. if ((getAiValue_ChamberPressure - 50) >= 0)
  1605. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 50);
  1606. else
  1607. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0.00001F);
  1608. }
  1609. }
  1610. // fast vent & purge
  1611. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1612. DOAccessor gas_final_vlv = IO.DO[$"{mod}.DO_Gas_Final_Valve"];
  1613. if (vent_vlv.Value && gas_final_vlv.Value)
  1614. {
  1615. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1616. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1617. if (getAiValue_ChamberPressure > 1000)
  1618. {
  1619. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1620. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1621. }
  1622. else if (getAiValue_ChamberPressure <= 1000)
  1623. {
  1624. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1625. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1626. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1627. }
  1628. else
  1629. {
  1630. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 2500);
  1631. }
  1632. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1633. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1634. }
  1635. // Loadlock Pumping Valve
  1636. // 压力值越界,复位
  1637. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1638. if (chamber_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  1639. {
  1640. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  1641. }
  1642. else if (chamber_pressure1 < 20)
  1643. {
  1644. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 0.51001F);
  1645. }
  1646. //float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1647. //if (process_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(PROCESS_GAUGE))
  1648. //{
  1649. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1650. //}
  1651. //else if (process_pressure1 < 20)
  1652. //{
  1653. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1654. //}
  1655. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1656. if (foreline_pressure > 1000)
  1657. {
  1658. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1000);
  1659. }
  1660. else if (foreline_pressure < 15)
  1661. {
  1662. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 15);
  1663. }
  1664. // ATM switch
  1665. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  1666. // VAC switch
  1667. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  1668. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0.00001F);
  1669. //var chamberPressure = GetAiValue($"{mod}.AI_Chamber_Pressure_10t");
  1670. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa( GetAiValue($"{mod}.AI_Chamber_Pressure_10t")));
  1671. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(GetAiValue($"{mod}.AI_Foreline_Pressure_10t")));
  1672. SetAiValue($"{mod}.{sAI_Foreline}",200);
  1673. }
  1674. void MonitorSEMFPressure()
  1675. {
  1676. string mod = "SETM";
  1677. string VCE_ChamberPressure = "AI_VCE_Pressure";
  1678. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1679. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pumping"];
  1680. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pumping"];
  1681. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1682. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1683. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Pumping"];
  1684. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Pumping"];
  1685. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Vent"];
  1686. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Vent"];
  1687. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1688. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1689. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1690. {
  1691. if (getAiValue_TM_ChamberPressure > 10000)
  1692. {
  1693. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1694. }
  1695. else if (getAiValue_TM_ChamberPressure <= 10000)
  1696. {
  1697. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1698. }
  1699. }
  1700. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1701. {
  1702. if (getAiValue_TM_ChamberPressure > 10000)
  1703. {
  1704. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1705. }
  1706. else if (getAiValue_TM_ChamberPressure <= 10000)
  1707. {
  1708. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1709. }
  1710. }
  1711. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1712. {
  1713. if (getAiValue_VCE_ChamberPressure > 10000)
  1714. {
  1715. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1716. }
  1717. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1718. {
  1719. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1720. }
  1721. }
  1722. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1723. {
  1724. if (getAiValue_VCE_ChamberPressure > 10000)
  1725. {
  1726. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1727. }
  1728. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1729. {
  1730. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1731. }
  1732. }
  1733. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1734. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1735. {
  1736. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1737. }
  1738. else if (getAiValue_VCE_ChamberPressure < 20)
  1739. {
  1740. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1741. }
  1742. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1743. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1744. {
  1745. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1746. }
  1747. else if (getAiValue_TM_ChamberPressure < 20)
  1748. {
  1749. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1750. }
  1751. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1752. // VAC switch
  1753. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1754. }
  1755. void MonitorDEMFPressure()
  1756. {
  1757. string mod = "DETM";
  1758. string AI_Left_VCE_Pressure = "AI_Left_VCE_Pressure";
  1759. string AI_Right_VCE_Pressure = "AI_Right_VCE_Pressure";
  1760. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1761. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pump"];
  1762. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pump"];
  1763. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1764. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1765. DOAccessor DO_VCEA_Fast_Pump = IO.DO[$"{mod}.DO_VCEA_Fast_Pump"];
  1766. DOAccessor DO_VCEA_Soft_Pump = IO.DO[$"{mod}.DO_VCEA_Soft_Pump"];
  1767. DOAccessor DO_VCEB_Fast_Pump = IO.DO[$"{mod}.DO_VCEB_Fast_Pump"];
  1768. DOAccessor DO_VCEB_Soft_Pump = IO.DO[$"{mod}.DO_VCEB_Soft_Pump"];
  1769. DOAccessor DO_VCEA_Fast_Vent = IO.DO[$"{mod}.DO_VCEA_Fast_Vent"];
  1770. DOAccessor DO_VCEA_Soft_Vent = IO.DO[$"{mod}.DO_VCEA_Soft_Vent"];
  1771. DOAccessor DO_VCEB_Fast_Vent = IO.DO[$"{mod}.DO_VCEB_Fast_Vent"];
  1772. DOAccessor DO_VCEB_Soft_Vent = IO.DO[$"{mod}.DO_VCEB_Soft_Vent"];
  1773. float getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1774. float getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1775. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1776. if (DO_VCEA_Fast_Pump.Value || DO_VCEA_Soft_Pump.Value)
  1777. {
  1778. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1779. {
  1780. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 30000);
  1781. }
  1782. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1783. {
  1784. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 1500);
  1785. }
  1786. }
  1787. if (DO_VCEB_Fast_Pump.Value || DO_VCEB_Soft_Pump.Value)
  1788. {
  1789. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1790. {
  1791. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 30000);
  1792. }
  1793. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1794. {
  1795. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 1500);
  1796. }
  1797. }
  1798. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1799. {
  1800. if (getAiValue_TM_ChamberPressure > 10000)
  1801. {
  1802. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1803. }
  1804. else if (getAiValue_TM_ChamberPressure <= 10000)
  1805. {
  1806. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1807. }
  1808. }
  1809. if (DO_VCEA_Fast_Vent.Value || DO_VCEA_Soft_Vent.Value)
  1810. {
  1811. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1812. {
  1813. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 30000);
  1814. }
  1815. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1816. {
  1817. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 1500);
  1818. }
  1819. }
  1820. if (DO_VCEB_Fast_Vent.Value || DO_VCEB_Soft_Vent.Value)
  1821. {
  1822. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1823. {
  1824. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 30000);
  1825. }
  1826. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1827. {
  1828. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 1500);
  1829. }
  1830. }
  1831. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1832. {
  1833. if (getAiValue_TM_ChamberPressure > 10000)
  1834. {
  1835. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1836. }
  1837. else if (getAiValue_TM_ChamberPressure <= 10000)
  1838. {
  1839. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1840. }
  1841. }
  1842. getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1843. if (getAiValue_AI_Left_VCE_Pressure > ATM_PRESSURE)
  1844. {
  1845. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", ATM_PRESSURE);
  1846. }
  1847. else if (getAiValue_AI_Left_VCE_Pressure < 20)
  1848. {
  1849. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", 20);
  1850. }
  1851. getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1852. if (getAiValue_AI_Right_VCE_Pressure > ATM_PRESSURE)
  1853. {
  1854. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", ATM_PRESSURE);
  1855. }
  1856. else if (getAiValue_AI_Right_VCE_Pressure < 20)
  1857. {
  1858. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", 20);
  1859. }
  1860. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1861. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1862. {
  1863. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1864. }
  1865. else if (getAiValue_TM_ChamberPressure < 20)
  1866. {
  1867. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1868. }
  1869. // ATM switch
  1870. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  1871. // VAC switch
  1872. // ATM switch
  1873. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") > ATM_THRESHOLD;
  1874. // ATM switch
  1875. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") > ATM_THRESHOLD;
  1876. }
  1877. void MonitorMFKepler2200Pressure()
  1878. {
  1879. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  1880. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  1881. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  1882. ModuleName mod = ModuleName.TM;
  1883. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  1884. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  1885. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  1886. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  1887. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  1888. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  1889. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  1890. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  1891. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  1892. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  1893. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  1894. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  1895. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1896. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1897. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1898. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  1899. {
  1900. if (getAiValue_LLA_ChamberPressure > 20000)
  1901. {
  1902. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 12000);
  1903. }
  1904. else if(getAiValue_LLA_ChamberPressure > 10000)
  1905. {
  1906. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 3000);
  1907. }
  1908. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1909. {
  1910. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 500);
  1911. }
  1912. }
  1913. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  1914. {
  1915. if (getAiValue_LLB_ChamberPressure > 20000)
  1916. {
  1917. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 12000);
  1918. }
  1919. else if (getAiValue_LLB_ChamberPressure > 10000)
  1920. {
  1921. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 3000);
  1922. }
  1923. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1924. {
  1925. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 500);
  1926. }
  1927. }
  1928. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1929. {
  1930. if (getAiValue_TM_ChamberPressure > 10000)
  1931. {
  1932. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1933. }
  1934. else if (getAiValue_TM_ChamberPressure <= 10000)
  1935. {
  1936. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1937. }
  1938. }
  1939. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  1940. {
  1941. if (getAiValue_LLA_ChamberPressure > 20000)
  1942. {
  1943. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 13000);
  1944. }
  1945. else if (getAiValue_LLA_ChamberPressure > 10000)
  1946. {
  1947. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 2100);
  1948. }
  1949. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1950. {
  1951. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 500);
  1952. }
  1953. }
  1954. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  1955. {
  1956. if (getAiValue_LLB_ChamberPressure > 20000)
  1957. {
  1958. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 13000);
  1959. }
  1960. else if (getAiValue_LLB_ChamberPressure > 10000)
  1961. {
  1962. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 2100);
  1963. }
  1964. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1965. {
  1966. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 500);
  1967. }
  1968. }
  1969. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1970. {
  1971. if (getAiValue_TM_ChamberPressure > 10000)
  1972. {
  1973. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1974. }
  1975. else if (getAiValue_TM_ChamberPressure <= 10000)
  1976. {
  1977. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1978. }
  1979. }
  1980. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1981. if (getAiValue_LLA_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  1982. {
  1983. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  1984. }
  1985. else if (getAiValue_LLA_ChamberPressure < 3)
  1986. {
  1987. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 0.5F);
  1988. }
  1989. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1990. if (getAiValue_LLB_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  1991. {
  1992. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  1993. }
  1994. else if (getAiValue_LLB_ChamberPressure < 3)
  1995. {
  1996. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 0.5F);
  1997. }
  1998. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1999. if (getAiValue_TM_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2000. {
  2001. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2002. }
  2003. else if (getAiValue_TM_ChamberPressure < 3)
  2004. {
  2005. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 3);
  2006. }
  2007. // ATM switch
  2008. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2009. // VAC switch
  2010. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2011. // ATM switch
  2012. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2013. // VAC switch
  2014. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2015. // ATM switch
  2016. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2017. // VAC switch
  2018. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2019. }
  2020. void MonitorMFKepler2300Pressure()
  2021. {
  2022. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  2023. //{
  2024. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2025. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2026. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2027. ModuleName mod = ModuleName.TM;
  2028. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2029. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2030. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2031. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2032. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2033. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2034. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2035. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2036. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2037. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2038. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2039. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2040. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2041. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2042. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2043. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2044. {
  2045. if (getAiValue_LLA_ChamberPressure > 10000)
  2046. {
  2047. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  2048. }
  2049. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2050. {
  2051. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  2052. }
  2053. }
  2054. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2055. {
  2056. if (getAiValue_LLB_ChamberPressure > 10000)
  2057. {
  2058. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  2059. }
  2060. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2061. {
  2062. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  2063. }
  2064. }
  2065. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2066. {
  2067. if (getAiValue_TM_ChamberPressure > 10000)
  2068. {
  2069. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2070. }
  2071. else if (getAiValue_TM_ChamberPressure <= 10000)
  2072. {
  2073. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2074. }
  2075. }
  2076. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2077. {
  2078. if (getAiValue_LLA_ChamberPressure > 10000)
  2079. {
  2080. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  2081. }
  2082. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2083. {
  2084. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  2085. }
  2086. }
  2087. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2088. {
  2089. if (getAiValue_LLB_ChamberPressure > 10000)
  2090. {
  2091. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2092. }
  2093. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2094. {
  2095. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2096. }
  2097. }
  2098. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2099. {
  2100. if (getAiValue_TM_ChamberPressure > 10000)
  2101. {
  2102. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2103. }
  2104. else if (getAiValue_TM_ChamberPressure <= 10000)
  2105. {
  2106. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2107. }
  2108. }
  2109. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2110. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  2111. {
  2112. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  2113. }
  2114. else if (getAiValue_LLA_ChamberPressure < 20)
  2115. {
  2116. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  2117. }
  2118. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2119. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  2120. {
  2121. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  2122. }
  2123. else if (getAiValue_LLB_ChamberPressure < 20)
  2124. {
  2125. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  2126. }
  2127. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2128. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2129. {
  2130. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2131. }
  2132. else if (getAiValue_TM_ChamberPressure < 20)
  2133. {
  2134. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2135. }
  2136. // ATM switch
  2137. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2138. // VAC switch
  2139. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2140. // ATM switch
  2141. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  2142. // VAC switch
  2143. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2144. // ATM switch
  2145. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  2146. // VAC switch
  2147. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2148. // }
  2149. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  2150. //{
  2151. // ModuleName mod = ModuleName.TM;
  2152. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2153. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2154. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2155. //}
  2156. }
  2157. void SetAiValue(string name, float value)
  2158. {
  2159. byte[] flow = BitConverter.GetBytes(value);
  2160. short high1 = BitConverter.ToInt16(flow, 0);
  2161. short low1 = BitConverter.ToInt16(flow, 2);
  2162. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  2163. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  2164. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2165. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2166. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2167. }
  2168. float GetAiValue(string name)
  2169. {
  2170. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2171. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2172. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2173. return flow;
  2174. }
  2175. float GetAoValue(string name)
  2176. {
  2177. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  2178. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  2179. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2180. return flow;
  2181. }
  2182. void MonitorTemperature(ModuleName mod)
  2183. {
  2184. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  2185. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  2186. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  2187. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  2188. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  2189. // 底座
  2190. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2191. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2192. //{
  2193. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  2194. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  2195. //}
  2196. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2197. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2198. //{
  2199. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  2200. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  2201. //}
  2202. // Foreline
  2203. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2204. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2205. {
  2206. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  2207. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  2208. }
  2209. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2210. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2211. {
  2212. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  2213. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  2214. }
  2215. // Wall
  2216. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2217. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2218. {
  2219. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  2220. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  2221. }
  2222. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2223. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2224. {
  2225. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  2226. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  2227. }
  2228. }
  2229. void MonitorGas(ModuleName mod)
  2230. {
  2231. // gas
  2232. this.SimulateMFC(mod, 1);
  2233. this.SimulateMFC(mod, 2);
  2234. this.SimulateMFC(mod, 3);
  2235. this.SimulateMFC(mod, 4);
  2236. this.SimulateMFC(mod, 5);
  2237. this.SimulateMFC(mod, 6);
  2238. this.SimulateMFC(mod, 7);
  2239. this.SimulateMFC(mod, 8);
  2240. this.SimulateN2(mod);
  2241. }
  2242. void MonitorKeplerTMGas()
  2243. {
  2244. this.SimulateKeplerMFC(ModuleName.LLA, 1);
  2245. this.SimulateKeplerMFC(ModuleName.LLB, 1);
  2246. this.SimulateKeplerMFC(ModuleName.TM, 1);
  2247. }
  2248. void MonitorSEGas(ModuleName mod)
  2249. {
  2250. SimulateMFC(mod, 1);
  2251. SimulateMFC(mod, 2);
  2252. SimulateMFC(mod, 3);
  2253. SimulateMFC(mod, 4);
  2254. SimulateMFC(mod, 5);
  2255. SimulateMFC(mod, 6);
  2256. SimulateMFC(mod, 7);
  2257. SimulateMFC(mod, 8);
  2258. SimulateMFC(mod, 9);
  2259. SimulateMFC(mod, 10);
  2260. SimulateMFC(mod, 11);
  2261. SimulateMFC(mod, 12);
  2262. }
  2263. void MonitorDEGas(ModuleName mod)
  2264. {
  2265. SimulateMFC(mod, 1);
  2266. SimulateMFC(mod, 2);
  2267. SimulateMFC(mod, 3);
  2268. SimulateMFC(mod, 4);
  2269. SimulateMFC(mod, 5);
  2270. SimulateMFC(mod, 6);
  2271. SimulateMFC(mod, 7);
  2272. SimulateMFC(mod, 8);
  2273. SimulateMFC(mod, 9);
  2274. SimulateMFC(mod, 10);
  2275. SimulateMFC(mod, 11);
  2276. SimulateMFC(mod, 12);
  2277. }
  2278. private void SimulateMFC(ModuleName mod, byte gasNum)
  2279. {
  2280. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  2281. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp);
  2282. }
  2283. private void SimulateKeplerMFC(ModuleName mod, byte gasNum)
  2284. {
  2285. var sp = GetAoValue($"TM.AO_{mod}_MFC{gasNum}_Flow_Setpoint");
  2286. SetAiValue($"TM.AI_{mod}_MFC{gasNum}_Flow", (float)sp);
  2287. }
  2288. private void SimulateN2(ModuleName mod)
  2289. {
  2290. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  2291. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2292. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp);
  2293. }
  2294. private void SimulateSEHe(ModuleName mod)
  2295. {
  2296. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint");
  2297. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2298. SetAiValue($"{mod}.AI_He_Flow", (float)mock_fb);
  2299. }
  2300. private void SimulateDEHe(ModuleName mod)
  2301. {
  2302. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint1");
  2303. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2304. SetAiValue($"{mod}.AI_MFC_He1_Flow", (float)mock_fb);
  2305. }
  2306. private void SimulateHe(ModuleName mod)
  2307. {
  2308. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  2309. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2310. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  2311. }
  2312. void MonitorRF(ModuleName mod)
  2313. {
  2314. // RF generator
  2315. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  2316. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2317. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2318. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  2319. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  2320. }
  2321. void MonitorIOPumpCtrl(ModuleName mod)
  2322. {
  2323. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  2324. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  2325. }
  2326. void MonitorIOHighTemperatureHeater(ModuleName mod)
  2327. {
  2328. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  2329. {
  2330. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  2331. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2332. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2333. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2334. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2335. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2336. }
  2337. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  2338. {
  2339. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2340. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  2341. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2342. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2343. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2344. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2345. }
  2346. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  2347. {
  2348. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2349. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2350. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  2351. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2352. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2353. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2354. }
  2355. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
  2356. {
  2357. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2358. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2359. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2360. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
  2361. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2362. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2363. }
  2364. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
  2365. {
  2366. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2367. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2368. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2369. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2370. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
  2371. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2372. }
  2373. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  2374. {
  2375. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2376. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2377. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2378. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2379. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2380. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  2381. }
  2382. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
  2383. var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
  2384. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  2385. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2386. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
  2387. SetAiValue($"{mod}.AI_Source_TC_Temp", 100.123456F);
  2388. SetAiValue($"{mod}.AI_CHB_M-HT_Inner_Power_FB", 100.1F);
  2389. SetAiValue($"{mod}.AI_CHB_M-HT_Outer_Power_FB", 100.2F);
  2390. SetAiValue($"{mod}.AI_Lift_Servo_Current_Posi_Mm", 5F);
  2391. }
  2392. void MonitorKepler2200Heater(ModuleName mod)
  2393. {
  2394. var pendulumHeaterSetpoint = GetAoValue($"{mod}.AO_P_Valve_Temperature_Setpoint");
  2395. SetAiValue($"{mod}.AI_P_Valve_Control_TC_Temp", pendulumHeaterSetpoint);
  2396. SetAiValue($"{mod}.AI_CHB_M-HT_Inner_Alarm_Word1", 0F);
  2397. SetAiValue($"{mod}.AI_CHB_M-HT_Inner_Alarm_Word2", 0F);
  2398. SetAiValue($"{mod}.AI_CHB_M-HT_Outer_Alarm_Word1", 0F);
  2399. SetAiValue($"{mod}.AI_CHB_M-HT_Outer_Alarm_Word2", 0F);
  2400. SetAiValue($"{mod}.AI_Heater_Purge_N2_Flow", 1.2F);
  2401. }
  2402. public void Terminate()
  2403. {
  2404. _thread.Stop();
  2405. }
  2406. public void SetCoolantOutletTemp(string module, int Temp)
  2407. {
  2408. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  2409. //{
  2410. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  2411. //}
  2412. }
  2413. }
  2414. }