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EFEM
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ec2f97e62d
enhance log.
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il y a 1 an |
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LLs
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c3bef13a6e
Enhance Auto pump/vent algorithm.
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il y a 1 an |
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LPs
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03063bae6a
Enhance the routine framework.
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il y a 1 an |
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PMs
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a5ba0d3c6b
add Process in PMChamber for SEOpertaion
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il y a 1 an |
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Schedulers
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ec2f97e62d
enhance log.
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il y a 1 an |
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TM
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26a6aa8f41
fix bug in SE Swap && SE Cycle
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il y a 1 an |
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VCE
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f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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il y a 1 an |
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AutoCycle.cs
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ec2f97e62d
enhance log.
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il y a 1 an |
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Autotransfer_LP_FA.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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il y a 1 an |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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il y a 2 ans |
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ManualTransfer.cs
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501997ac38
TM/EFEM robot single arm option.
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il y a 1 an |
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ResourceMonitor.cs
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0ed42d17d1
fix bugs for WaferOffset
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il y a 1 an |
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RouteManager.cs
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26a6aa8f41
fix bug in SE Swap && SE Cycle
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il y a 1 an |
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SEManualTransfer.cs
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f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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il y a 1 an |
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SETMCycle.cs
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26a6aa8f41
fix bug in SE Swap && SE Cycle
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il y a 1 an |
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TMCycle.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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il y a 1 an |
sangwq
ec2f97e62d
enhance log.