SchedulerPM.cs 15 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Diagnostics;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using Aitex.Core.Common;
  8. using Aitex.Core.RT.DataCenter;
  9. using Aitex.Core.RT.Device;
  10. using Aitex.Core.RT.Event;
  11. using Aitex.Core.RT.Fsm;
  12. using Aitex.Core.RT.Log;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.Util;
  15. using Aitex.Sorter.Common;
  16. using Aitex.Core.RT.RecipeCenter;
  17. using Venus_RT.Modules;
  18. using Venus_RT.Modules.PMs;
  19. using MECF.Framework.Common.Equipment;
  20. using MECF.Framework.Common.Schedulers;
  21. using MECF.Framework.Common.SubstrateTrackings;
  22. using Venus_RT.Devices;
  23. using Venus_Core;
  24. namespace Venus_RT.Scheduler
  25. {
  26. public class SchedulerPM : SchedulerModule
  27. {
  28. public override bool IsAvailable
  29. {
  30. get { return _entity.IsIdle && (_entity.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode) && CheckTaskDone(); }
  31. }
  32. public override bool IsOnline
  33. {
  34. get { return _entity != null && _entity.IsOnline; }
  35. }
  36. public override bool IsError
  37. {
  38. get { return _entity.IsError; }
  39. }
  40. public bool IsIdle
  41. {
  42. get { return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() ; }
  43. }
  44. public TaskType Task => _task;
  45. private PMEntity _entity = null;
  46. private ModuleName _taskRobot;
  47. private EnumTransferType _taskTransferType;
  48. private Hand _taskBlade;
  49. private int _taskSlot;
  50. private int _entityTaskToken = (int)FSM_MSG.NONE;
  51. private DeviceTimer _timerProcess = new DeviceTimer();
  52. private JetPMBase _pm;
  53. private int _idleCleanOpt = 0;
  54. private int _idleCleanHourSetPoint;
  55. private int _idleCleanWaferSetPoint;
  56. private int _idleCleanWaferCount;
  57. private string _idleCleanRecipe;
  58. private DateTime _lastRunTime = new DateTime();
  59. private float _paramTemp;
  60. public float Temperature
  61. {
  62. get
  63. {
  64. //if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller"))
  65. //{
  66. // return _pm.CoolantOutletTempFB;
  67. //}
  68. //return _pm.SubstrateTempFB;
  69. return _pm.CoolantOutletTempFB;
  70. }
  71. }
  72. public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
  73. {
  74. _entity = Singleton<RouteManager>.Instance.GetPM(chamber);
  75. _pm = DEVICE.GetDevice<JetPMBase>(Module.ToString());
  76. EventWaferArrived += WaferArrived;
  77. LoadIdleCleanOpt();
  78. }
  79. public void InitClean()
  80. {
  81. //DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
  82. //DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
  83. }
  84. public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
  85. {
  86. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, blade)
  87. && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
  88. }
  89. public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
  90. {
  91. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, blade)
  92. && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
  93. }
  94. public bool IsTemperatureReady(float temp)
  95. {
  96. return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
  97. }
  98. public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  99. {
  100. return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
  101. _taskTransferType == type;
  102. }
  103. public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  104. {
  105. _task = TaskType.PrepareTransfer;
  106. _taskRobot = robot;
  107. _taskSlot = slot;
  108. _taskTransferType = type;
  109. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
  110. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  111. return _entityTaskToken != (int)FSM_MSG.NONE;
  112. }
  113. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade)
  114. {
  115. _task = TaskType.PrepareTransfer;
  116. _taskRobot = robot;
  117. _taskSlot = slot;
  118. _taskBlade = blade;
  119. _taskTransferType = type;
  120. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp);
  121. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  122. return _entityTaskToken != (int)FSM_MSG.NONE;
  123. }
  124. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
  125. {
  126. _task = TaskType.PrepareTransfer;
  127. _taskRobot = robot;
  128. _taskSlot = slot;
  129. _taskBlade = blade;
  130. _taskTransferType = type;
  131. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
  132. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, {size}");
  133. return _entityTaskToken != (int)FSM_MSG.NONE;
  134. }
  135. public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
  136. {
  137. StopWaitTransfer(robot);
  138. _task = TaskType.PostTransfer;
  139. _taskRobot = robot;
  140. _taskSlot = slot;
  141. _taskTransferType = type;
  142. _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
  143. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  144. return _entityTaskToken != (int)FSM_MSG.NONE;
  145. }
  146. public override bool PostTransfer(ModuleName robot)
  147. {
  148. StopWaitTransfer(robot);
  149. _task = TaskType.PostTransfer;
  150. _taskRobot = robot;
  151. _taskSlot = _inTransferSlot;
  152. _taskTransferType = _inTransferType;
  153. _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
  154. LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
  155. return _entityTaskToken != (int)FSM_MSG.NONE;
  156. }
  157. public override bool Process(string recipeName, bool isCleanRecipe, bool withWafer, WaferInfo wafer)
  158. {
  159. _task = TaskType.Process;
  160. LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
  161. if (RouteManager.IsATMMode)
  162. {
  163. int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
  164. _timerProcess.Start(time * 1000);
  165. EV.PostInfoLog("Scheduler", $"System run in ATM mode, process skipped, delay {time} seconds");
  166. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
  167. return true;
  168. }
  169. else
  170. {
  171. if(isCleanRecipe)
  172. {
  173. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  174. }
  175. else
  176. {
  177. _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, true);
  178. }
  179. return _entityTaskToken != (int)FSM_MSG.NONE;
  180. }
  181. }
  182. public override bool Preheating(float temperature)
  183. {
  184. _task = TaskType.Heating;
  185. _paramTemp = temperature;
  186. _entityTaskToken = _entity.InvokePreHeat(temperature);
  187. LogTaskStart(_task, $"preheat to {temperature}");
  188. return _entityTaskToken != (int)FSM_MSG.NONE;
  189. }
  190. public bool CheckTaskDone()
  191. {
  192. bool ret = false;
  193. switch (_task)
  194. {
  195. case TaskType.None:
  196. ret = true;
  197. break;
  198. case TaskType.PrepareTransfer:
  199. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType == EnumTransferType.Swap ? EnumTransferType.Pick : _taskTransferType, _taskSlot, _taskBlade);
  200. break;
  201. case TaskType.PostTransfer:
  202. ret = _entity.CheckAcked(_entityTaskToken);
  203. break;
  204. case TaskType.Heating:
  205. ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
  206. break;
  207. case TaskType.Process:
  208. case TaskType.IdlePurgeProcess:
  209. case TaskType.IdleCleanProcess:
  210. case TaskType.PreJobProcess:
  211. case TaskType.CompleteJobProcess:
  212. if (RouteManager.IsATMMode)
  213. {
  214. ret = _timerProcess.IsTimeout() && _entity.IsIdle;
  215. if (ret)
  216. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
  217. }
  218. else
  219. {
  220. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsIdle;
  221. }
  222. break;
  223. }
  224. if (ret && _task != TaskType.None)
  225. {
  226. LogTaskDone(_task, "");
  227. _task = TaskType.None;
  228. }
  229. return ret;
  230. }
  231. public bool Monitor()
  232. {
  233. return true;
  234. }
  235. public void SetPMAuto()
  236. {
  237. _entity.SetAuto();
  238. }
  239. public bool IdlePurgeProcess(string recipeName)
  240. {
  241. _task = TaskType.IdlePurgeProcess;
  242. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  243. LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
  244. return _entityTaskToken != (int)FSM_MSG.NONE;
  245. }
  246. public bool IdleCleanProcess(string recipeName)
  247. {
  248. _task = TaskType.IdleCleanProcess;
  249. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  250. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  251. return _entityTaskToken != (int)FSM_MSG.NONE;
  252. }
  253. public void PreJobClean()
  254. {
  255. }
  256. public bool PreJobProcess(string recipeName)
  257. {
  258. _task = TaskType.PreJobProcess;
  259. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  260. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  261. return _entityTaskToken != (int)FSM_MSG.NONE;
  262. }
  263. public bool CompleteJobProcess(string recipeName)
  264. {
  265. _task = TaskType.CompleteJobProcess;
  266. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  267. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  268. return _entityTaskToken != (int)FSM_MSG.NONE;
  269. }
  270. private void WaferArrived(object sender, EventArgs e)
  271. {
  272. WaferInfo wafer = WaferManager.Instance.GetWafer(Module, 0);
  273. string recipeName = wafer.ProcessJob.Sequence.GetRecipe(Module);
  274. if(recipeName.Length > 0)
  275. {
  276. Process(recipeName, false, true, wafer);
  277. }
  278. }
  279. #region clean task
  280. private void LoadIdleCleanOpt()
  281. {
  282. // Load Idle Clean Config
  283. _idleCleanOpt = SC.GetValue<int>($"{Module}.IdleClean.Option");
  284. _idleCleanHourSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
  285. _idleCleanWaferSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanWaferCount");
  286. _idleCleanWaferCount = SC.GetValue<int>($"{Module}.IdleClean.WaferCountSinceLastClean");
  287. _idleCleanRecipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
  288. string lastRun = SC.GetStringValue($"{Module}.IdleClean.LastRunTime");
  289. if (lastRun.Length > 10)
  290. {
  291. try
  292. {
  293. _lastRunTime = DateTime.Parse(lastRun);
  294. }
  295. catch (Exception _)
  296. {
  297. lastRun = string.Empty;
  298. }
  299. }
  300. if (lastRun.Length <= 10)
  301. {
  302. _lastRunTime = DateTime.Now;
  303. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  304. }
  305. // validate the idle clean recipe name
  306. string recipeContent = RecipeFileManager.Instance.LoadRecipe(Module.ToString(), _idleCleanRecipe, false);
  307. Recipe recipe = Recipe.Load(recipeContent);
  308. if (recipe == null)
  309. {
  310. _idleCleanRecipe = string.Empty;
  311. }
  312. }
  313. public void WaferProcessDone()
  314. {
  315. _lastRunTime = DateTime.Now;
  316. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  317. _idleCleanWaferCount++;
  318. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  319. }
  320. private void ResetIdleCleanCounter()
  321. {
  322. _lastRunTime = DateTime.Now;
  323. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  324. _idleCleanWaferCount = 0;
  325. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  326. }
  327. public bool RunIdleCleanTask()
  328. {
  329. if(_idleCleanOpt == 1)
  330. {
  331. TimeSpan span = DateTime.Now - _lastRunTime;
  332. if(span.TotalHours >= _idleCleanHourSetPoint)
  333. {
  334. Process(_idleCleanRecipe, true, false, null);
  335. ResetIdleCleanCounter();
  336. return true;
  337. }
  338. }
  339. else if(_idleCleanOpt == 2)
  340. {
  341. if(_idleCleanWaferCount >= _idleCleanWaferSetPoint)
  342. {
  343. Process(_idleCleanRecipe, true, false, null);
  344. ResetIdleCleanCounter();
  345. return true;
  346. }
  347. }
  348. return false;
  349. }
  350. public bool RunJobCleanTask(string jobCleanRecipe)
  351. {
  352. // validate the job clean recipe name
  353. string recipeContent = RecipeFileManager.Instance.LoadRecipe(Module.ToString(), jobCleanRecipe, false);
  354. if(recipeContent.Length == 0)
  355. {
  356. return false;
  357. }
  358. Recipe recipe = Recipe.Load(recipeContent);
  359. if (recipe == null)
  360. {
  361. return false;
  362. }
  363. return Process(jobCleanRecipe, true, false, null);
  364. }
  365. #endregion
  366. }
  367. }