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Configuration
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bb33e89998
1，优化UI界面
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il y a 2 ans |
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DataLog
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bb33e89998
1，优化UI界面
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il y a 2 ans |
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PM
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bb33e89998
1，优化UI界面
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il y a 2 ans |
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ButterflyValveViewModel.cs
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d35b997884
1.优化RevtechMatch状态机
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il y a 1 an |
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CleanRecipeViewModel.cs
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41d50f69e3
1.钟摆阀关闭，加入压力和位置自动设0功能
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il y a 1 an |
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DataHistoryViewModel.cs
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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il y a 1 an |
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EfemViewModel.cs
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ef3841f212
atm模式移除PM控压
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il y a 1 an |
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EventViewModel.cs
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f8026cadbc
控压结束动作bug修复
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il y a 1 an |
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FaViewModel.cs
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7dc2089ceb
1、add PortWaferStart/PortWaferEnd event sequence name parameter;
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il y a 1 an |
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GasLeakCheckViewModel.cs
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d35b997884
1.优化RevtechMatch状态机
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il y a 1 an |
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IOViewModel.cs
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b2406d6f78
1.添加signalTonwer ui界面
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il y a 1 an |
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LoginViewModel.cs
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f74076f457
1.修复LP3不能create job，ui界面显示错误的bug
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il y a 1 an |
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MFCVerificationViewModel.cs
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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il y a 1 an |
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OperationOverViewModel.cs
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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il y a 1 an |
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OverKepler2200AViewModel.cs
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d35b997884
1.优化RevtechMatch状态机
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il y a 1 an |
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OverKepler2200BViewModel.cs
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d35b997884
1.优化RevtechMatch状态机
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il y a 1 an |
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OverKepler2300ViewModel.cs
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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il y a 1 an |
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OverVenusDEViewModel.cs
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0b8a98a845
IoDevice IoMagnet Add
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il y a 1 an |
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OverVenusSEViewModel.cs
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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il y a 1 an |
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OverVenusViewModel.cs
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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il y a 1 an |
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PartialPressureViewModel.cs
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d35b997884
1.优化RevtechMatch状态机
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il y a 1 an |
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PlatformViewModel.cs
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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il y a 1 an |
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ProcessHistoryViewModel.cs
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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il y a 1 an |
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ProcessViewModel.cs
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ffda76b488
修改rt与ui交互功能
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il y a 2 ans |
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RFCalibrationViewModel.cs
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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il y a 1 an |
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RecipeSequenceSelectViewModel.cs
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5987f80b26
1.增加sequence控件以及sequence内容编辑保存
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il y a 1 an |
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RecipeViewModel.cs
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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il y a 1 an |
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RoleViewModel.cs
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6bbe2e529b
1.删除或注释 Venus ChamberType
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il y a 1 an |
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SETMOperationViewModel.cs
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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il y a 1 an |
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SeTMViewModel.cs
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d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
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il y a 1 an |
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SequenceViewModel.cs
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f53a5428e6
1.将rt向ui传递robot状态放在线程安全队列，避免数据包丢失
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il y a 1 an |
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SignalTowerConfigViewModel.cs
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b2406d6f78
1.添加signalTonwer ui界面
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il y a 1 an |
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StatisticsViewModel.cs
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ed38ed5c95
1.check load function bugs fix
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il y a 1 an |
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SystemConfigViewModel.cs
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44fc6989ef
1、Remove FabConnect dll file;
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il y a 1 an |
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TMOperationViewModel.cs
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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il y a 1 an |
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TMViewModel.cs
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1929a3510b
1.新版ui界面开发
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il y a 1 an |
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TopViewModel.cs
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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il y a 1 an |
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UserViewModel.cs
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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il y a 1 an |
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VATPerformanceViewModel.cs
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d35b997884
1.优化RevtechMatch状态机
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il y a 1 an |
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VceViewModel.cs
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8436daeb68
Eliminate SE generation warning.
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il y a 1 an |
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VenusSeOperationOverViewModel.cs
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ea68c5c25d
add clean for Venus SE.
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il y a 1 an |
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WaferDialogViewModel.cs
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8436daeb68
Eliminate SE generation warning.
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il y a 1 an |
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WaferHistoryDBViewModel.cs
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78c80a0896
fix bugs
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il y a 1 an |
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WaferOffsetViewModel.cs
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b2e38c8ff3
Add unuploaded files
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il y a 1 an |
