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EFEM
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 year ago |
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EPD
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4ffafb6001
EFEM界面优化
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2 years ago |
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EPDs
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4ffafb6001
EFEM界面优化
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2 years ago |
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IODevices
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e511d1f387
1.添加PM控压功能
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1 year ago |
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PreAligner
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31bbc4482b
update ui && rt && simu for Venus SE
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2 years ago |
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SMIF
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1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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1 year ago |
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TM
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f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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1 year ago |
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VCE
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1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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1 year ago |
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AIRSYSChiller.cs
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 year ago |
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AdTecRF.cs
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e511d1f387
1.添加PM控压功能
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1 year ago |
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AdixenTurboPump.cs
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171eef8acc
Add to chart@@to slot switch page function
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2 years ago |
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CometRF.cs
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20cc441578
1.kepler2200 ui优化
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2 years ago |
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DataDefine.cs
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 year ago |
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DeviceManager.cs
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e511d1f387
1.添加PM控压功能
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1 year ago |
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ESC5HighVoltage.cs
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f3bd6b016b
添加部分efem功能
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2 years ago |
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EdwardsPump.cs
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be22c5112d
TM 添加两个pump 串口23/24/25/26
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2 years ago |
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FinsPlc.cs
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c457973fa2
1.添加Revtech Match
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1 year ago |
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JetEPDBase.cs
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4ffafb6001
EFEM界面优化
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2 years ago |
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JetEfem.cs
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5fc13b3f0c
New Efem design
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2 years ago |
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JetKepler2200APM.cs
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e511d1f387
1.添加PM控压功能
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1 year ago |
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JetKepler2300PM.cs
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e511d1f387
1.添加PM控压功能
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1 year ago |
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JetPMBase.cs
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e511d1f387
1.添加PM控压功能
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1 year ago |
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JetVenusPM.cs
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e511d1f387
1.添加PM控压功能
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1 year ago |
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JetVenusSEPM.cs
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31bbc4482b
update ui && rt && simu for Venus SE
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2 years ago |
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JetVenusSEPMBase.cs
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56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
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2 years ago |
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PendulumValve.cs
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6910d4754e
代码合并
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1 year ago |
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PlasmaController.cs
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75710d35d8
RF Match.
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2 years ago |
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RevtechMatch.cs
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e511d1f387
1.添加PM控压功能
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1 year ago |
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SMCChiller.cs
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c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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1 year ago |
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SkyPump.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 years ago |
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VirgoSignalTower.cs
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bdec2c0d74
1.修改TM robot模拟器
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2 years ago |
zhouhr
f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM