using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using Aitex.Sorter.Common; using Venus_RT.Devices; using MECF.Framework.Common.Routine; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using Venus_Core; using Aitex.Core.RT.Log; using Aitex.Core.Util; using Venus_RT.Modules.PMs; using MECF.Framework.Common.Schedulers; using System.Collections.Generic; using MECF.Framework.Common.DBCore; using System; using Aitex.Core.RT.Device; namespace Venus_RT.Modules.TM { class MFPMPlaceRoutine : ModuleRoutineBase, IRoutine { private enum PlaceStep { WaitPMReady, PreRotation, OpenPMSlitDoor, PMPrepare, ArmExtend, QueryAWC, LiftUpWafer, PlaceDelay, ArmRetract, SavePlaceData, WaitPLCReady, ClosePMSlitDoor, NotifyDone, } private enum PlaceWithHeaterStep { WaitPMReady, PreRotation, PMPrepare, WaitPressreStable, OpenPMSlitDoor, Placing, QueryAWC, SavePlaceData, WaitPLCReady, ClosePMSlitDoor, CheckAwc, NotifyDone, } private readonly JetTM _JetTM; private JetPMBase _jetPM; private readonly ITransferRobot _robot; private int _placingTimeout = 20 * 1000; private int _liftPinTimeout = 10 * 1000; private int _placeDelayTime = 0; private ModuleName _targetModule; private PMEntity _pmModule; private int _targetSlot; private Hand _hand; private DateTime _starttime; private bool _queryAwc; private int _robotTransferAWCOffset; double maxPressureDifference; public MFPMPlaceRoutine(JetTM tm, ITransferRobot robot) : base(ModuleName.TMRobot) { _JetTM = tm; _robot = robot; Name = "Place to PM"; if (SC.GetValue($"TM.QueryAWCOption") == 2 || SC.GetValue($"TM.QueryAWCOption") == 3) _queryAwc = true; else _queryAwc = false; } public RState Start(params object[] objs) { _starttime = DateTime.Now; if (!_robot.IsHomed) { LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first"); return RState.Failed; } var placeItem = (Queue)objs[0]; if (!WaferManager.Instance.CheckDuplicatedWafersBeforeMove(placeItem)) return RState.Failed; _targetModule = placeItem.Peek().DestinationModule; _targetSlot = placeItem.Peek().DestinationSlot; _hand = placeItem.Peek().RobotHand; if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule)) { _pmModule = Singleton.Instance.GetPM(_targetModule); _jetPM = DEVICE.GetDevice(_targetModule.ToString()); } else { LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for placing action"); return RState.Failed; } if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, (int)_hand)) { LOG.Write(eEvent.ERR_TM, Module, $"Cannot Place as TM Robot Arm: {_hand} has no wafer"); return RState.Failed; } if (WaferManager.Instance.CheckHasWafer(_targetModule, _targetSlot)) { LOG.Write(eEvent.ERR_TM, Module, $"Cannot Place as {_targetModule} Slot {_targetSlot + 1} already has a wafer"); return RState.Failed; } var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, (int)_hand); LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from TM Robot {_hand} to {_targetModule} {_targetSlot + 1}"); Reset(); _placingTimeout = SC.GetValue("TM.PlaceTimeout") * 1000; _placeDelayTime = SC.GetValue($"{_targetModule}.PlaceDelayTime"); _robotTransferAWCOffset= SC.GetValue("TM.EnterPMAWCAlarmLimit"); maxPressureDifference = SC.GetValue("System.PMTMMaxPressureDifference"); if (SC.GetValue($"TM.QueryAWCOption") == 2 || SC.GetValue($"TM.QueryAWCOption") == 3) _queryAwc = true; else _queryAwc = false; return Runner.Start(Module, $"Place to {_targetModule}"); } public RState Monitor() { switch (_pmModule.ChamberType) { //case JetChamber.Venus: case JetChamber.Kepler2300: Runner.Wait(PlaceStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s) .RunIf(PlaceStep.PreRotation, _JetTM.PreRotateModules.ContainsKey(_targetModule), RotateArm, WaitRotateDone) .Run(PlaceStep.OpenPMSlitDoor, OpenPMSlitDoor, OpenPMSlitDoorIsOK) .Run(PlaceStep.PMPrepare, ModulePrepare, IsModulePrepareReady, _delay_60s) .Run(PlaceStep.ArmExtend, ArmExtend, WaitRobotExtendDone, _placingTimeout) .Run(PlaceStep.QueryAWC, QueryAWC, WaitRobotQueryDone, _delay_1s) .Run(PlaceStep.LiftUpWafer, NotifyPMPlaceWafer, WaitPMWaferLiftUp, _delay_30s) .Delay(PlaceStep.PlaceDelay, _placeDelayTime) .Run(PlaceStep.ArmRetract, ArmRetract, WaitRobotRetractDone, _delay_30s) .Run(PlaceStep.SavePlaceData, RecordAWCData, NullFun) .Run(PlaceStep.ClosePMSlitDoor, ClosePMSlitDoor, ClosePMSlitDoorIsOK) .End(PlaceStep.NotifyDone, NotifyPMDone, _delay_50ms); break; case JetChamber.Kepler2200A: case JetChamber.Kepler2200B: Runner.Wait(PlaceWithHeaterStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s) .RunIf(PlaceWithHeaterStep.PreRotation, _JetTM.PreRotateModules.ContainsKey(_targetModule), RotateArm, WaitRotateDone) .Run(PlaceWithHeaterStep.PMPrepare, ModulePrepare, IsModulePrepareReady, _delay_60s) .Wait(PlaceWithHeaterStep.WaitPressreStable, TMPMPressureIsOK, _delay_60s) .Run(PlaceWithHeaterStep.OpenPMSlitDoor, OpenPMSlitDoor, OpenPMSlitDoorIsOK) .Run(PlaceWithHeaterStep.Placing, Placing, WaitPlaceDone) .RunIf(PlaceWithHeaterStep.QueryAWC, _queryAwc, QueryAWC, WaitRobotQueryDone, _delay_1s) .RunIf(PlaceWithHeaterStep.SavePlaceData, _queryAwc, RecordAWCData, NullFun) .Wait(PlaceWithHeaterStep.WaitPLCReady, PLCIsReadyOK) .Run(PlaceWithHeaterStep.ClosePMSlitDoor, ClosePMSlitDoor, ClosePMSlitDoorIsOK) .RunIf(PlaceWithHeaterStep.CheckAwc, _queryAwc, CheckAwc) .End(PlaceWithHeaterStep.NotifyDone, NotifyPMDone, _delay_50ms); break; } return Runner.Status; } private bool TMPMPressureIsOK() { if (RouteManager.IsATMMode) { return _JetTM.IsTMATM && _JetTM.IsModuleATM(_targetModule); } else { if (Math.Abs((_pmModule.ChamberPressure - _JetTM.ChamberPressure)) < (maxPressureDifference - 2)) { return true; } else { return false; } } } private bool OpenPMSlitDoor() { _JetTM.TurnMFSlitDoor(_targetModule, true, out _); return true; } private bool OpenPMSlitDoorIsOK() { return _JetTM.IsPMSlitdoorOpened(_targetModule); } private bool ClosePMSlitDoor() { return _JetTM.TurnMFSlitDoor(_targetModule, false, out _); } private bool ClosePMSlitDoorIsOK() { return _JetTM.IsPMSlitdoorClosed(_targetModule); } private bool ModulePrepare() { _pmModule.PostMsg(PMEntity.MSG.PreparePlace); return true; } private bool IsModulePrepareReady() { return _pmModule.Status == PMEntity.PMStatus.Ready_For_Place; } private bool RotateArm() { _pmModule.PostMsg(PMEntity.MSG.PreparePlace); // Notify PM to Serv pressure in advance for throughput enhancement return _robot.Goto(_JetTM.PreRotateModules[_targetModule], 0, _hand); } private bool WaitRotateDone() { if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { return true; } else { Runner.Stop($"TM Robot Rotate Arm failed, {_robot.Status}"); return true; } } private bool Placing() { if (!_jetPM.IsAllowRobotTransfer) { Runner.Stop($"不允许Place,传片位置信号不满足"); return false; } if (!_jetPM.PreparePlaceIsOK()) { Runner.Stop($"不允许Place,传片位置信号满足,但不在Position1"); return false; } return _robot.Place(_targetModule, _targetSlot, _hand); } private bool WaitPlaceDone() { if (_robot.Status == RState.Running) { if (Runner.StepElapsedMS > _placingTimeout) { WaferManager.Instance.CreateDuplicatedWafer(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot); Runner.Stop($"TM Robot place wafer to {_targetModule} timeout, {_placingTimeout}ms"); return true; } return false; } else if (_robot.Status == RState.End && _JetTM.TMRobotNotExtendModule(_targetModule)) { WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot); return true; } else { WaferManager.Instance.CreateDuplicatedWafer(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot); Runner.Stop($"TM Robot Place failed, {_robot.Status}"); return true; } } private bool ArmExtend() { return _robot.PlaceExtend(_targetModule, _targetSlot, _hand); } private bool ArmRetract() { return _robot.PlaceRetract(_targetModule, _targetSlot, _hand); } private bool QueryAWC() { if (!_queryAwc) return true; else return _robot.QueryAwc(); } private bool WaitRobotExtendDone() { if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { return true; } else { Runner.Stop($"TM Robot Place Extend failed, {_robot.Status}"); return true; } } private bool RecordAWCData() { if(!_queryAwc) return true; //已经move后的数据 string _origin_module = $"LP{WaferManager.Instance.GetWafer(_targetModule, _targetSlot).OriginStation}"; int _origin_slot = WaferManager.Instance.GetWafer(_targetModule, _targetSlot).OriginSlot; //查询完毕 插入数据 OffsetDataRecorder.RecordOffsetData( Guid.NewGuid().ToString(), ModuleName.TMRobot, 0, _targetModule, _targetSlot, _origin_module, _origin_slot, _hand, RobotArmPan.None, _robot.Offset_X, _robot.Offset_Y, _robot.Offset_D, _starttime, DateTime.Now); return true; } private bool WaitRobotQueryDone() { if (!_queryAwc) return true; if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { return true; } else { Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}"); return true; } } private bool NotifyPMPlaceWafer() { _pmModule.PostMsg(PMEntity.MSG.LiftUpWafer); return true; } private bool WaitPMWaferLiftUp() { if(_pmModule.Status == PMEntity.PMStatus.Exchange_Ready) { WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot); return true; } else if(Runner.StepElapsedMS > _liftPinTimeout) { WaferManager.Instance.CreateDuplicatedWafer(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot); Runner.Stop($"Wait {_targetModule} Lift Pin Up timeout, {Runner.StepElapsedMS}"); } return false; } private bool WaitRobotRetractDone() { if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { return true; } else { Runner.Stop($"TM Robot Place Retract failed, {_robot.Status}"); return true; } } private bool NotifyPMDone() { _pmModule.PostMsg(PMEntity.MSG.PlaceReady); return true; } private bool PLCIsReadyOK() { return _JetTM.TMRobotNotExtendModule(_targetModule); } private bool CheckAwc() { if (Math.Abs(_robot.Offset_X) > _robotTransferAWCOffset) { Stop($"Check AWC 失败, 当前 X AWC [{_robot.Offset_X}um], 高于Alarm最大值: [{_robotTransferAWCOffset}]um"); return false; } if (Math.Abs(_robot.Offset_Y) > _robotTransferAWCOffset) { Stop($"Check AWC 失败, 当前 Y AWC [{_robot.Offset_Y}um], 高于Alarm最大值: [{_robotTransferAWCOffset}]um"); return false; } return true; } public void Abort() { //_robot.Halt(); } } }