 lixiang
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031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
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1 month ago |
|
lixiang
|
f92e6abb17
1.添加Kepler2300 功能代码
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2 months ago |
|
lixiang
|
2cdc13a01b
1.Venus与Kepler 代码分开
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3 months ago |
|
lixiang
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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5 months ago |
|
lixiang
|
a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
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5 months ago |
|
lixiang
|
ca702b093b
1.alarm List 收集到300+条，并添加到程序里
|
7 months ago |
|
lixiang
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a9d8e56970
1.扩展alarm list
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7 months ago |
|
lixiang
|
99d939492e
1.加登出界面
|
8 months ago |
 sangwq
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8cb06f14db
fix routing new wafer algorithm bug and add throughput trace log.
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8 months ago |
|
lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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9 months ago |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
10 months ago |
|
lixiang
|
9163903164
Kepler2200优化
|
10 months ago |
|
sangwq
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2de3872723
duplicated wafer function.
|
11 months ago |
|
sangwq
|
52349cad2b
Duplicated wafer functions.
|
11 months ago |
 hecl
|
0b8a98a845
IoDevice IoMagnet Add
|
1 year ago |
|
sangwq
|
b85b9aa79f
fix some routing bugs.
|
1 year ago |
|
sangwq
|
709c7a1c10
fixed the routing bug while B In B Out.
|
1 year ago |
 chenkui
|
a3f01b0830
1、重新引用最新版本的SecsGem动态库，用于实现FA相应的功能；
|
1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
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1 year ago |
|
sangwq
|
ec2f97e62d
enhance log.
|
1 year ago |
|
lixiang
|
e511d1f387
1.添加PM控压功能
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1 year ago |
 zhouhr
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
|
1 year ago |
|
zhouhr
|
4e5194bce2
add Analysis of EFEM Hardware Error Codes && Monitor of Current Application Resources
|
1 year ago |
|
sangwq
|
501997ac38
TM/EFEM robot single arm option.
|
1 year ago |
|
sangwq
|
c223835b1e
enhance AutoCycle module.
|
1 year ago |
|
sangwq
|
8f9b95ae8f
Develop transfer cycle.
|
1 year ago |
 yangdb
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045eae5c75
1.sequence和recipe修改日志输出格式
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1 year ago |
 Intern01
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23c59d3c86
1.完成FA模块的功能开发
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1 year ago |
|
sangwq
|
f211c4242f
Efem module raw design.
|
1 year ago |
