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VenusEntity
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0f361d7301
1.Fix SETM robot ArmExtend bugs
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il y a 11 mois |
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MFHomeRoutine.cs
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ed38ed5c95
1.check load function bugs fix
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il y a 1 an |
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MFLeakCheckRoutine.cs
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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il y a 1 an |
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MFPMExtendRoutine.cs
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03063bae6a
Enhance the routine framework.
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il y a 1 an |
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MFPMPickRoutine.cs
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d938a9e54c
PM/TM swap pick 开门前加压力wait
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il y a 11 mois |
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MFPMPlaceRoutine.cs
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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il y a 1 an |
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MFPMRetractRoutine.cs
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03063bae6a
Enhance the routine framework.
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il y a 1 an |
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MFPMSwapRoutine.cs
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d938a9e54c
PM/TM swap pick 开门前加压力wait
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il y a 11 mois |
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MFPickRoutine.cs
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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il y a 11 mois |
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MFPlaceRoutine.cs
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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il y a 1 an |
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MFPumpRoutine.cs
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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il y a 11 mois |
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MFPurgeRoutine.cs
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03063bae6a
Enhance the routine framework.
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il y a 1 an |
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MFSwapRoutine.cs
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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il y a 1 an |
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MFVentRoutine.cs
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d33079596b
1.优化新版跑片动画
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il y a 11 mois |
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TMEntity.cs
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d33079596b
1.优化新版跑片动画
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il y a 11 mois |
lixiang
d938a9e54c
PM/TM swap pick 开门前加压力wait