Kepler-Release/Venus/Venus_RT/Modules/TM/MFPMPlaceRoutine.cs

using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Sorter.Common;
using Venus_RT.Devices;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using Venus_Core;
using Aitex.Core.RT.Log;
using Aitex.Core.Util;
using Venus_RT.Modules.PMs;
using MECF.Framework.Common.Schedulers;
using System.Collections.Generic;
using MECF.Framework.Common.DBCore;
using System;
using Aitex.Core.RT.Device;

namespace Venus_RT.Modules.TM
{
    class MFPMPlaceRoutine : ModuleRoutineBase, IRoutine
    {
        private enum PlaceStep
        {
            WaitPMReady,
            PreRotation,
            OpenPMSlitDoor,
            PMPrepare,
            ArmExtend,
            QueryAWC,
            LiftUpWafer,
            PlaceDelay,
            ArmRetract,
            SavePlaceData,
            WaitPLCReady,
            ClosePMSlitDoor,
            NotifyDone,
        }
        private enum PlaceWithHeaterStep
        {
            WaitPMReady,
            PreRotation,
            PMPrepare,
            WaitPressreStable,
            OpenPMSlitDoor,
            Placing,
            QueryAWC,
            SavePlaceData,
            WaitPLCReady,
            ClosePMSlitDoor,
            CheckAwc,
            NotifyDone,
        }

        private readonly JetTM _JetTM;
        private JetPMBase _jetPM;

        private readonly ITransferRobot _robot;

        private int _placingTimeout = 20 * 1000;
        private int _liftPinTimeout = 10 * 1000;
        private int _placeDelayTime = 0;
        private ModuleName _targetModule;
        private PMEntity _pmModule;
        private int _targetSlot;
        private Hand _hand;

        private DateTime _starttime;
        private bool _queryAwc;
        private int _robotTransferAWCOffset;
        double maxPressureDifference;

        public MFPMPlaceRoutine(JetTM tm, ITransferRobot robot) : base(ModuleName.TMRobot)
        {
            _JetTM = tm;
            _robot = robot;
            Name = "Place to PM";

            if (SC.GetValue<int>($"TM.QueryAWCOption") == 2 || SC.GetValue<int>($"TM.QueryAWCOption") == 3)
                _queryAwc = true;
            else
                _queryAwc = false;
        }
        public RState Start(params object[] objs)
        {
            _starttime = DateTime.Now;
            if (!_robot.IsHomed)
            {
                LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
                return RState.Failed;
            }

            var placeItem = (Queue<MoveItem>)objs[0];
            if (!WaferManager.Instance.CheckDuplicatedWafersBeforeMove(placeItem))
                return RState.Failed;

            _targetModule = placeItem.Peek().DestinationModule;
            _targetSlot = placeItem.Peek().DestinationSlot;
            _hand = placeItem.Peek().RobotHand;

            if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
            {
                _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);
                _jetPM = DEVICE.GetDevice<JetPMBase>(_targetModule.ToString());
            }
            else
            {
                LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for placing action");
                return RState.Failed;
            }

            if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, (int)_hand))
            {
                LOG.Write(eEvent.ERR_TM, Module, $"Cannot Place as TM Robot Arm: {_hand} has no wafer");
                return RState.Failed;
            }

            if (WaferManager.Instance.CheckHasWafer(_targetModule, _targetSlot))
            {
                LOG.Write(eEvent.ERR_TM, Module, $"Cannot Place as {_targetModule} Slot {_targetSlot + 1} already has a wafer");
                return RState.Failed;
            }

            var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, (int)_hand);
            LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from TM Robot {_hand}  to {_targetModule} {_targetSlot + 1}");

            Reset();
            _placingTimeout = SC.GetValue<int>("TM.PlaceTimeout") * 1000;
            _placeDelayTime = SC.GetValue<int>($"{_targetModule}.PlaceDelayTime");
            _robotTransferAWCOffset= SC.GetValue<int>("TM.EnterPMAWCAlarmLimit");
            maxPressureDifference = SC.GetValue<double>("System.PMTMMaxPressureDifference");
            if (SC.GetValue<int>($"TM.QueryAWCOption") == 2 || SC.GetValue<int>($"TM.QueryAWCOption") == 3)
                _queryAwc = true;
            else
                _queryAwc = false;

            return Runner.Start(Module, $"Place to {_targetModule}");
        }

        public RState Monitor()
        {
            switch (_pmModule.ChamberType)
            {
                //case JetChamber.Venus:
                case JetChamber.Kepler2300:

         Runner.Wait(PlaceStep.WaitPMReady,                   () => _pmModule.IsIdle,                                                       _delay_60s)
               .RunIf(PlaceStep.PreRotation,                 _JetTM.PreRotateModules.ContainsKey(_targetModule),   RotateArm,              WaitRotateDone)
               .Run(PlaceStep.OpenPMSlitDoor,                OpenPMSlitDoor,                                       OpenPMSlitDoorIsOK)
               .Run(PlaceStep.PMPrepare,                     ModulePrepare,                                        IsModulePrepareReady,   _delay_60s)
               .Run(PlaceStep.ArmExtend,                     ArmExtend,                                            WaitRobotExtendDone,    _placingTimeout)
               .Run(PlaceStep.QueryAWC,                      QueryAWC,                                             WaitRobotQueryDone,     _delay_1s)
               .Run(PlaceStep.LiftUpWafer,                   NotifyPMPlaceWafer,                                   WaitPMWaferLiftUp,      _delay_30s)
               .Delay(PlaceStep.PlaceDelay,                  _placeDelayTime)
               .Run(PlaceStep.ArmRetract,                    ArmRetract,                                           WaitRobotRetractDone,   _delay_30s)
               .Run(PlaceStep.SavePlaceData,                 RecordAWCData,                                        NullFun)
               .Run(PlaceStep.ClosePMSlitDoor,               ClosePMSlitDoor,                                      ClosePMSlitDoorIsOK)

               .End(PlaceStep.NotifyDone,                    NotifyPMDone,                                                                  _delay_50ms);
                break;

                case JetChamber.Kepler2200A:
                case JetChamber.Kepler2200B:

         Runner.Wait(PlaceWithHeaterStep.WaitPMReady,               () => _pmModule.IsIdle,                              _delay_60s)
              .RunIf(PlaceWithHeaterStep.PreRotation,               _JetTM.PreRotateModules.ContainsKey(_targetModule),  RotateArm, WaitRotateDone)
              .Run(PlaceWithHeaterStep.PMPrepare,                   ModulePrepare,                                       IsModulePrepareReady, _delay_60s)
              .Wait(PlaceWithHeaterStep.WaitPressreStable,          TMPMPressureIsOK, _delay_60s)
              .Run(PlaceWithHeaterStep.OpenPMSlitDoor,              OpenPMSlitDoor,                                      OpenPMSlitDoorIsOK)
              .Run(PlaceWithHeaterStep.Placing,                     Placing,                                             WaitPlaceDone)
              .RunIf(PlaceWithHeaterStep.QueryAWC,                  _queryAwc,                                           QueryAWC,                                            WaitRobotQueryDone, _delay_1s)
              .RunIf(PlaceWithHeaterStep.SavePlaceData,             _queryAwc,                                           RecordAWCData,                                       NullFun)
              .Wait(PlaceWithHeaterStep.WaitPLCReady,               PLCIsReadyOK)
              .Run(PlaceWithHeaterStep.ClosePMSlitDoor,             ClosePMSlitDoor,                                     ClosePMSlitDoorIsOK)
              .RunIf(PlaceWithHeaterStep.CheckAwc,                  _queryAwc,                                           CheckAwc)

              .End(PlaceWithHeaterStep.NotifyDone,                  NotifyPMDone,                                        _delay_50ms);
              break;
            }

            return Runner.Status;
        }
        private bool TMPMPressureIsOK()
        {
            if (RouteManager.IsATMMode)
            {
                return _JetTM.IsTMATM && _JetTM.IsModuleATM(_targetModule);
            }
            else
            {
                if (Math.Abs((_pmModule.ChamberPressure - _JetTM.ChamberPressure)) < (maxPressureDifference - 2))
                {
                    return true;
                }
                else
                {
                    return false;
                }
            }
        }
        private bool OpenPMSlitDoor()
        {
            _JetTM.TurnMFSlitDoor(_targetModule, true, out _);
            return true;
        }
        private bool OpenPMSlitDoorIsOK()
        {
            return _JetTM.IsPMSlitdoorOpened(_targetModule);
        }
        private bool ClosePMSlitDoor()
        {
            return _JetTM.TurnMFSlitDoor(_targetModule, false, out _);
        }
        private bool ClosePMSlitDoorIsOK()
        {
            return _JetTM.IsPMSlitdoorClosed(_targetModule);
        }
        private bool ModulePrepare()
        {
            _pmModule.PostMsg(PMEntity.MSG.PreparePlace);
            return true;
        }

        private bool IsModulePrepareReady()
        {
            return _pmModule.Status == PMEntity.PMStatus.Ready_For_Place;
        }

        private bool RotateArm()
        {
            _pmModule.PostMsg(PMEntity.MSG.PreparePlace); // Notify PM to Serv pressure in advance for throughput enhancement
            return _robot.Goto(_JetTM.PreRotateModules[_targetModule], 0, _hand);
        }

        private bool WaitRotateDone()
        {
            if (_robot.Status == RState.Running)
            {
                return false;
            }
            else if (_robot.Status == RState.End)
            {
                return true;
            }
            else
            {
                Runner.Stop($"TM Robot Rotate Arm failed, {_robot.Status}");
                return true;
            }
        }
        private bool Placing()
        {
            if (!_jetPM.IsAllowRobotTransfer)
            {
                Runner.Stop($"不允许Place,传片位置信号不满足");
                return false;
            }
            if (!_jetPM.PreparePlaceIsOK())
            {
                Runner.Stop($"不允许Place,传片位置信号满足,但不在Position1");
                return false;
            }
            return _robot.Place(_targetModule, _targetSlot, _hand);
        }

        private bool WaitPlaceDone()
        {
            if (_robot.Status == RState.Running)
            {
                if (Runner.StepElapsedMS > _placingTimeout)
                {
                    WaferManager.Instance.CreateDuplicatedWafer(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot);
                    Runner.Stop($"TM Robot place wafer to {_targetModule} timeout, {_placingTimeout}ms");
                    return true;
                }

                return false;
            }
            else if (_robot.Status == RState.End && _JetTM.TMRobotNotExtendModule(_targetModule))
            {
                WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot);
                return true;
            }
            else
            {
                WaferManager.Instance.CreateDuplicatedWafer(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot);
                Runner.Stop($"TM Robot Place failed, {_robot.Status}");
                return true;
            }
        }
        private bool ArmExtend()
        {
            return _robot.PlaceExtend(_targetModule, _targetSlot, _hand);
        }
        private bool ArmRetract()
        {
            return _robot.PlaceRetract(_targetModule, _targetSlot, _hand);
        }
        private bool QueryAWC()
        {
            if (!_queryAwc)
                return true;
            else
                return _robot.QueryAwc();
        }

        private bool WaitRobotExtendDone()
        {
            if (_robot.Status == RState.Running)
            {
                return false;
            }
            else if (_robot.Status == RState.End)
            {
                return true;
            }
            else
            {
                Runner.Stop($"TM Robot Place Extend failed, {_robot.Status}");
                return true;
            }
        }

        private bool RecordAWCData()
        {
            if(!_queryAwc)
                return true;

            //已经move后的数据
            string _origin_module = $"LP{WaferManager.Instance.GetWafer(_targetModule, _targetSlot).OriginStation}";
            int _origin_slot = WaferManager.Instance.GetWafer(_targetModule, _targetSlot).OriginSlot;
            //查询完毕 插入数据
            OffsetDataRecorder.RecordOffsetData(
                Guid.NewGuid().ToString(),
                ModuleName.TMRobot, 0,
                _targetModule, _targetSlot,
                _origin_module, _origin_slot,
                _hand, RobotArmPan.None,
                _robot.Offset_X, _robot.Offset_Y, _robot.Offset_D,
                _starttime, DateTime.Now);
            return true;
        }

        private bool WaitRobotQueryDone()
        {
            if (!_queryAwc)
                return true;

            if (_robot.Status == RState.Running)
            {
                return false;
            }
            else if (_robot.Status == RState.End)
            {
                return true;
            }
            else
            {
                Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}");
                return true;
            }
        }
        private bool NotifyPMPlaceWafer()
        {
            _pmModule.PostMsg(PMEntity.MSG.LiftUpWafer);
            return true;
        }

        private bool WaitPMWaferLiftUp()
        {
            if(_pmModule.Status == PMEntity.PMStatus.Exchange_Ready)
            {
                WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot);
                return true;
            }
            else if(Runner.StepElapsedMS > _liftPinTimeout)
            {
                WaferManager.Instance.CreateDuplicatedWafer(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot);
                Runner.Stop($"Wait {_targetModule} Lift Pin Up timeout, {Runner.StepElapsedMS}");
            }

            return false;
        }

        private bool WaitRobotRetractDone()
        {
            if (_robot.Status == RState.Running)
            {
                return false;
            }
            else if (_robot.Status == RState.End)
            {
                return true;
            }
            else
            {
                Runner.Stop($"TM Robot Place Retract failed, {_robot.Status}");
                return true;
            }
        }
        private bool NotifyPMDone()
        {
            _pmModule.PostMsg(PMEntity.MSG.PlaceReady);
            return true;
        }
        private bool PLCIsReadyOK()
        {
            return _JetTM.TMRobotNotExtendModule(_targetModule);
        }
        private bool CheckAwc()
        {
            if (Math.Abs(_robot.Offset_X) > _robotTransferAWCOffset)
            {
                Stop($"Check AWC 失败， 当前 X AWC [{_robot.Offset_X}um], 高于Alarm最大值: [{_robotTransferAWCOffset}]um");
                return false;
            }
            if (Math.Abs(_robot.Offset_Y) > _robotTransferAWCOffset)
            {
                Stop($"Check AWC 失败， 当前 Y AWC [{_robot.Offset_Y}um], 高于Alarm最大值: [{_robotTransferAWCOffset}]um");
                return false;
            }
            return true;
        }
        public void Abort()
        {
            //_robot.Halt();
        }
    }
}