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VenusSE
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afc3b9494f
VenusSE TM pressurecontrol update
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2 years ago |
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DeviceModelVenusSE_MF.xml
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31bbc4482b
update ui && rt && simu for Venus SE
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2 years ago |
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DeviceModelVenus_MF.xml
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76a22f462f
1.根据tps提供sequence 添加控压功能
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2 years ago |
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SETMInterlock.xml
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58b65c3ff0
VenusSE Simulator PM Update
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2 years ago |
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TMInterlock.xml
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dfc9174ac8
VenusSE TM PM Simulator Update
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2 years ago |
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_ioDefineVenusSETest_MF.xml
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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_ioDefineVenusSE_MF.xml
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 year ago |
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_ioDefineVenus_MF.xml
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b6acfe2e29
优化TM leak check功能
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2 years ago |
zhouhr
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View