zhouhr d425906355 add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design. 1 year ago
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AdLinkEthercat ee26035034 1.添加Ethercat 励兆 Match DeviceData 1 year ago
EFEM 0bea20360b add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM 1 year ago
EPD c3ef1d5a6e Wafer loadlock delay function. 1 year ago
EPDs 4ffafb6001 EFEM界面优化 2 years ago
IODevices 464c53cd94 1.Datalog添加高温Haeter开关显示 1 year ago
PreAligner 2edb43d393 fix the crash issue. 1 year ago
SMIF 8436daeb68 Eliminate SE generation warning. 1 year ago
TM d425906355 add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design. 1 year ago
VCE d425906355 add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design. 1 year ago
AIRSYSChiller.cs 6bbe2e529b 1.删除或注释 Venus ChamberType 1 year ago
AdTecRF.cs 996eacc709 VenusDE recipe tolerance enhance 1 year ago
AdixenTurboPump.cs 01dafac8f1 1.Kepler2200 添加Home 设备断开重连功能 1 year ago
CometRF.cs 9a410e084a fix exception: 1 year ago
DataDefine.cs 12fa756895 1. SETM will be Init while While SETM Abort Homing 1 year ago
DeviceManager.cs 9b93f58d68 Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM 1 year ago
ESC5HighVoltage.cs 552d60ca99 1.Stable与Tolerance 功能优化 1 year ago
EdwardsPump.cs 75dbbd4da8 添加KeplerSignaltower功能 1 year ago
FinsPlc.cs c457973fa2 1.添加Revtech Match 1 year ago
JetEPDBase.cs 4ffafb6001 EFEM界面优化 2 years ago
JetEfem.cs 5fc13b3f0c New Efem design 2 years ago
JetKepler2200APM.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug 1 year ago
JetKepler2200BPM.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug 1 year ago
JetKepler2300PM.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug 1 year ago
JetPMBase.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug 1 year ago
JetVenusDEPM.cs d425906355 add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design. 1 year ago
JetVenusSEPM.cs d425906355 add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design. 1 year ago
JetVenusSEPMBase.cs 56f7c900fe add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0 1 year ago
KeplerSignalTower.cs 7a1faeac74 Redesign the EFEM module for thread safe issue. 1 year ago
LzMatch_Ethercat.cs 6d6f659b77 1.Kepler2200 TM/PM控大压力10Pa,添加工艺结束,等待压力稳定(TM/PM压差满足要求)TM再Pick功能 1 year ago
PendulumValve.cs 608cf43d67 1.做工艺前pump down 根据底压确定是否执行 1 year ago
PlasmaController.cs 75710d35d8 RF Match. 2 years ago
RevtechMatch.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug 1 year ago
SMCChiller.cs 41c5b8a615 Remove the toleranceChecker in SMCChiler && SMCShareChiller 1 year ago
SMCChillerDrive.cs a0f20d03ac add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown 1 year ago
SMCShareChiller.cs a0f20d03ac add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown 1 year ago
SkyPump.cs 4109b056f2 Fix exception caused by skypump recivemessage length && socket don't connect 1 year ago
TruPlasmaRF.cs 0f361d7301 1.Fix SETM robot ArmExtend bugs 1 year ago
TruPlasmaRF_Ethercat.cs 7ff42d4eca 1.添加 Process 切换step Match/BiasMatch设置值 offset功能,c1/c2小于offset不设置 1 year ago