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EFEM
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20606c1ffb
check in new routing algorithm code.
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il y a 1 an |
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LLs
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af631c4aaa
1.添加RF Calibration功能
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il y a 1 an |
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LPs
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8bb5f3f4f9
fixed loadport event notify;
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il y a 1 an |
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PMs
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af631c4aaa
1.添加RF Calibration功能
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il y a 1 an |
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SMIF
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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il y a 1 an |
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Schedulers
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c3ef1d5a6e
Wafer loadlock delay function.
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il y a 1 an |
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TM
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af631c4aaa
1.添加RF Calibration功能
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il y a 1 an |
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VCE
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d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
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il y a 1 an |
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AutoCycle.cs
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a3f01b0830
1、重新引用最新版本的SecsGem动态库，用于实现FA相应的功能；
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il y a 1 an |
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Autotransfer_LP_FA.cs
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8bb5f3f4f9
fixed loadport event notify;
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il y a 1 an |
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DVIDName.cs
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44fc6989ef
1、Remove FabConnect dll file;
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il y a 1 an |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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il y a 2 ans |
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ManualTransfer.cs
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501997ac38
TM/EFEM robot single arm option.
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il y a 1 an |
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ResourceMonitor.cs
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8436daeb68
Eliminate SE generation warning.
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il y a 1 an |
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RouteManager.cs
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a3f01b0830
1、重新引用最新版本的SecsGem动态库，用于实现FA相应的功能；
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il y a 1 an |
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SEManualTransfer.cs
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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il y a 1 an |
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SETMCycle.cs
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2ffdf6e535
1Venus DE LinerDoor update
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il y a 1 an |
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SystemDispatcher.cs
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c3ef1d5a6e
Wafer loadlock delay function.
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il y a 1 an |
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TMCycle.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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il y a 1 an |
lixiang
af631c4aaa
1.添加RF Calibration功能