RtState.cs 3.6 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace Venus_Core
  7. {
  8. public enum RtState
  9. {
  10. Init,
  11. Initializing,
  12. Idle,
  13. Manual,
  14. Transfer,
  15. AutoIdle,
  16. AutoRunning,
  17. AutoRunningPaused,
  18. ReturningCassette,
  19. Cycle,
  20. PrepareCycle,
  21. PostCycle,
  22. SetSpeed,
  23. Error,
  24. Reset,
  25. Processing,
  26. PostProcess,
  27. PauseProcess,
  28. //Maintenance,
  29. //WaferMapping,
  30. //Cycling,
  31. TMCycle,
  32. ReturnWafer,
  33. }
  34. public enum PMState
  35. {
  36. Init,
  37. Idle,
  38. Homing,
  39. GasFlowing,
  40. RfPowering,
  41. Heating,
  42. LaunchingPump,
  43. LaunchingTurboPump,
  44. Pumping,
  45. Venting,
  46. Purging,
  47. GasLinePurge,
  48. PumpingLoadLock,
  49. VentingLoadLock,
  50. PurgingLoadLock,
  51. LoadLockLeakCheck,
  52. MoveLift,
  53. Purge,
  54. // transfer
  55. LLPlacing,
  56. LLPicking,
  57. Transfer,
  58. Error,
  59. PrepareTransfer,
  60. PostTransfer,
  61. TransferHandoff,
  62. //Process,
  63. LeakCheck,
  64. GasBoxLeakCheck,
  65. LiftpinMoving,
  66. LiftpinWaiting,
  67. GuidePinMoving,
  68. PreClean,
  69. LoadProcessRecipe,
  70. PreProcess,
  71. Processing,
  72. PostProcess,
  73. OpeningLid,
  74. ClosingLid,
  75. MFCVerification,
  76. AllMFCVerification,
  77. // exchange wafer with TM
  78. PreparePick,
  79. PreparePlace,
  80. ReadyForPick,
  81. ReadyForPlace,
  82. DropDownWafer,
  83. LiftUpWafer,
  84. DropDownReady,
  85. LiftUpReady,
  86. FinishPick,
  87. FinishPlace,
  88. PartialPressureTesting,
  89. VATPerformanceTesting
  90. }
  91. public enum TMState
  92. {
  93. Unknown,
  94. Init,
  95. Initializing,
  96. Idle,
  97. Error,
  98. Pumping,
  99. Venting,
  100. Purging,
  101. Leakchecking,
  102. Picking,
  103. Placing,
  104. Swaping,
  105. PMPicking,
  106. PMPlacing,
  107. PMSwaping,
  108. Aligning,
  109. Mapping,
  110. Extending,
  111. Retracting,
  112. Swapping,
  113. Gotoing,
  114. }
  115. public enum LLState
  116. {
  117. //Unknown,
  118. //Init,
  119. //Initializing,
  120. //Idle,
  121. //Error,
  122. //Pumping,
  123. //Venting,
  124. //Purging,
  125. //Leakchecking,
  126. //Picking,
  127. //Placing,
  128. //Swaping,
  129. //PMPicking,
  130. //PMPlacing,
  131. //PMSwaping,
  132. //Aligning,
  133. //Mapping,
  134. //Extending,
  135. //Retracting,
  136. //Swapping,
  137. //Gotoing,
  138. Unknown,
  139. Init,
  140. Initializing,
  141. Idle,
  142. Error,
  143. Pumping,
  144. Venting,
  145. Purging,
  146. LeakCheck,
  147. Prepare_For_TM,
  148. Prepare_For_EFEM,
  149. Ready_For_TM,
  150. Ready_For_EFEM,
  151. }
  152. public enum EFEMSTATE
  153. {
  154. Unknown, // 0
  155. Initializing, // 1
  156. Idle, // 2
  157. Error, // 3
  158. Picking, // 4
  159. Placing, // 5
  160. Aligning, // 6
  161. Mapping, // 7
  162. Init, // 8
  163. Orgshing, // 9
  164. Lifting, // 10
  165. InitingAL, // 11
  166. InitingRB, // 12
  167. Extending, // 13
  168. Retracting, // 14
  169. //SettingLamp, // 15
  170. Swapping,
  171. Gotoing,
  172. Gripping,
  173. Ungripping,
  174. Fliping,
  175. }
  176. }