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EFEM
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b71003a42d
Fix the increasing aligner angle out of range bug.
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1 year ago |
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LLs
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c3bef13a6e
Enhance Auto pump/vent algorithm.
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1 year ago |
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LPs
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8bb5f3f4f9
fixed loadport event notify;
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1 year ago |
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PMs
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15742217b9
添加工艺结束流气与关GasFinal阀中间添加1s延时
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1 year ago |
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SMIF
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 year ago |
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Schedulers
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b71003a42d
Fix the increasing aligner angle out of range bug.
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1 year ago |
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TM
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e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
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1 year ago |
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VCE
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e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
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1 year ago |
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AutoCycle.cs
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c5ba2fb197
Transfer align angel from sequence to system configure and enable angle increasement by wafer.
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1 year ago |
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Autotransfer_LP_FA.cs
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8bb5f3f4f9
fixed loadport event notify;
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1 year ago |
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DVIDName.cs
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44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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2 years ago |
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ManualTransfer.cs
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501997ac38
TM/EFEM robot single arm option.
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1 year ago |
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ResourceMonitor.cs
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0ed42d17d1
fix bugs for WaferOffset
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1 year ago |
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RouteManager.cs
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12eb71a75f
Redesign the Clean recipe algorithm and fix the throughput calculation bug.
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1 year ago |
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SEManualTransfer.cs
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 year ago |
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SETMCycle.cs
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 year ago |
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TMCycle.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
sangwq
b71003a42d
Fix the increasing aligner angle out of range bug.