 lixiang
|
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
4 months ago |
|
lixiang
|
f92e6abb17
1.添加Kepler2300 功能代码
|
5 months ago |
|
lixiang
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
8 months ago |
|
lixiang
|
10c22069fe
1.添加EFEM光栅报警开关
|
8 months ago |
|
lixiang
|
a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
|
9 months ago |
|
lixiang
|
ca702b093b
1.alarm List 收集到300+条，并添加到程序里
|
10 months ago |
|
lixiang
|
8e660cd7a8
1.去除carrierid ;字符
|
10 months ago |
|
lixiang
|
79ffe0c064
1.分开Kepler与Venus SequenceView界面
|
10 months ago |
 sangwq
|
72419fe36a
enhance throughput and skip repeat loadlock pumping/venting.
|
11 months ago |
|
lixiang
|
401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
|
1 year ago |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
1 year ago |
 kuangzl
|
cfd9253e8a
Modified the style of the venusDE page and added the DERobot movement.
|
1 year ago |
 zhouhr
|
eff7f8a03e
upload missing files
|
1 year ago |
|
zhouhr
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
|
1 year ago |
|
lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
1 year ago |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
1 year ago |
|
lixiang
|
9163903164
Kepler2200优化
|
1 year ago |
|
zhouhr
|
cc04adb731
change the location of the PA from VPA to Aligner1
|
1 year ago |
|
lixiang
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
1 year ago |
|
lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
1 year ago |
 hecl
|
f814cf53a8
1.Add simulator read RF ConfigType function
|
1 year ago |
|
lixiang
|
d33079596b
1.优化新版跑片动画
|
1 year ago |
|
hecl
|
aed602cdc9
1.Add Tru rf/match Reconnect function
|
1 year ago |
|
hecl
|
0a2d5ac547
Venus DE TM simulator add
|
1 year ago |
|
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
1 year ago |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
1 year ago |
|
lixiang
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 year ago |
|
hecl
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 year ago |
|
hecl
|
2ffdf6e535
1Venus DE LinerDoor update
|
1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
|
1 year ago |
