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EventDefine.cs
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a5245356d0
source files
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3 éve%!(EXTRA string=óta) |
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GasBoxLeakCheckRoutine.cs
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c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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1 éve%!(EXTRA string=óta) |
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GasFlowRoutine.cs
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03063bae6a
Enhance the routine framework.
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2 éve%!(EXTRA string=óta) |
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LLPickRoutine.cs
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03063bae6a
Enhance the routine framework.
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2 éve%!(EXTRA string=óta) |
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LLPlaceRoutine.cs
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03063bae6a
Enhance the routine framework.
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2 éve%!(EXTRA string=óta) |
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LoadLockLeakCheckRoutine.cs
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03063bae6a
Enhance the routine framework.
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2 éve%!(EXTRA string=óta) |
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LoadLockPumpRoutine.cs
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03063bae6a
Enhance the routine framework.
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2 éve%!(EXTRA string=óta) |
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LoadLockPurgeRoutine.cs
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03063bae6a
Enhance the routine framework.
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2 éve%!(EXTRA string=óta) |
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LoadLockVentRoutine.cs
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03063bae6a
Enhance the routine framework.
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2 éve%!(EXTRA string=óta) |
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PMControlPressureRoutine.cs
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e511d1f387
1.添加PM控压功能
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1 éve%!(EXTRA string=óta) |
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PMEntity.cs
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a5ba0d3c6b
add Process in PMChamber for SEOpertaion
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1 éve%!(EXTRA string=óta) |
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PMGasVerificationRoutine.cs
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c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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1 éve%!(EXTRA string=óta) |
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PMGaslinePurgeRoutine.cs
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03063bae6a
Enhance the routine framework.
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2 éve%!(EXTRA string=óta) |
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PMHomeRoutine.cs
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ab095ba2a8
修复钟摆阀状态错误bug
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1 éve%!(EXTRA string=óta) |
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PMLeakCheckRoutine.cs
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c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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1 éve%!(EXTRA string=óta) |
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PMPartialPressureRoutine.cs
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03063bae6a
Enhance the routine framework.
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2 éve%!(EXTRA string=óta) |
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PMProcessRoutine.cs
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 éve%!(EXTRA string=óta) |
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PMProcess_FA.cs
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987f0abae5
1.Slove TuroN2Flow don't show problem
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2 éve%!(EXTRA string=óta) |
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PMPurgeRoutine.cs
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03063bae6a
Enhance the routine framework.
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2 éve%!(EXTRA string=óta) |
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PMRoutineBase.cs
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c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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1 éve%!(EXTRA string=óta) |
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PMVATPerformanceRoutine.cs
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03063bae6a
Enhance the routine framework.
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2 éve%!(EXTRA string=óta) |
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Process.cs
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3cad102221
更新 RT
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3 éve%!(EXTRA string=óta) |
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ProcessDefine.cs
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e511d1f387
1.添加PM控压功能
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1 éve%!(EXTRA string=óta) |
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PumpDownRoutine.cs
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03063bae6a
Enhance the routine framework.
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2 éve%!(EXTRA string=óta) |
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RFPowerSwitchRoutine.cs
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03063bae6a
Enhance the routine framework.
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2 éve%!(EXTRA string=óta) |
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StartDryPumpRoutine.cs
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03063bae6a
Enhance the routine framework.
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2 éve%!(EXTRA string=óta) |
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StartTurboPumpRoutine.cs
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03063bae6a
Enhance the routine framework.
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2 éve%!(EXTRA string=óta) |
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VentRoutine.cs
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a5ba0d3c6b
add Process in PMChamber for SEOpertaion
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1 éve%!(EXTRA string=óta) |
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VenusRecipeFileContext.cs
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7d93bf0076
Job Clean function, not finished.
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2 éve%!(EXTRA string=óta) |
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VenusSequenceFileContext.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 éve%!(EXTRA string=óta) |
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VirgoRecipeFileContext.cs
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896c7407de
优化log功能
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3 éve%!(EXTRA string=óta) |
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VirgoSequenceFileContext.cs
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896c7407de
优化log功能
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3 éve%!(EXTRA string=óta) |
zhouhr
a5ba0d3c6b
add Process in PMChamber for SEOpertaion