| .. |
|
EventDefine.cs
|
a5245356d0
source files
|
3 years ago |
|
Fdc.cs
|
d35b997884
1.优化RevtechMatch状态机
|
1 year ago |
|
GasBoxLeakCheckRoutine.cs
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 year ago |
|
GasFlowRoutine.cs
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 year ago |
|
LLPickRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
LLPlaceRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
LoadLockLeakCheckRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
LoadLockPumpRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
LoadLockPurgeRoutine.cs
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
1 year ago |
|
LoadLockVentRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
PMControlPressureRoutine.cs
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
|
PMEntity.cs
|
d35b997884
1.优化RevtechMatch状态机
|
1 year ago |
|
PMGasVerificationRoutine.cs
|
d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
|
1 year ago |
|
PMGaslinePurgeRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
PMHeatRoutine.cs
|
c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
|
1 year ago |
|
PMHomeRoutine.cs
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 year ago |
|
PMLeakCheckRoutine.cs
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
1 year ago |
|
PMPartialPressureRoutine.cs
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 year ago |
|
PMProcessRoutine.cs
|
d35b997884
1.优化RevtechMatch状态机
|
1 year ago |
|
PMProcess_FA.cs
|
774c804aa9
fixed pm event occurs carrierid is null
|
1 year ago |
|
PMPurgeRoutine.cs
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
1 year ago |
|
PMRoutineBase.cs
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 year ago |
|
PMVATPerformanceRoutine.cs
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 year ago |
|
Process.cs
|
3cad102221
更新 RT
|
3 years ago |
|
ProcessDefine.cs
|
87f1121180
1.Recipe UI 界面Name优化
|
1 year ago |
|
PumpDownRoutine.cs
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
1 year ago |
|
RFPowerSwitchRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
StartDryPumpRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
StartTurboPumpRoutine.cs
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
1 year ago |
|
VentRoutine.cs
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 year ago |
|
VenusRecipeFileContext.cs
|
7d93bf0076
Job Clean function, not finished.
|
2 years ago |
|
VenusSequenceFileContext.cs
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 year ago |
|
VirgoRecipeFileContext.cs
|
896c7407de
优化log功能
|
3 years ago |
|
VirgoSequenceFileContext.cs
|
896c7407de
优化log功能
|
3 years ago |
