| .. |
|
VenusEntity
|
0f361d7301
1.Fix SETM robot ArmExtend bugs
|
11 miesięcy temu |
|
MFHomeRoutine.cs
|
ed38ed5c95
1.check load function bugs fix
|
1 rok temu |
|
MFLeakCheckRoutine.cs
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 rok temu |
|
MFPMExtendRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
1 rok temu |
|
MFPMPickRoutine.cs
|
d938a9e54c
PM/TM swap pick 开门前加压力wait
|
11 miesięcy temu |
|
MFPMPlaceRoutine.cs
|
8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
|
1 rok temu |
|
MFPMRetractRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
1 rok temu |
|
MFPMSwapRoutine.cs
|
d938a9e54c
PM/TM swap pick 开门前加压力wait
|
11 miesięcy temu |
|
MFPickRoutine.cs
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
11 miesięcy temu |
|
MFPlaceRoutine.cs
|
8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
|
1 rok temu |
|
MFPumpRoutine.cs
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
11 miesięcy temu |
|
MFPurgeRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
1 rok temu |
|
MFSwapRoutine.cs
|
8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
|
1 rok temu |
|
MFVentRoutine.cs
|
d33079596b
1.优化新版跑片动画
|
11 miesięcy temu |
|
TMEntity.cs
|
d33079596b
1.优化新版跑片动画
|
11 miesięcy temu |
lixiang
d938a9e54c
PM/TM swap pick 开门前加压力wait