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AdLinkEthercat
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
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EFEM
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10c22069fe
1.添加EFEM光栅报警开关
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9 months ago |
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EPD
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2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
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1 year ago |
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EPDs
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4ffafb6001
EFEM界面优化
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2 years ago |
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IODevices
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b6309f712c
upload for Venus SE/DE
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8 months ago |
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PreAligner
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b6309f712c
upload for Venus SE/DE
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8 months ago |
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SMIF
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8436daeb68
Eliminate SE generation warning.
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1 year ago |
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TM
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ff6df5295a
add SunWay VCE && TMRobot and change by the configitem of VCEX.VceType && TM.TMType.
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8 months ago |
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VCE
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ff6df5295a
add SunWay VCE && TMRobot and change by the configitem of VCEX.VceType && TM.TMType.
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8 months ago |
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AIRSYSChiller.cs
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 year ago |
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AdTecRF.cs
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b6309f712c
upload for Venus SE/DE
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8 months ago |
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AdixenTurboPump.cs
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3aee4d6673
1. Add the function of StatsDataManager in UI,RT
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1 year ago |
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CometRF.cs
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33d0cd73dd
1.修复Pump Counter 显示错误bug
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11 months ago |
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DataDefine.cs
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12fa756895
1. SETM will be Init while While SETM Abort Homing
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1 year ago |
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DeviceManager.cs
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3aee4d6673
1. Add the function of StatsDataManager in UI,RT
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1 year ago |
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ESC5HighVoltage.cs
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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1 year ago |
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EdwardsPump.cs
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10c22069fe
1.添加EFEM光栅报警开关
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9 months ago |
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FinsPlc.cs
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9163903164
Kepler2200优化
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1 year ago |
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JetEPDBase.cs
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4ffafb6001
EFEM界面优化
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2 years ago |
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JetEfem.cs
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5fc13b3f0c
New Efem design
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2 years ago |
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JetKepler2200APM.cs
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a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
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9 months ago |
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JetKepler2200BPM.cs
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a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
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9 months ago |
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JetKepler2300PM.cs
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79ffe0c064
1.分开Kepler与Venus SequenceView界面
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11 months ago |
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JetPMBase.cs
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b6309f712c
upload for Venus SE/DE
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8 months ago |
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JetVenusDEPM.cs
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b6309f712c
upload for Venus SE/DE
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8 months ago |
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JetVenusSEPM.cs
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3aee4d6673
1. Add the function of StatsDataManager in UI,RT
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1 year ago |
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JetVenusSEPMBase.cs
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56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
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1 year ago |
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KeplerSignalTower.cs
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7a1faeac74
Redesign the EFEM module for thread safe issue.
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1 year ago |
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LzMatch_Ethercat.cs
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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PendulumValve.cs
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b6309f712c
upload for Venus SE/DE
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8 months ago |
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PlasmaController.cs
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75710d35d8
RF Match.
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2 years ago |
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RevtechMatch.cs
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a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
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9 months ago |
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SMCChiller.cs
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b6309f712c
upload for Venus SE/DE
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8 months ago |
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SMCChillerDrive.cs
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b6309f712c
upload for Venus SE/DE
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8 months ago |
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SMCShareChiller.cs
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b6309f712c
upload for Venus SE/DE
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8 months ago |
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SkyPump.cs
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10c22069fe
1.添加EFEM光栅报警开关
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9 months ago |
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TruPlasmaRF.cs
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b6309f712c
upload for Venus SE/DE
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8 months ago |
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TruPlasmaRF_Ethercat.cs
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
zhouhr
ff6df5295a
add SunWay VCE && TMRobot and change by the configitem of VCEX.VceType && TM.TMType.