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Attributes
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3b8277256c
1.recipeHead添加expand
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2 years ago |
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Properties
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8582fd7e94
Venus初始版本提交
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2 years ago |
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Chamber.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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1 year ago |
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DataName.cs
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3cad102221
更新 RT
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2 years ago |
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DeviceName.cs
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f3bd6b016b
添加部分efem功能
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1 year ago |
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EventDefine.cs
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045eae5c75
1.sequence和recipe修改日志输出格式
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1 year ago |
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FADefine.cs
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3cad102221
更新 RT
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2 years ago |
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GlobalEvents.cs
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2d424f4cab
优化漏气检测算法，给TM界面添加 1.删除/添加wafer 2.PM/LL自动隐藏功能
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1 year ago |
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InvokeName.cs
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3cad102221
更新 RT
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2 years ago |
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Kepler2300Device.cs
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a5813eb09d
1.修改chamber wafer样式
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1 year ago |
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MFCCalibrationData.cs
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3a078d515d
1.修复ui灯闪烁错误bug
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1 year ago |
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ModuleName.cs
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3cad102221
更新 RT
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2 years ago |
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PMLeakCheckResult.cs
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a5813eb09d
1.修改chamber wafer样式
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1 year ago |
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PMVATPerformance.cs
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280432bb82
1.TM传片动画制作，UI界面优化
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2 years ago |
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PartialPressureResult.cs
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796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
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1 year ago |
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ProcessUnitDefine.cs
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b96ac701fb
1.添加TM Simulator
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1 year ago |
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Recipe.cs
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b96ac701fb
1.添加TM Simulator
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1 year ago |
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RecipeResult.cs
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93b4531b7b
robot 不能home问题提交
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1 year ago |
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RtState.cs
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f3bd6b016b
添加部分efem功能
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1 year ago |
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SCValue.cs
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3cad102221
更新 RT
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2 years ago |
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SerializeHelper.cs
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280432bb82
1.TM传片动画制作，UI界面优化
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2 years ago |
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SubItem.cs
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bb33e89998
1，优化UI界面
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2 years ago |
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VATPerformanceResult.cs
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796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
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1 year ago |
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ValveType.cs
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a5813eb09d
1.修改chamber wafer样式
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1 year ago |
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VenusDevice.cs
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28b8f5e03a
根据最新的TM sequence修改代码，修改DO-04功能为Vent Valve TM
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1 year ago |
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VenusMenu.cs
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bb33e89998
1，优化UI界面
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2 years ago |
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Venus_Core.csproj
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a5813eb09d
1.修改chamber wafer样式
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1 year ago |
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VirgoDevice.cs
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9760d40cf7
port simulator
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2 years ago |
lixiang
28b8f5e03a
根据最新的TM sequence修改代码，修改DO-04功能为Vent Valve TM