| .. |
|
Account
|
53e362a33e
update
|
2 years ago |
|
Kepler2300
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
2 years ago |
|
Venus
|
a5813eb09d
1.修改chamber wafer样式
|
2 years ago |
|
ClusterGemModel.xml
|
53e362a33e
update
|
2 years ago |
|
DBModel.sql
|
dbf06a2134
添加TM Operation界面
|
2 years ago |
|
DeviceModel.xsd
|
d8e5f1dc2c
2022 last update
|
2 years ago |
|
DeviceModelVenus_MF.xml
|
8f80478982
1.添加IoSwitch
|
2 years ago |
|
EventDefine.xml
|
3f9c41937a
update for event module enhancement
|
2 years ago |
|
Interlock.xml
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
2 years ago |
|
IoProviderConfig.xml
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
2 years ago |
|
LogDefine.json
|
045eae5c75
1.sequence和recipe修改日志输出格式
|
2 years ago |
|
RecipeFormat.xml
|
9760d40cf7
port simulator
|
2 years ago |
|
SequenceFormat.xml
|
5987f80b26
1.增加sequence控件以及sequence内容编辑保存
|
2 years ago |
|
SignalTower.xml
|
3a078d515d
1.修复ui灯闪烁错误bug
|
2 years ago |
|
System.sccfg
|
a5813eb09d
1.修改chamber wafer样式
|
2 years ago |
|
VenusPreProcess.py
|
64c7ef574e
log
|
2 years ago |
|
_ioDefineVenus_MF.xml
|
8f80478982
1.添加IoSwitch
|
2 years ago |
lixiang
dbf06a2134
添加TM Operation界面