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EFEM
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8bb5f3f4f9
fixed loadport event notify;
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1 anno fa |
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EPD
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4ffafb6001
EFEM界面优化
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2 anni fa |
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EPDs
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4ffafb6001
EFEM界面优化
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2 anni fa |
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IODevices
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34bdc228de
Datalog添加高温Heater温度显示
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1 anno fa |
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PreAligner
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31bbc4482b
update ui && rt && simu for Venus SE
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2 anni fa |
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SMIF
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c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
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1 anno fa |
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TM
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d308f9a645
Improved TM Transfer and Robot Arm, updated and uploaded SeTMViewModel.cs、VenusSeOperationOverView.cs、HongHuVR.cs、SETMEntity.cs、Generic、SERobot.cs、SEMFPMRetractRoutine.cs、SEMFPMExtendRoutine.cs.
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1 anno fa |
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VCE
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 anno fa |
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AIRSYSChiller.cs
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 anno fa |
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AdTecRF.cs
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34bdc228de
Datalog添加高温Heater温度显示
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1 anno fa |
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AdixenTurboPump.cs
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171eef8acc
Add to chart@@to slot switch page function
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2 anni fa |
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CometRF.cs
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c0ff9f251e
1.添加kepler2200B
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1 anno fa |
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DataDefine.cs
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 anno fa |
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DeviceManager.cs
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d18b2c8e6a
Add VenusDE PM UI, Viewmodel, Simulator
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1 anno fa |
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ESC5HighVoltage.cs
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f3bd6b016b
添加部分efem功能
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2 anni fa |
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EdwardsPump.cs
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be22c5112d
TM 添加两个pump 串口23/24/25/26
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2 anni fa |
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FinsPlc.cs
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c457973fa2
1.添加Revtech Match
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2 anni fa |
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JetEPDBase.cs
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4ffafb6001
EFEM界面优化
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2 anni fa |
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JetEfem.cs
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5fc13b3f0c
New Efem design
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2 anni fa |
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JetKepler2200APM.cs
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15742217b9
添加工艺结束流气与关GasFinal阀中间添加1s延时
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1 anno fa |
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JetKepler2200BPM.cs
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15742217b9
添加工艺结束流气与关GasFinal阀中间添加1s延时
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1 anno fa |
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JetKepler2300PM.cs
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15742217b9
添加工艺结束流气与关GasFinal阀中间添加1s延时
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1 anno fa |
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JetPMBase.cs
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f8026cadbc
控压结束动作bug修复
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1 anno fa |
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JetVenusPM.cs
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15742217b9
添加工艺结束流气与关GasFinal阀中间添加1s延时
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1 anno fa |
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JetVenusSEPM.cs
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 anno fa |
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JetVenusSEPMBase.cs
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56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
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2 anni fa |
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PendulumValve.cs
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6910d4754e
代码合并
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1 anno fa |
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PlasmaController.cs
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75710d35d8
RF Match.
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2 anni fa |
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RevtechMatch.cs
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08e85396fc
1.添加eventview分页功能
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1 anno fa |
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SMCChiller.cs
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c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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2 anni fa |
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SkyPump.cs
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44fc6989ef
1、Remove FabConnect dll file;
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1 anno fa |
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TruPlasmaRF.cs
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4338503e2a
1.添加霍庭格RF Device
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1 anno fa |
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VirgoSignalTower.cs
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bdec2c0d74
1.修改TM robot模拟器
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2 anni fa |
lixiang
34bdc228de
Datalog添加高温Heater温度显示