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- using Aitex.Core.Common;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Communications;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using System;
- using System.Collections.Generic;
- using System.IO.Ports;
- using System.Linq;
- using System.Text;
- using System.Text.RegularExpressions;
- using System.Threading.Tasks;
- using Venus_Core;
- using Venus_RT.Devices.EFEM;
- using Venus_RT.Devices.TM;
- using Venus_RT.Modules;
- namespace Venus_RT.Devices.VCE
- {
- /// <summary>
- /// 素珀 vce 驱动
- /// </summary>
- public class SunWayVce : VCEModuleBase
- {
- #region 私有变量
- private AsyncSerialPort _serialport;
- private string _portname;
- private string _newline = "\r\n";//终止符 0D 0A
- private object _locker = new object();
- private bool _IsAsciiMode;
- private LinkedList<string> _lstAsciiMsgs = new LinkedList<string>();
- private PeriodicJob _thread;
- private Regex _match_ReadMsg = new Regex(@"X,.*");
- private Regex _matchErrorCode = new Regex(@"(?<=_ERR,)(.*)");
- private ModuleName _moduleName;
- private RState _status;
- private string _currentMsg;
- private VceMessage _currentVceMessage;
- private bool _HasReceiveMsg;
- private bool _IsDashWaferError;
- private int _currentSlot = 0;
- public override int CurrentSlot => _currentSlot;
- private ModuleName _baseLPIndex
- {
- get
- {
- switch (RtInstance.ConfigType)
- {
- case ConfigType.VenusSE:
- return ModuleName.LP1;
- case ConfigType.VenusDE:
- return _moduleName == ModuleName.VCEA ? ModuleName.LP1 : ModuleName.LP2;
- default:
- return ModuleName.System;
- }
- }
- }
- private Loadport[] _LPMs = new Loadport[1];
- public override ILoadport this[ModuleName mod]
- {
- get
- {
- if (!ModuleHelper.IsLoadPort(mod))
- throw new ApplicationException($"{mod} is NOT Loadport");
- return _LPMs[mod - _baseLPIndex];
- }
- }
- //待补充
- private Dictionary<string, string> _ErrorCode2Reason = new Dictionary<string, string>()
- {
- {"221","错误的 ARM 参数" },
- {"233","伸缩信号未使能" },
- {"304","未识别的错误码" },
- {"305","未识别的指令" },
- {"309","不支持的指令" },
- {"401","ZWAFER 参数错误" },
- {"402","非法的 slot 参数" },
- {"403","运动指令 RX 参数错误" },
- {"404","晶圆夹取失败" },
- {"405","晶圆释放失败" },
- {"406","气缸压力表检测错误" },
- {"407","Mapping 传感器伸出失败" },
- {"408","Mapping 传感器缩回失败" },
- {"409","Mapping 传感器位置数据不正确" },
- {"411","Mapping 传感器高度不一致" },
- {"412","工位 VIA 参数未使能" },
- {"413","不是有效的 Mapping 工位" },
- {"414","手指有晶圆无法 mapping" },
- {"415","采集的数据个数错误" },
- {"416","采集的晶圆厚度过小" },
- {"417","晶圆位置超出有效范围" },
- {"418","晶圆上下沿槽数错误" },
- {"419","斜片上下沿槽数错误" },
- {"550","工位号超范围" },
- {"552","VIA 参数错误" },
- {"553","MAPVIA 参数错误" },
- {"600","系统未上电" },
- {"602","指令正在执行中" },
- {"603","系统上电失败" },
- {"604","示教器控制中" },
- {"605","机械手运动中停止" },
- {"609","系统存在错误" },
- {"610","示教盒急停启动" },
- {"611","驱动器报警" },
- {"629","驱动器存在报警" },
- {"705","LOAD 状态未知" },
- {"712","真空吸附动作失败" },
- {"730","PLACE 前 LOAD 状态错误" },
- {"731","PLACE 后 LOAD 状态错误" },
- {"734","PLACE 执行 Extend 过程中未检测到晶圆" },
- {"736","PLACE 执行 Retract 过程中检测到晶圆" },
- {"740","PICK 前 LOAD 状态错误" },
- {"741","PICK 后 LOAD 状态错误" },
- {"744","PICK 执行 Extend 过程中检测到晶圆" },
- {"745","PICK 执行 Retract 过程中未检测到晶圆" },
- {"1006","非法的 IO 端口号" },
- {"1314","PITCH 轴超界" },
- {"1315","关节位置超界" },
- {"1316","关节位置超硬限" },
- {"1320","机械手跟踪差超限错误" },
- {"1321","机械手发生碰撞" },
- {"1322","机械手超出工作区" },
- {"1323","关节速度超限" },
- {"1401","当前位置不正确" },
- {"1407","大气压力不足" },
- {"1412","晶圆已滑出" },
- {"1500","打开门失败" },
- {"1501","关闭门失败" },
- {"1502","门开关状态不对" },
- {"1503","门松开失败" },
- {"1504","门夹紧失败" },
- {"1506","当前不是自动门模式" },
- {"1507","开盖检测互锁" },
- {"1508","开门不允许运动" },
- {"1509","无 casette 盒不允许运动" },
- {"1510","安全检测触发" },
- {"1511","R 轴未运动到位" },
- {"1512","门动作开关未使能" },
- {"1513","运动开关未使能" },
- };
- //
- #endregion
- #region 暴露变量
- public override bool IsConnected => _serialport.IsOpen();
- public override RState Status => _status;
- public override bool IsReady => _status == RState.Init || _status == RState.End;
- public override bool IsError => _status == RState.Failed || _status == RState.Timeout;
- public override bool IsInit => _status == RState.Init;
- public override bool IsDashWaferError => _IsDashWaferError;
- private string[] _slotMap = new string[25];
- public string SlotMap
- {
- get
- {
- WaferInfo[] wafers = WaferManager.Instance.GetWafers(ModuleHelper.Converter(Name));
- string slot = "";
- for (int i = 0; i < 25; i++)
- {
- slot += wafers[i].IsEmpty ? "0" : "1";
- }
- return slot;
- }
- }
- private bool _OutDoorIsOpen
- {
- get
- {
- switch (_moduleName)
- {
- case ModuleName.VCE1:
- //2024-05-20 16:35:34 泓浒四边形硬件还未实现
- //DEVICE.GetDevice<HongHuTM>("SETM").VCEACassPresent
- return _vcedoorflag;
- case ModuleName.VCEA:
- if (DEVICE.GetDevice<SunWayDETM>("TM").VCEACassPresent)
- {
- _LPMs[0].HasCassette = true;
- }
- else
- {
- _LPMs[0].HasCassette = false;
- WaferManager.Instance.DeleteWafer(_LPMs[0].Module, 0, 25);
- }
- return !DEVICE.GetDevice<SunWayDETM>("TM").VCEALOCKED;
- case ModuleName.VCEB:
- if (DEVICE.GetDevice<SunWayDETM>("TM").VCEBCassPresent)
- {
- _LPMs[0].HasCassette = true;
- }
- else
- {
- _LPMs[0].HasCassette = false;
- WaferManager.Instance.DeleteWafer(_LPMs[0].Module, 0, 25);
- }
- return !DEVICE.GetDevice<SunWayDETM>("TM").VCEBLOCKED;
- default:
- return false;
- }
- }
- }
- public override bool OutDoorIsOpen => _OutDoorIsOpen;
- private bool _vcedoorflag;
- private bool _hasProtrusion
- {
- get
- {
- switch (_moduleName)
- {
- case ModuleName.VCE1:
- //2024-05-20 16:35:34 泓浒四边形硬件还未实现
- //DEVICE.GetDevice<HongHuTM>("SETM").VCEProtrusion
- return true;
- case ModuleName.VCEA:
- if (DEVICE.GetDevice<SunWayDETM>("TM").VCEAProtrusion)
- {
- _LPMs[0].Protrusion = true;
- return true;
- }
- else
- {
- _LPMs[0].Protrusion = false;
- return false;
- }
- case ModuleName.VCEB:
- if (DEVICE.GetDevice<SunWayDETM>("TM").VCEBProtrusion)
- {
- _LPMs[0].Protrusion = true;
- return true;
- }
- else
- {
- _LPMs[0].Protrusion = false;
- return false;
- }
- default:
- return false;
- }
- }
- }
- #endregion
- public SunWayVce(int slot, ModuleName moduleName) : base(slot, moduleName)
- {
- _moduleName = moduleName;
- _vcedoorflag = false;
- _IsAsciiMode = true;
- _portname = SC.GetStringValue($"{moduleName}.Port");
- _serialport = new AsyncSerialPort(_portname, 9600, 8, Parity.None, StopBits.One, _newline, _IsAsciiMode);
- _serialport.Open();
- _status = RState.Init;
- _serialport.OnDataChanged += onDataChange;
- _thread = new PeriodicJob(50, fnTimer, _moduleName.ToString(), true);
- if (moduleName == ModuleName.VCE1)
- _LPMs[0] = new Loadport(ModuleName.LP1);
- else
- _LPMs[0] = new Loadport((moduleName - ModuleName.VCEA) + ModuleName.LP1);
- CarrierManager.Instance.DeleteCarrier(_LPMs[0].Module.ToString());
- WaferManager.Instance.DeleteWafer(_LPMs[0].Module, 0, 25);
- CarrierManager.Instance.SubscribeLocation(_LPMs[0].Module.ToString(), 1);
- Action<ModuleName, int> _subscribeLoc = (ModuleName module, int waferCount) => {
- if (ModuleHelper.IsInstalled(module))
- {
- WaferManager.Instance.SubscribeLocation(module, waferCount);
- }
- };
- _subscribeLoc(_LPMs[0].Module, slot);
- }
- private bool fnTimer()
- {
- lock (_locker)
- {
- //采用ascii传输
- if (_IsAsciiMode)
- {
- //有数据尚未处理
- while (_lstAsciiMsgs.Count > 0)
- {
- string _needHandle = _lstAsciiMsgs.First.Value;
- HandleSingleMsg(_needHandle);
- _lstAsciiMsgs.RemoveFirst();
- }
- }
- //采用binary
- else
- {
- }
- }
- return true;
- }
- private void HandleSingleMsg(string rawmsgs)
- {
- string[] msgs = rawmsgs.Split('\r');
- foreach (var Msg in msgs)
- {
- string msg = Msg.Trim();
- LOG.Write(eEvent.EV_VCE_COMMON_INFO, _moduleName, $"{_moduleName} Receive msg=>{msg}");
- if (!string.IsNullOrEmpty(msg))
- {
- //action set petrify _BKGRDY结束
- switch (_currentVceMessage.Head)
- {
- case VceMessageHead.Action:
- case VceMessageHead.Set:
- case VceMessageHead.Petrify:
- switch (msg)
- {
- //设备收到 开始运行 目前状态在下发
- case "_RDY":
- LOG.Write(eEvent.EV_VCE_COMMON_INFO, _moduleName, $"vce {_currentVceMessage.Head} over");
- switch (_currentVceMessage.Command)
- {
- case VceCommand.Home:
- case VceCommand.Map:
- case VceCommand.GotoLP:
- _currentSlot = 0;
- break;
- case VceCommand.DoorClose:
- _vcedoorflag = false;
- break;
- case VceCommand.DoorOpen:
- _vcedoorflag = true;
- break;
- }
- _status = RState.End;
- break;
- //异常处理
- default:
- _status = RState.Failed;
- string reason;
- Errorhandle(msg, out reason);
- LOG.Write(eEvent.ERR_VCE_COMMON_Failed, _moduleName, reason);
- break;
- }
- break;
- case VceMessageHead.Read:
- //如果收到的信息符合
- if (_match_ReadMsg.IsMatch(msg))
- {
- //收到消息 用于结束
- _HasReceiveMsg = true;
- switch (_currentVceMessage.Command)
- {
- //处理wafer 信息为map数据
- case VceCommand.ReadMap:
- ReadMapData(msg);
- break;
- case VceCommand.CheckStatus:
- ReadStatus(msg);
- break;
- }
- }
- //_RDY查询结束
- else
- {
- if (msg == "_RDY")
- {
- if (_HasReceiveMsg)
- {
- _status = RState.End;
- }
- else
- {
- LOG.Write(eEvent.ERR_VCE_COMMON_Failed, _moduleName, $"Read Message is over but not receive msg! raw message:{_currentMsg}");
- _status = RState.Failed;
- }
- }
- else
- {
- _status = RState.Failed;
- LOG.Write(eEvent.ERR_VCE_COMMON_Failed, _moduleName, $"Read Message is invalid: receive message {msg} and send message {_currentMsg}");
- }
- }
- break;
- }
- }
- }
- }
- private void ReadStatus(string msg)
- {
- try
- {
- //BRa,SLbb,CPc,WPd,ERe
- string[] status = msg.Split(',');
- _currentSlot = Convert.ToInt32(status[4].Substring(2, 2));
- }
- catch (Exception ex)
- {
- LOG.Write(eEvent.ERR_VCE_COMMON_Failed, _moduleName, $"illegal msg:{msg}, {ex.Message}");
- }
- }
- private void ReadMapData(string msg)
- {
- string waferinfo = "";
- string[] waferitems = msg.Split(',');
- //智能模式 可以识别叠片
- for (int i = 3; i < waferitems.Length - 1; ++i)
- {
- //如果包含只需要逐个检查
- if (waferitems[i].Contains('?'))
- {
- foreach (char j in waferitems[i])
- {
- if (waferinfo.Length >= 25)
- break;
- else
- waferinfo += j;
- }
- }
- else
- waferinfo += waferitems[i];
- }
- for (int i = 0; i < waferinfo.Length; ++i)
- {
- int slotnum = i;
- if (slotnum < 25)
- {
- switch (waferinfo[i])
- {
- case '0':
- WaferManager.Instance.DeleteWafer(_LPMs[0].Module, slotnum);
- break;
- case 'X':
- WaferManager.Instance.CreateWafer(_LPMs[0].Module, slotnum, WaferStatus.Normal);
- break;
- case 'C':
- LOG.Write(eEvent.ERR_VCE_COMMON_Failed, _moduleName, $"Slot {i + 1}:double or dummy wafer.");
- WaferManager.Instance.CreateWafer(_LPMs[0].Module, slotnum, WaferStatus.Double);
- break;
- case '?':
- LOG.Write(eEvent.ERR_VCE_COMMON_Failed, _moduleName, $"Slot {i + 1}:Crossed wafer.");
- WaferManager.Instance.CreateWafer(_LPMs[0].Module, slotnum, WaferStatus.Crossed);
- break;
- }
- }
- }
- _LPMs[0].IsMapped = true;
- }
- private void Errorhandle(string msg, out string reason)
- {
- if (_matchErrorCode.IsMatch(msg))
- {
- //若是匹配
- //包含原因
- string errorcode = _matchErrorCode.Match(msg).Value;
- if (_ErrorCode2Reason.ContainsKey(errorcode))
- {
- if (errorcode == "L13")
- _IsDashWaferError = true;
- reason = _ErrorCode2Reason[errorcode];
- }
- else
- {
- reason = "未找到相关Error Code";
- }
- }
- else
- {
- //若不匹配
- reason = "回复消息不符合标准格式";
- }
- }
- private void onDataChange(string oneLineMessage)
- {
- lock (_locker)
- {
- if (string.IsNullOrEmpty(_newline))//没有CR
- {
- _lstAsciiMsgs.AddLast(oneLineMessage);//将消息添加到最后
- return;
- }
- string[] array = oneLineMessage.Split(_newline.ToCharArray());//按照cr分开通讯数据
- foreach (string text in array)
- {
- if (!string.IsNullOrEmpty(text))
- {
- _lstAsciiMsgs.AddLast(text + _newline);//存进list中等待处理
- }
- }
- }
- }
- public override bool ServerUp()
- {
- if (!CheckVceStatus())
- return false;
- _currentVceMessage = new VceMessage { Head = VceMessageHead.Set, Command = VceCommand.ServerUp, Param = "ALL,ON" };
- _currentMsg = _currentVceMessage.toSunWayString() + _newline;
- _status = RState.Running;
- return _serialport.Write(_currentMsg);
- }
- public override bool HomeALL()
- {
- _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.Home, Param = "ALL" };
- _currentMsg = _currentVceMessage.toSunWayString() + _newline;
- _status = RState.Running;
- return _serialport.Write(_currentMsg);
- }
- public override bool Home(string axis)
- {
- _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.Home, Param = axis };
- _currentMsg = _currentVceMessage.toSunWayString() + _newline;
- _status = RState.Running;
- return _serialport.Write(_currentMsg);
- }
- public override bool CheckStatus()
- {
- if (!CheckVceStatus())
- return false;
- _currentVceMessage = new VceMessage { Head = VceMessageHead.Read, Command = VceCommand.CheckStatus };
- _currentMsg = _currentVceMessage.toSunWayString() + _newline;
- _status = RState.Running;
- return _serialport.Write(_currentMsg);
- }
- public override bool CloseDoor()
- {
- if (!CheckVceStatus())
- return false;
- _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.DoorClose };
- _currentMsg = _currentVceMessage.toSunWayString() + _newline;
- _status = RState.Running;
- return _serialport.Write(_currentMsg);
- }
- /// <summary>
- /// 开门提示
- /// 在honghuVCE中没有ATM信号的内部卡控 可能会导致开门的压差
- /// 因此每一次都要增加判断,只要引用此处功能的,前面都需要有判断
- ///
- /// </summary>
- /// <returns></returns>
- public override bool OpenDoor()
- {
- //如果其他指令正在执行 且
- //if (!CheckVceStatus())
- // return false;
- if (_IsDashWaferError)
- _IsDashWaferError = false;
- _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.DoorOpen };
- _currentMsg = _currentVceMessage.toSunWayString() + _newline;
- _status = RState.Running;
- return _serialport.Write(_currentMsg);
- }
- public override bool Load()
- {
- if (!CheckVceStatus())
- return false;
- _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.Load };
- _currentMsg = _currentVceMessage.toSunWayString() + _newline;
- _status = RState.Running;
- return _serialport.Write(_currentMsg);
- }
- public override bool UnLoad()
- {
- if (!CheckVceStatus())
- return false;
- _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.UnLoad };
- _currentMsg = _currentVceMessage.toSunWayString() + _newline;
- _status = RState.Running;
- return _serialport.Write(_currentMsg);
- }
- public override bool Map()
- {
- if (!CheckVceStatus())
- return false;
- _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.Map };
- _currentMsg = _currentVceMessage.toSunWayString() + _newline;
- _status = RState.Running;
- return _serialport.Write(_currentMsg);
- }
- public override bool ReadMap()
- {
- if (!CheckVceStatus())
- return false;
- _currentVceMessage = new VceMessage { Head = VceMessageHead.Read, Command = VceCommand.ReadMap, Param = "S" };
- _currentMsg = _currentVceMessage.toSunWayString() + _newline;
- _status = RState.Running;
- _HasReceiveMsg = false;
- return _serialport.Write(_currentMsg);
- }
- public override bool Goto(int Targetslot)
- {
- if (!CheckVceStatus())
- return false;
- LOG.Write(eEvent.EV_VCE_COMMON_INFO, _moduleName, $"SlotNum:{Targetslot}");
- _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.Goto, Param = (Targetslot + 1).ToString().PadLeft(2, '0') };
- _currentMsg = _currentVceMessage.toSunWayString() + _newline;
- _status = RState.Running;
- return _serialport.Write(_currentMsg);
- }
- public override bool GotoLP()
- {
- if (!CheckVceStatus())
- return false;
- _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.GotoLP };
- _currentMsg = _currentVceMessage.toSunWayString() + _newline;
- _status = RState.Running;
- return _serialport.Write(_currentMsg);
- }
- public override bool ClearError()
- {
- _currentVceMessage = new VceMessage { Head = VceMessageHead.Set, Command = VceCommand.ClearError };
- _currentMsg = _currentVceMessage.toSunWayString() + _newline;
- _status = RState.Running;
- return _serialport.Write(_currentMsg);
- }
- }
- }
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