HongHuVR.cs 27 KB

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  1. using Aitex.Core.RT.Log;
  2. using Aitex.Core.RT.SCCore;
  3. using Aitex.Core.Util;
  4. using Aitex.Sorter.Common;
  5. using MECF.Framework.Common.CommonData;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.SubstrateTrackings;
  8. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  9. using System;
  10. using System.Collections.Concurrent;
  11. using System.Collections.Generic;
  12. using System.ComponentModel;
  13. using System.Diagnostics.Tracing;
  14. using System.Linq;
  15. using System.Runtime.InteropServices;
  16. using System.Text;
  17. using System.Text.RegularExpressions;
  18. using System.Threading.Tasks;
  19. using Venus_Core;
  20. using Venus_RT.Modules;
  21. namespace Venus_RT.Devices.VCE
  22. {
  23. //泓浒
  24. enum VRStep
  25. {
  26. Idle,
  27. Home,
  28. Move,
  29. Halt,
  30. Release,
  31. Goto,
  32. Pick,
  33. PickExtend,
  34. PickRetract,
  35. Place,
  36. PlaceExtend,
  37. PlaceRetract,
  38. Xfer,
  39. CheckLoad_ArmA,
  40. CheckLoad_ArmB,
  41. SetLoad,
  42. ReQueryLoadA,
  43. ReQueryLoadB,
  44. SetSpeed,
  45. SaveSpeed,
  46. RQSpeed,
  47. ServeOn,
  48. }
  49. public class HongHuVR : ITransferRobot
  50. {
  51. private readonly AsyncSocket _socket;
  52. private const string EOF = "\n";
  53. private RState _status;
  54. private bool _IsHomed;
  55. private VRStep _currentStep = VRStep.Idle;
  56. private Dictionary<string, int> _StationNumbers = new Dictionary<string, int>();
  57. public RState Status { get { return _status; } }
  58. public bool IsHomed { get { return _IsHomed; } }
  59. private string Hand2Arm(Hand hand) => hand == Hand.Blade2 ? "B" : "A";
  60. //private readonly Regex _rex_check_load = new Regex(@"LOAD\s+(A|B)\s+(\w+)\s*");
  61. private readonly Regex _rex_check_load = new Regex(@"CHECK LOAD\s*");
  62. private readonly Regex _rex_rq_load_A = new Regex(@"LOAD\sA\s.*");
  63. private readonly Regex _rex_rq_load_B = new Regex(@"LOAD\sB\s.*");
  64. private readonly Regex _rex_error_code = new Regex(@"_ERR\s+(\d+)\s*");
  65. private readonly Regex _rex_rq_speed = new Regex(@"MOTIONPARA.*");
  66. private RobotMoveInfo _robotMoveInfo = new RobotMoveInfo();
  67. private string _WithWaferSpeed = "";
  68. private string _NoWaferSpeed = "";
  69. public string WithWaferSpeed => _WithWaferSpeed;
  70. public string NoWaferSpeed => _NoWaferSpeed;
  71. public RobotMoveInfo TMRobotMoveInfo { get { return _robotMoveInfo; } }
  72. public double Offset_X => 0;
  73. public double Offset_Y => 0;
  74. public double Offset_D => 0;
  75. public Dictionary<string, string> _error2msg = new Dictionary<string, string>()
  76. {
  77. {"221" , "手臂选择无效,检查指令中的对应参数" },
  78. {"222" , "无效的 Pan 参数"},
  79. {"305" , "无法识别的命令,检查指令" },
  80. {"309" , "不支持的指令,检查指令" },
  81. {"350" , "解析器错误,堆栈溢出,检查指令" },
  82. {"402" , "槽位参数异常,检查指令中的对应参数" },
  83. {"403" , "Slot编号错误,指令的参数中指定的 Slot 编号超过了有效范围" },
  84. {"407" , "旋转轴超过限位,检查指令中的对应参数" },
  85. {"408" , "伸展轴超过限位,检查指令中的对应参数" },
  86. {"409" , "升降轴超过限位,检查指令中的对应参数" },
  87. {"416" , "无法执行 CheckLoad 操作,检查指令中的对应参数" },
  88. {"417" , "Offset 参数参数超限,检查指令中指定的 offset 值是否在允许范围内" },
  89. {"418" , "AWC 功能检测到误差过大,检查晶圆是否过偏或检查AWC传感器标定参数" },
  90. {"420" , "副臂没有在HOME位置,请检查副臂的位置,可以使用HOME ALL使得所有关节姿态回到HOME位置" },
  91. {"451" , "取片后 AWC校验异常,机械臂取片后缩回时,检测到晶圆偏心过大,或者 AWC 校验失败" },
  92. {"550" , "Station参数超出范围,检查站点配置参数" },
  93. {"551" , "ARM 不在站点,检查当前手臂实际位置与逻辑位置" },
  94. {"560" , "机械臂处于 HALT 状态,拒绝接受新的指令" },
  95. {"561" , "当前机械臂状态机与指令不匹配,当前状态机不满足执行该指令的条件" },
  96. {"600" , "PAligner通讯异常,检查与 PA 的通讯电缆,上电情况等" },
  97. {"603" , "收到急停指令" },
  98. {"608" , "机械臂急停中" },
  99. {"610" , "手持示教器急停按钮按下" },
  100. {"692" , "检测左 PAN 上有片,与逻辑状态不匹配" },
  101. {"693" , "检测右 PAN 上有片,与逻辑状态不匹配" },
  102. {"694" , "检测左 PAN 上无片,与逻辑状态不匹配" },
  103. {"695" , "检测右 PAN 上有片,与逻辑状态不匹配" },
  104. {"700" , "当前手臂有晶圆 ,检查指令动作要求的晶圆状态,与手臂内部存储的晶圆状态是否匹配" },
  105. {"701" , "当前手臂无晶圆,检查指令动作要求的晶圆状态,与手臂内部存储的晶圆状态是否匹配"},
  106. {"711" , "站点互锁错误,检查站点的“允许机械臂进入信号”是否就绪"},
  107. {"721" , "取片失败,检查手臂晶圆状态,或者晶圆检测传感器状态"},
  108. {"722" , "放片失败,检查手臂晶圆状态,或者晶圆检测传感器状态"},
  109. {"771" , "取片时 AWC 传感器检测失败,检查 AWC 传感器状态,或者 AWC 配置相关是否正确"},
  110. {"791" , "查询 AWC 数据失败,未曾执行过 AWC 相关功能的操作"},
  111. {"792" , "AWC 传感器检测失败,检查AWC传感器状态,或者AWC配置相关是否正确"},
  112. {"799" , "放片失败,检查手臂晶圆状态,或者晶圆检测传感器状态"},
  113. {"802" , "伺服报错,伺服提示异常,目前暂时无法读取伺服错误。开机盖可以读到伺服信息。一般整机断电重启。"},
  114. {"803" , "机械臂上电失败,HOME ALL 指令,或者其他上电操作,驱动器未能正常响应上电"},
  115. {"805" , "第1个伺服收敛异常,伺服没有在规定时间内运动到位置,或者停稳。"},
  116. {"806" , "第2个伺服收敛异常,伺服没有在规定时间内运动到位置,或者停稳。"},
  117. {"807" , "第3个伺服收敛异常,伺服没有在规定时间内运动到位置,或者停稳。"},
  118. {"808" , "第4个伺服收敛异常,伺服没有在规定时间内运动到位置,或者停稳。"},
  119. {"1100" , "无法安全回 HOME 操作,检查机械臂是否在安全 HOME 半径内,常见于双臂机械臂,双臂同时伸出超过安全位"},
  120. {"1805" , "当前处于示教器模式,检查示教器档位,一般此时处于 Teach 档位"},
  121. {"13004" , "PA报错,检查 PA 运行状态,PA 扫片结果等"},
  122. };
  123. private BlockingCollection<RobotAnimationData> blockingCollection = new BlockingCollection<RobotAnimationData>();
  124. private ModuleName _module;
  125. public HongHuVR(ModuleName module)
  126. {
  127. _module = module;
  128. _socket = new AsyncSocket("", EOF);
  129. _socket.Connect(SC.GetStringValue($"{_module}.IPAddress"));
  130. _socket.OnDataChanged += OnReceiveMessage;
  131. _socket.OnErrorHappened += OnErrorHappen;
  132. _status = RState.Init;
  133. _IsHomed = false;
  134. _StationNumbers[ModuleName.VCE1.ToString()] = SC.GetValue<int>($"{_module}.VCE1StationNumber");
  135. _StationNumbers[ModuleName.VCEA.ToString()] = SC.GetValue<int>($"{_module}.VCEAStationNumber");
  136. _StationNumbers[ModuleName.VCEB.ToString()] = SC.GetValue<int>($"{_module}.VCEBStationNumber");
  137. _StationNumbers[ModuleName.Aligner1.ToString()] = SC.GetValue<int>($"{_module}.Aligner1StationNumber");
  138. _StationNumbers[ModuleName.PMA.ToString()] = SC.GetValue<int>($"{_module}.PMAStationNumber");
  139. _StationNumbers[ModuleName.PMB.ToString()] = SC.GetValue<int>($"{_module}.PMBStationNumber");
  140. _StationNumbers[ModuleName.PMC.ToString()] = SC.GetValue<int>($"{_module}.PMCStationNumber");
  141. _StationNumbers[ModuleName.PMD.ToString()] = SC.GetValue<int>($"{_module}.PMDStationNumber");
  142. _StationNumbers["CheckLoad"] = SC.GetValue<int>($"{_module}.CheckStationNumber");
  143. WaferManager.Instance.SubscribeLocation(ModuleName.TMRobot, 2);
  144. Task.Run(() =>
  145. {
  146. foreach (var data in blockingCollection.GetConsumingEnumerable())
  147. {
  148. _robotMoveInfo.Action = data.Action;
  149. _robotMoveInfo.ArmTarget = data.Hand == Hand.Blade1 ? RobotArm.ArmA : (data.Hand == Hand.Both ? RobotArm.Both : RobotArm.ArmB);
  150. _robotMoveInfo.BladeTarget = $"{_robotMoveInfo.ArmTarget}.{data.Target}";
  151. System.Threading.Thread.Sleep(600);
  152. }
  153. });
  154. }
  155. //初始化某个轴
  156. //1.清错
  157. //2.设备上电
  158. //3.各轴按顺序运动
  159. public bool Home()
  160. {
  161. _status = RState.Running;
  162. _currentStep = VRStep.Home;
  163. return _SendCommand("HOME ALL");
  164. }
  165. public bool Halt()
  166. {
  167. _status = RState.Running;
  168. _currentStep = VRStep.Halt;
  169. return _SendCommand("HALT");
  170. }
  171. public bool Release()
  172. {
  173. _status = RState.Running;
  174. _currentStep = VRStep.Release;
  175. return _SendCommand("RELEASE");
  176. }
  177. //public bool MOVE()
  178. //{
  179. //}
  180. public bool Pick(ModuleName station, int slot, Hand hand)
  181. {
  182. if (!CheckRobotStatus())
  183. return false;
  184. _currentStep = VRStep.Pick;
  185. _status = RState.Running;
  186. SetRobotMovingInfo(RobotAction.Picking, hand, station);
  187. return _SendCommand($"PICK {_StationNumbers[station.ToString()]} ARM {Hand2Arm(hand)}");
  188. }
  189. public bool PickExtend(ModuleName station, int slot, Hand hand)
  190. {
  191. if (!CheckRobotStatus())
  192. return false;
  193. _currentStep = VRStep.PickExtend;
  194. _status = RState.Running;
  195. SetRobotMovingInfo(RobotAction.Extending, hand, station);
  196. return _SendCommand($"PICK {_StationNumbers[station.ToString()]} ARM {Hand2Arm(hand)} ENRT NR");
  197. }
  198. public bool PickRetract(ModuleName station, int slot, Hand hand)
  199. {
  200. if (!CheckRobotStatus())
  201. return false;
  202. _currentStep = VRStep.PickRetract;
  203. _status = RState.Running;
  204. SetRobotMovingInfo(RobotAction.Retracting, hand, station);
  205. return _SendCommand($"PICK {_StationNumbers[station.ToString()]} ARM {Hand2Arm(hand)} STRT NR");
  206. }
  207. public bool Place(ModuleName station, int slot, Hand hand)
  208. {
  209. if (!CheckRobotStatus())
  210. return false;
  211. _currentStep = VRStep.Place;
  212. _status = RState.Running;
  213. SetRobotMovingInfo(RobotAction.Placing, hand, station);
  214. return _SendCommand($"PLACE {_StationNumbers[station.ToString()]} ARM {Hand2Arm(hand)}");
  215. }
  216. public bool PlaceExtend(ModuleName station, int slot, Hand hand)
  217. {
  218. if (!CheckRobotStatus())
  219. return false;
  220. _currentStep = VRStep.Place;
  221. _status = RState.Running;
  222. SetRobotMovingInfo(RobotAction.Extending, hand, station);
  223. return _SendCommand($"PLACE {_StationNumbers[station.ToString()]} ARM {Hand2Arm(hand)} ENRT NR");
  224. }
  225. public bool PlaceRetract(ModuleName station, int slot, Hand hand)
  226. {
  227. if (!CheckRobotStatus())
  228. return false;
  229. _currentStep = VRStep.Place;
  230. _status = RState.Running;
  231. SetRobotMovingInfo(RobotAction.Retracting, hand, station);
  232. return _SendCommand($"PLACE {_StationNumbers[station.ToString()]} ARM {Hand2Arm(hand)} STRT NR");
  233. }
  234. public bool Transfer(ModuleName fromstation, ModuleName tostation, Hand hand)
  235. {
  236. if (!CheckRobotStatus())
  237. return false;
  238. _currentStep = VRStep.Xfer;
  239. _status = RState.Running;
  240. return _SendCommand($"XFER ARM {Hand2Arm(hand)} {_StationNumbers[fromstation.ToString()]} {_StationNumbers[tostation.ToString()]}");
  241. }
  242. public bool CheckLoad(Hand hand = Hand.Blade1)
  243. {
  244. if (_currentStep != VRStep.Home && _currentStep != VRStep.CheckLoad_ArmA && !CheckRobotStatus())
  245. return false;
  246. _currentStep = hand == Hand.Blade2 ? VRStep.CheckLoad_ArmB : VRStep.CheckLoad_ArmA;
  247. _status = RState.Running;
  248. string arm = hand == Hand.Blade2 ? "B" : "A";
  249. return _SendCommand($"CHECK LOAD {_StationNumbers["CheckLoad"]} {arm}");
  250. }
  251. public bool QueryAwc()
  252. {
  253. return true;
  254. }
  255. public bool Goto(ModuleName station, int slot, Hand hand)
  256. {
  257. if (!CheckRobotStatus())
  258. return false;
  259. _currentStep = VRStep.Goto;
  260. _status = RState.Running;
  261. SetRobotMovingInfo(RobotAction.Rotating, hand, station);
  262. return _SendCommand($"Goto {_StationNumbers[station.ToString()]} ARM {Hand2Arm(hand)}");
  263. }
  264. public bool MoveTo(ModuleName stnFrom, ModuleName stnTo, Hand hand)
  265. {
  266. _currentStep = VRStep.Move;
  267. _status = RState.Running;
  268. return _SendCommand($"MOVE R ABS 100 ARM {Hand2Arm(hand)}"); ;
  269. }
  270. public bool PickWithOffset(ModuleName station, int slot, Hand hand, int Roffset, int Toffset)
  271. {
  272. _currentStep = VRStep.Pick;
  273. _status = RState.Running;
  274. SetRobotMovingInfo(RobotAction.Picking, hand, station);
  275. return _SendCommand($"PICK {_StationNumbers[station.ToString()]} ARM {Hand2Arm(hand)} RO {Roffset} TO {Toffset}"); ;
  276. }
  277. public bool ReQueryLoadA()
  278. {
  279. _currentStep = VRStep.ReQueryLoadA;
  280. _status = RState.Running;
  281. return _SendCommand($"RQ LOAD ARM A");
  282. }
  283. public bool ReQueryLoadB()
  284. {
  285. _currentStep = VRStep.ReQueryLoadB;
  286. _status = RState.Running;
  287. return _SendCommand($"RQ LOAD ARM B");
  288. }
  289. public bool SetSpeed(string withwafer, float speed)
  290. {
  291. if (!CheckRobotStatus())
  292. return false;
  293. _currentStep = VRStep.SetSpeed;
  294. _status = RState.Running;
  295. int setspeed = (int)Math.Floor(speed * 10);
  296. return _SendCommand($"SET MOTIONPARA {withwafer} SPDPCT ALL {setspeed.ToString().PadLeft(4, '0')}");
  297. }
  298. public bool SaveSpeed(string withwafer)
  299. {
  300. if (!CheckRobotStatus())
  301. return false;
  302. _currentStep = VRStep.SaveSpeed;
  303. _status = RState.Running;
  304. return _SendCommand($"STORE MOTIONPARA {withwafer} SPDPCT ALL");
  305. }
  306. public bool QuerySpeed(string withwafer)
  307. {
  308. if (!CheckRobotStatus())
  309. return false;
  310. _currentStep = VRStep.RQSpeed;
  311. _status = RState.Running;
  312. //MOTIONPARA {} SPDPCT all x t z
  313. return _SendCommand($"RQ MOTIONPARA {withwafer} SPDPCT ALL");
  314. }
  315. public bool ServeOn(bool IsOn)
  316. {
  317. _status = RState.End;
  318. return true;
  319. }
  320. private bool _SendCommand(string cmd)
  321. {
  322. LOG.WriteSingeLine(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"Send Command to TMRobot: {cmd},Connect:{_socket.IsConnected}");
  323. return _socket.Write(cmd + EOF);
  324. }
  325. private bool CheckRobotStatus()
  326. {
  327. if (Status == RState.Init)
  328. {
  329. LOG.Write(eEvent.ERR_DEVICE_INFO, ModuleName.TMRobot, "TMRobot is not homed, please home first.");
  330. return false;
  331. }
  332. else if (Status == RState.Running)
  333. {
  334. LOG.Write(eEvent.ERR_DEVICE_INFO, ModuleName.TMRobot, "TMRobot is busy, please wait a minute");
  335. return false;
  336. }
  337. else if (Status == RState.Failed || Status == RState.Timeout)
  338. {
  339. LOG.Write(eEvent.ERR_DEVICE_INFO, ModuleName.TMRobot, "TMRobot has a error, please check and fix the hardware issue and home it");
  340. return false;
  341. }
  342. return true;
  343. }
  344. private void OnReceiveMessage(string revMsg)
  345. {
  346. string[] ResMsgs = revMsg.Split('\n');
  347. foreach (string revRawMsg in ResMsgs)
  348. {
  349. if (string.IsNullOrWhiteSpace(revRawMsg)) continue;
  350. string RevMsg = revRawMsg.Trim();
  351. LOG.WriteSingeLine(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"Receive message from TMRobot: {RevMsg}, while {_currentStep}");
  352. if (_rex_error_code.IsMatch(RevMsg))
  353. {
  354. _IsHomed = false;
  355. _status = RState.Failed;
  356. var results = _rex_error_code.Match(RevMsg);
  357. ErrorMessageHandler(results.Groups[1].Value);
  358. return;
  359. }
  360. switch (_currentStep)
  361. {
  362. case VRStep.Goto:
  363. case VRStep.Halt:
  364. case VRStep.Move:
  365. case VRStep.Xfer:
  366. case VRStep.SetSpeed:
  367. case VRStep.SaveSpeed:
  368. case VRStep.Pick:
  369. case VRStep.PickExtend:
  370. case VRStep.PickRetract:
  371. case VRStep.Place:
  372. case VRStep.PlaceExtend:
  373. case VRStep.PlaceRetract:
  374. {
  375. if (RevMsg.Trim() == "_RDY" || (RevMsg.Contains("_RDY") && !RevMsg.Contains("_ERR")))
  376. {
  377. _currentStep = VRStep.Idle;
  378. _status = RState.End;
  379. }
  380. else
  381. {
  382. ReportWrongMsg(RevMsg);
  383. }
  384. if (_currentStep != VRStep.PickExtend && _currentStep != VRStep.PlaceExtend)
  385. SetRobotMovingInfo(RobotAction.None, Hand.Both, ModuleName.TMRobot);
  386. }
  387. break;
  388. case VRStep.Home:
  389. {
  390. if (RevMsg.Trim() == "_RDY")
  391. {
  392. //CheckLoad(Hand.Blade1);
  393. _currentStep = VRStep.Idle;
  394. _status = RState.End;
  395. _IsHomed = true;
  396. SetRobotMovingInfo(RobotAction.Homing, Hand.Both, ModuleName.TMRobot);
  397. }
  398. else
  399. ReportWrongMsg(RevMsg);
  400. }
  401. break;
  402. case VRStep.CheckLoad_ArmA:
  403. {
  404. if (_rex_check_load.IsMatch(RevMsg))
  405. {
  406. GetCheckLoadResult(RevMsg);
  407. //CheckLoad(Hand.Blade2);
  408. }
  409. if (RevMsg.Trim() == "_RDY" || (RevMsg.Contains("_RDY") && !RevMsg.Contains("_ERR")))
  410. {
  411. _currentStep = VRStep.Idle;
  412. _status = RState.End;
  413. }
  414. }
  415. break;
  416. case VRStep.CheckLoad_ArmB:
  417. {
  418. if (_rex_check_load.IsMatch(RevMsg))
  419. {
  420. GetCheckLoadResult(RevMsg);
  421. //_currentStep = VRStep.Idle;
  422. //_status = RState.End;
  423. //_IsHomed = true;
  424. }
  425. if (RevMsg.Trim() == "_RDY" || (RevMsg.Contains("_RDY") && !RevMsg.Contains("_ERR")))
  426. {
  427. _currentStep = VRStep.Idle;
  428. _status = RState.End;
  429. }
  430. }
  431. break;
  432. case VRStep.ReQueryLoadA:
  433. if (_rex_rq_load_A.IsMatch(RevMsg))
  434. {
  435. string WaferStatus = RevMsg.Split(' ')[2];
  436. //LOG.Write(eEvent.WARN_DEFAULT_WARN, ModuleName.TMRobot, WaferStatus);
  437. if (WaferStatus.Contains("ON") && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0))
  438. {
  439. WaferManager.Instance.CreateWafer(ModuleName.TMRobot, 0, Aitex.Core.Common.WaferStatus.Normal);
  440. }
  441. if (WaferStatus.Contains("OFF"))
  442. {
  443. //LOG.Write(eEvent.WARN_DEFAULT_WARN, ModuleName.TMRobot, "contains off");
  444. WaferManager.Instance.DeleteWafer(ModuleName.TMRobot, 0);
  445. }
  446. }
  447. else
  448. {
  449. if (RevMsg.Trim() == "_RDY" || (RevMsg.Contains("_RDY") && !RevMsg.Contains("_ERR")))
  450. {
  451. _currentStep = VRStep.Idle;
  452. _status = RState.End;
  453. }
  454. else
  455. {
  456. ReportWrongMsg(RevMsg);
  457. }
  458. }
  459. break;
  460. case VRStep.ReQueryLoadB:
  461. if (_rex_rq_load_B.IsMatch(RevMsg))
  462. {
  463. string WaferStatus = RevMsg.Split(' ')[2];
  464. //LOG.Write(eEvent.WARN_DEFAULT_WARN, ModuleName.TMRobot, WaferStatus);
  465. if (WaferStatus.Contains("ON") && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1))
  466. {
  467. WaferManager.Instance.CreateWafer(ModuleName.TMRobot, 1, Aitex.Core.Common.WaferStatus.Normal);
  468. }
  469. if (WaferStatus.Contains("OFF"))
  470. {
  471. WaferManager.Instance.DeleteWafer(ModuleName.TMRobot, 1);
  472. }
  473. }
  474. else
  475. {
  476. if (RevMsg.Trim() == "_RDY" || (RevMsg.Contains("_RDY") && !RevMsg.Contains("_ERR")))
  477. {
  478. _currentStep = VRStep.Idle;
  479. _status = RState.End;
  480. }
  481. else
  482. {
  483. ReportWrongMsg(RevMsg);
  484. }
  485. }
  486. break;
  487. case VRStep.RQSpeed:
  488. //MOTIONPARA {} SPDPCT all r t z
  489. if (_rex_rq_speed.IsMatch(RevMsg))
  490. {
  491. string[] _msgs = RevMsg.Split(' ');
  492. if (_msgs[1] == "WITHWAFER")
  493. {
  494. _WithWaferSpeed = _msgs[4];
  495. }
  496. if (_msgs[1] == "NOWAFER")
  497. {
  498. _NoWaferSpeed = _msgs[4];
  499. }
  500. if (_msgs[1] == "MIDDLE")
  501. {
  502. _WithWaferSpeed = _msgs[4];
  503. }
  504. }
  505. else
  506. {
  507. if (RevMsg.Trim() == "_RDY" || (RevMsg.Contains("_RDY") && !RevMsg.Contains("_ERR")))
  508. {
  509. _currentStep = VRStep.Idle;
  510. _status = RState.End;
  511. }
  512. else
  513. {
  514. ReportWrongMsg(RevMsg);
  515. }
  516. }
  517. break;
  518. default:
  519. if (!RevMsg.Contains("_EVENT"))
  520. ReportWrongMsg(RevMsg);
  521. break;
  522. }
  523. }
  524. }
  525. private void GetCheckLoadResult(string revMsg)
  526. {
  527. Match result = _rex_check_load.Match(revMsg);
  528. string Arm = result.Groups[1].Value;
  529. string WaferStatus = result.Groups[2].Value;
  530. if (WaferStatus == "ON")
  531. {
  532. WaferManager.Instance.CreateWafer(ModuleName.TMRobot, Arm == "A" ? 0 : 1, Aitex.Core.Common.WaferStatus.Unknown);
  533. }
  534. }
  535. private void ErrorMessageHandler(string errorcode)
  536. {
  537. _status = RState.Failed;
  538. string ErrorInfo;
  539. if (_error2msg.ContainsKey(errorcode))
  540. {
  541. ErrorInfo = _error2msg[errorcode];
  542. LOG.Write(eEvent.ERR_DEVICE_INFO, ModuleName.TMRobot, ErrorInfo);
  543. }
  544. else
  545. {
  546. LOG.Write(eEvent.ERR_DEVICE_INFO, ModuleName.TMRobot, $"Dictionary Not Contains error code:{errorcode}");
  547. }
  548. _IsHomed = false;
  549. }
  550. private void OnErrorHappen(ErrorEventArgs args)
  551. {
  552. //Singleton<RouteManager>.Instance.SETM.PostMsg(SETMEntity.MSG.Error);
  553. LOG.Write(eEvent.ERR_DEVICE_INFO, ModuleName.TMRobot, $"HongHu TMRobot Error: {args.Reason} while {_currentStep}");
  554. }
  555. private void ReportWrongMsg(string revMsg)
  556. {
  557. LOG.Write(eEvent.WARN_DEVICE_INFO, ModuleName.TMRobot, $"Receive wrong message:{revMsg} while {_currentStep}");
  558. }
  559. public void SetRobotMovingInfo(RobotAction action, Hand hand, ModuleName target)
  560. {
  561. //_robotMoveInfo.Action = action;
  562. //_robotMoveInfo.ArmTarget = hand == Hand.Blade1 ? RobotArm.ArmA : (hand == Hand.Both ? RobotArm.Both : RobotArm.ArmB);
  563. //_robotMoveInfo.BladeTarget = $"{_robotMoveInfo.ArmTarget}.{target}";
  564. blockingCollection.Add(new RobotAnimationData(action, hand, target));
  565. }
  566. }
  567. }