SchedulerPM.cs 16 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Diagnostics;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using Aitex.Core.Common;
  8. using Aitex.Core.RT.DataCenter;
  9. using Aitex.Core.RT.Device;
  10. using Aitex.Core.RT.Event;
  11. using Aitex.Core.RT.Fsm;
  12. using Aitex.Core.RT.Log;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.Util;
  15. using Aitex.Sorter.Common;
  16. using Aitex.Core.RT.RecipeCenter;
  17. using Venus_RT.Modules;
  18. using Venus_RT.Modules.PMs;
  19. using MECF.Framework.Common.Equipment;
  20. using MECF.Framework.Common.Schedulers;
  21. using MECF.Framework.Common.SubstrateTrackings;
  22. using Venus_RT.Devices;
  23. using Venus_Core;
  24. using MECF.Framework.Common.DataCenter;
  25. using System.IO;
  26. namespace Venus_RT.Scheduler
  27. {
  28. public class SchedulerPM : SchedulerModule
  29. {
  30. public override bool IsAvailable
  31. {
  32. get { return _entity.IsIdle && (_entity.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode) && CheckTaskDone(); }
  33. }
  34. public override bool IsOnline
  35. {
  36. get { return _entity != null && _entity.IsOnline; }
  37. }
  38. public override bool IsError
  39. {
  40. get { return _entity.IsError; }
  41. }
  42. public override bool IsIdle
  43. {
  44. get { return _entity.IsIdle; }
  45. }
  46. public override bool IsVac
  47. {
  48. get { return _entity.IsVac; }
  49. }
  50. public override bool IsAtm
  51. {
  52. get { return _entity.IsAtm; }
  53. }
  54. public TaskType Task => _task;
  55. private PMEntity _entity = null;
  56. private ModuleName _taskRobot;
  57. private EnumTransferType _taskTransferType;
  58. private Hand _taskBlade;
  59. private int _taskSlot;
  60. private int _entityTaskToken = (int)FSM_MSG.NONE;
  61. private DeviceTimer _timerProcess = new DeviceTimer();
  62. private JetPMBase _pm;
  63. private int _idleCleanOpt = 0;
  64. private int _idleCleanHourSetPoint;
  65. private int _idleCleanWaferSetPoint;
  66. private int _idleCleanWaferCount;
  67. private string _idleCleanRecipe;
  68. private DateTime _lastRunTime = new DateTime();
  69. private float _paramTemp;
  70. public float Temperature
  71. {
  72. get
  73. {
  74. //if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller"))
  75. //{
  76. // return _pm.CoolantOutletTempFB;
  77. //}
  78. //return _pm.SubstrateTempFB;
  79. return _pm.CoolantOutletTempFB;
  80. }
  81. }
  82. public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
  83. {
  84. _entity = Singleton<RouteManager>.Instance.GetPM(chamber);
  85. _pm = DEVICE.GetDevice<JetPMBase>(Module.ToString());
  86. EventWaferArrived += WaferArrived;
  87. LoadIdleCleanOpt();
  88. }
  89. public void InitClean()
  90. {
  91. //DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
  92. //DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
  93. }
  94. public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
  95. {
  96. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, blade)
  97. && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
  98. }
  99. public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
  100. {
  101. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, blade)
  102. && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
  103. }
  104. public bool IsTemperatureReady(float temp)
  105. {
  106. return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
  107. }
  108. public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  109. {
  110. return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
  111. _taskTransferType == type;
  112. }
  113. public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  114. {
  115. _task = TaskType.PrepareTransfer;
  116. _taskRobot = robot;
  117. _taskSlot = slot;
  118. _taskTransferType = type;
  119. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
  120. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  121. return _entityTaskToken != (int)FSM_MSG.NONE;
  122. }
  123. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade)
  124. {
  125. _task = TaskType.PrepareTransfer;
  126. _taskRobot = robot;
  127. _taskSlot = slot;
  128. _taskBlade = blade;
  129. _taskTransferType = type;
  130. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp);
  131. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  132. return _entityTaskToken != (int)FSM_MSG.NONE;
  133. }
  134. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
  135. {
  136. _task = TaskType.PrepareTransfer;
  137. _taskRobot = robot;
  138. _taskSlot = slot;
  139. _taskBlade = blade;
  140. _taskTransferType = type;
  141. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
  142. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, {size}");
  143. return _entityTaskToken != (int)FSM_MSG.NONE;
  144. }
  145. public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
  146. {
  147. StopWaitTransfer(robot);
  148. _task = TaskType.PostTransfer;
  149. _taskRobot = robot;
  150. _taskSlot = slot;
  151. _taskTransferType = type;
  152. _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
  153. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  154. return _entityTaskToken != (int)FSM_MSG.NONE;
  155. }
  156. public override bool PostTransfer(ModuleName robot)
  157. {
  158. StopWaitTransfer(robot);
  159. _task = TaskType.PostTransfer;
  160. _taskRobot = robot;
  161. _taskSlot = _inTransferSlot;
  162. _taskTransferType = _inTransferType;
  163. _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
  164. LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
  165. return _entityTaskToken != (int)FSM_MSG.NONE;
  166. }
  167. public override bool Process(string recipeName, bool isCleanRecipe, RecipeType recipeType, WaferInfo wafer)
  168. {
  169. bool withWafer;
  170. if (recipeType == RecipeType.Clean)
  171. {
  172. withWafer = false;
  173. }
  174. else
  175. {
  176. withWafer = true;
  177. }
  178. _task = TaskType.Process;
  179. LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
  180. if (RouteManager.IsATMMode)
  181. {
  182. int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
  183. _timerProcess.Start(time * 1000);
  184. LOG.Write(eEvent.EV_SCHEDULER, Module, $"System run in ATM mode, process skipped, delay {time} seconds");
  185. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
  186. return true;
  187. }
  188. else
  189. {
  190. if(isCleanRecipe)
  191. {
  192. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  193. }
  194. else
  195. {
  196. _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, RecipeType.Process);
  197. }
  198. return _entityTaskToken != (int)FSM_MSG.NONE;
  199. }
  200. }
  201. public override bool Preheating(float temperature)
  202. {
  203. _task = TaskType.Heating;
  204. _paramTemp = temperature;
  205. _entityTaskToken = _entity.InvokePreHeat(temperature);
  206. LogTaskStart(_task, $"preheat to {temperature}");
  207. return _entityTaskToken != (int)FSM_MSG.NONE;
  208. }
  209. public bool CheckTaskDone()
  210. {
  211. bool ret = false;
  212. switch (_task)
  213. {
  214. case TaskType.None:
  215. ret = true;
  216. break;
  217. case TaskType.PrepareTransfer:
  218. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType == EnumTransferType.Swap ? EnumTransferType.Pick : _taskTransferType, _taskSlot, _taskBlade);
  219. break;
  220. case TaskType.PostTransfer:
  221. ret = _entity.CheckAcked(_entityTaskToken);
  222. break;
  223. case TaskType.Heating:
  224. ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
  225. break;
  226. case TaskType.Process:
  227. case TaskType.IdlePurgeProcess:
  228. case TaskType.IdleCleanProcess:
  229. case TaskType.PreJobProcess:
  230. case TaskType.CompleteJobProcess:
  231. if (RouteManager.IsATMMode)
  232. {
  233. ret = _timerProcess.IsTimeout() && _entity.IsIdle;
  234. if (ret)
  235. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
  236. }
  237. else
  238. {
  239. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsIdle;
  240. }
  241. break;
  242. }
  243. if (ret && _task != TaskType.None)
  244. {
  245. LogTaskDone(_task, "");
  246. _task = TaskType.None;
  247. }
  248. return ret;
  249. }
  250. public bool Monitor()
  251. {
  252. return true;
  253. }
  254. public void SetPMAuto()
  255. {
  256. _entity.SetAuto();
  257. }
  258. public bool IdlePurgeProcess(string recipeName)
  259. {
  260. _task = TaskType.IdlePurgeProcess;
  261. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  262. LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
  263. return _entityTaskToken != (int)FSM_MSG.NONE;
  264. }
  265. public bool IdleCleanProcess(string recipeName)
  266. {
  267. _task = TaskType.IdleCleanProcess;
  268. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  269. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  270. return _entityTaskToken != (int)FSM_MSG.NONE;
  271. }
  272. public void PreJobClean()
  273. {
  274. }
  275. public bool PreJobProcess(string recipeName)
  276. {
  277. _task = TaskType.PreJobProcess;
  278. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  279. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  280. return _entityTaskToken != (int)FSM_MSG.NONE;
  281. }
  282. public bool CompleteJobProcess(string recipeName)
  283. {
  284. _task = TaskType.CompleteJobProcess;
  285. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  286. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  287. return _entityTaskToken != (int)FSM_MSG.NONE;
  288. }
  289. private void WaferArrived(object sender, EventArgs e)
  290. {
  291. if(WaferManager.Instance.CheckHasWafer(Module, 0))
  292. {
  293. WaferInfo wafer = WaferManager.Instance.GetWafer(Module, 0);
  294. string recipeName = wafer.ProcessJob.Sequence.GetRecipe(Module);
  295. if (recipeName.Length > 0)
  296. {
  297. Process(recipeName, false, RecipeType.Process, wafer);
  298. }
  299. else
  300. {
  301. LOG.Write(eEvent.WARN_SCHEDULER, Module, "Cannot run process as get recipe failed.");
  302. }
  303. }
  304. else
  305. {
  306. LOG.Write(eEvent.WARN_SCHEDULER, Module, "Cannot run process as PM is empty");
  307. }
  308. }
  309. #region clean task
  310. private void LoadIdleCleanOpt()
  311. {
  312. // Load Idle Clean Config
  313. _idleCleanOpt = SC.GetValue<int>($"{Module}.IdleClean.Option");
  314. _idleCleanHourSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
  315. _idleCleanWaferSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanWaferCount");
  316. _idleCleanWaferCount = SC.GetValue<int>($"{Module}.IdleClean.WaferCountSinceLastClean");
  317. _idleCleanRecipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
  318. string lastRun = SC.GetStringValue($"{Module}.IdleClean.LastRunTime");
  319. if (lastRun.Length > 10)
  320. {
  321. try
  322. {
  323. _lastRunTime = DateTime.Parse(lastRun);
  324. }
  325. catch (Exception _)
  326. {
  327. lastRun = string.Empty;
  328. }
  329. }
  330. if (lastRun.Length <= 10)
  331. {
  332. _lastRunTime = DateTime.Now;
  333. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  334. }
  335. // validate the idle clean recipe name
  336. string path = Path.Combine("Recipes", Module.ToString(), "Clean", $"{_idleCleanRecipe}.rcp");
  337. string recipeContent = RecipeFileManager.Instance.LoadRecipeByPath(path);
  338. Recipe recipe = Recipe.Load(recipeContent);
  339. if (recipe == null)
  340. {
  341. _idleCleanRecipe = string.Empty;
  342. }
  343. }
  344. public void WaferProcessDone()
  345. {
  346. _lastRunTime = DateTime.Now;
  347. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  348. _idleCleanWaferCount++;
  349. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  350. }
  351. private void ResetIdleCleanCounter()
  352. {
  353. _lastRunTime = DateTime.Now;
  354. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  355. _idleCleanWaferCount = 0;
  356. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  357. }
  358. public bool RunIdleCleanTask()
  359. {
  360. if(_idleCleanOpt == 1)
  361. {
  362. TimeSpan span = DateTime.Now - _lastRunTime;
  363. if(span.TotalHours >= _idleCleanHourSetPoint)
  364. {
  365. Process(_idleCleanRecipe, true, RecipeType.Clean, null);
  366. ResetIdleCleanCounter();
  367. return true;
  368. }
  369. }
  370. else if(_idleCleanOpt == 2)
  371. {
  372. if(_idleCleanWaferCount >= _idleCleanWaferSetPoint)
  373. {
  374. Process(_idleCleanRecipe, true, RecipeType.Clean, null);
  375. ResetIdleCleanCounter();
  376. return true;
  377. }
  378. }
  379. return false;
  380. }
  381. public bool RunJobCleanTask(string jobCleanRecipe)
  382. {
  383. // validate the job clean recipe name
  384. //string recipeContent = RecipeFileManager.Instance.LoadRecipe(Module.ToString(), jobCleanRecipe, false);
  385. string path = Path.Combine( "Recipes", Module.ToString(),"Clean" , $"{jobCleanRecipe}.rcp");
  386. string recipeContent = RecipeFileManager.Instance.LoadRecipeByPath(path);
  387. if (recipeContent.Length == 0)
  388. {
  389. return false;
  390. }
  391. Recipe recipe = Recipe.Load(recipeContent);
  392. if (recipe == null)
  393. {
  394. return false;
  395. }
  396. return Process(jobCleanRecipe, true, RecipeType.Clean, null);
  397. }
  398. #endregion
  399. }
  400. }