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- namespace Aitex.Core.RT.Log{
- public enum eEvent{
- EV_LOGOFF_INFO = 1,
- EV_LOGOUT_INFO = 2,
- ERR_LOGOFF_ERROR = 3,
- ERR_UPDATE_PW_ERROR = 4,
- ERR_DELETE_USER_ERROR = 5,
- ERR_UPDATE_USER_ERROR = 6,
- ERR_WCF_OPEN_ERROR = 9,
- EV_ROUTINE_NOTIFY = 10,
- WARN_DEFAULT_WARN = 11,
- ERR_ROUTINE_FAILED = 12,
- ERR_SIGNAL_TOWER_UNDEFINE = 13,
- ERR_SIGNAL_TOWER_INVALID_CFG = 14,
- ERR_PLC_HEARTBEAT_FAIL = 15,
- EV_DEVICE_INFO = 16,
- ERR_DEVICE_INFO = 17,
- ERR_EXCEPTION = 18,
- WARN_DEVICE_INFO = 19,
- EV_WAFER_MANAGER_NOTIFY = 20,
- WARN_WAFER_MANAGER_WARN = 21,
- ERR_WAFER_MANAGER_FAILED = 22,
- EV_FSM_NOTIFY = 23,
- WARN_FSM_WARN = 24,
- ERR_FSM_FAILED = 25,
- EV_ROUTER = 26,
- WARN_ROUTER = 27,
- ERR_ROUTER = 28,
- EV_WAFER_MOVED = 29,
- EV_WAFER_CREATE = 30,
- EV_WAFER_DELETE = 31,
- EV_SEQUENCE = 32,
- WARN_SEQUENCE = 33,
- ERR_SEQUENCE = 34,
- ERR_INTERLOCK_FAIL = 35,
- EV_SYSTEM_CONFIG = 36,
- WARN_SYSTEM_CONFIG = 37,
- EV_SCHEDULER = 38,
- WARN_SCHEDULER = 39,
- EXCEP_FSM = 40,
- EV_WAFER_DUPLICATED = 41,
- INFO_DEVICE_ENTITY = 42,
- WARN_DEVICE_ENTITY = 43,
- ERR_DEVICE_ENTITY = 44,
- INFO_WINRESOURCE = 45,
- WARN_WINRESOURCE = 46,
- ERR_WINRESOURCE = 47,
- ERR_PM_SCRUBBER_NOOK_STOPTRANSFER = 48,
- INFO_DEVICE_IO_HEATER = 1000,
- WARN_DEVICE_IO_HEATER = 1001,
- ERR_DEVICE_IO_HEATER = 1002,
- ERR_DRY_PUMP = 1003,
- ERR_PENDULUM_VALVE = 1004,
- ERR_ESC_HV = 1005,
- ERR_TURBO_PUMP = 1006,
- ERR_RF = 1007,
- INFO_DEVICE_CHILLER = 1008,
- WARN_DEVICE_CHILLER = 1009,
- ERR_DEVICE_CHILLER = 1010,
- WARN_RF = 1011,
- ERR_ENDPOINT = 1012,
- INFO_ENDPOINT = 1013,
- WARN_ENDPOINT = 1014,
- ERR_BACKSIDE_HE = 1015,
- INFO_BACKSIDE_HE = 1016,
- WARN_BACKSIDE_HE = 1017,
- ERR_PROCESS = 1018,
- INFO_PROCESS = 1019,
- WARN_PROCESS = 1020,
- ERR_IoGasValve = 1021,
- WARN_State = 1022,
- ERR_PM = 1023,
- INFO_PM = 1024,
- WARN_PM = 1025,
- INFO_Sensor = 1026,
- WARN_Sensor = 1027,
- ERR_Sensor = 1028,
- INFO_FA = 1029,
- INFO_IOCYLINDER = 1030,
- INFO_IO_VALVE = 1031,
- WARN_IO_VALVE = 1032,
- ERR_IO_VALVE = 1033,
- ERR_MATCH = 1034,
- WARN_MATCH = 1035,
- INFO_MATCH = 1036,
- INFO_RF = 1037,
- INFO_RFBox = 1038,
- WARN_RFBox = 1039,
- ERR_RFBox = 1040,
- INFO_HighTemperatureHeater = 1041,
- WARN_HighTemperatureHeater = 1042,
- ERR_HighTemperatureHeater = 1043,
- WARN_PM_TOLERANCE = 1044,
- ERR_PM_TOLERANCE = 1045,
- ERR_PM_PLC_HEARTBEAT_FAIL = 1046,
- ERR_PM_PROCESSNOWAFER = 1050,
- ERR_PM_CLEANWITHWAFER = 1051,
- ERR_PM_SCRUBBER_NOOK_STOPPROCESS = 1052,
- ERR_PM_SCRUBBER_NOOK_CONTINUEPROCESS = 1053,
- WARN_PM_SCRUBBER_NOOK = 1054,
- INFO_RF_Connect = 1100,
- ERR_RF_Connect = 1101,
- ERR_RF_WaterFlow = 1102,
- ERR_RF_RFGInterlock = 1103,
- ERR_RF_GASOFF = 1104,
- ERR_PV_INTERLOCK_FORELINRPRESSURE = 1180,
- ERR_PV_INTERLOCK_TURBOPUMPNOTATSPEED = 1182,
- ERR_PV_PARITY = 1183,
- ERR_MFC_MFC1FLOWOVERRANGE = 1220,
- ERR_MFC_MFC2FLOWOVERRANGE = 1221,
- ERR_MFC_MFC3FLOWOVERRANGE = 1222,
- ERR_MFC_MFC4FLOWOVERRANGE = 1223,
- ERR_MFC_MFC5FLOWOVERRANGE = 1224,
- ERR_MFC_MFC6FLOWOVERRANGE = 1225,
- ERR_MFC_MFC7FLOWOVERRANGE = 1226,
- ERR_MFC_MFC8FLOWOVERRANGE = 1227,
- ERR_MFC_N2FLOWOVERRANGE = 1228,
- ERR_MFC1_PRESSURE = 1229,
- ERR_MFC2_PRESSURE = 1230,
- ERR_MFC3_PRESSURE = 1231,
- ERR_MFC4_PRESSURE = 1232,
- ERR_MFC5_PRESSURE = 1233,
- ERR_MFC6_PRESSURE = 1234,
- ERR_MFC7_PRESSURE = 1235,
- ERR_MFC8_PRESSURE = 1238,
- ERR_N2_PRESSURE = 1239,
- ERR_HighTemperatureHeater_SetRatio_OverRange = 1240,
- ERR_HighTemperatureHeater_SetTemperature_OverRange = 1241,
- WARN_HighTemperatureHeater_N2 = 1242,
- ERR_HighTemperatureHeater_GoPosition1TimeOut = 1246,
- ERR_HighTemperatureHeater_GoPosition2TimeOut = 1247,
- ERR_HighTemperatureHeater_GoPosition3TimeOut = 1248,
- ERR_HighTemperatureHeater_GoPosition4TimeOut = 1249,
- ERR_HighTemperatureHeater_GoPosition5TimeOut = 1250,
- ERR_HighTemperatureHeater_TransferPosition = 1251,
- ERR_HighTemperatureHeater_LiftDriverAlarm = 1252,
- ERR_HighTemperatureHeater_LiftPosiModuleAlarm = 1253,
- ERR_HighTemperatureHeater_LiftORGAlarm = 1254,
- ERR_HighTemperatureHeater_GoOriginTimeOut = 1255,
- INFO_DEVICE_IO_MAGNET = 1260,
- WARNING_SENSOR_WATERLEAK = 1280,
- WARNING_SENSOR_WATERFLOW = 1281,
- WARNING_SENSOR_CDAPRESSURE = 1282,
- WARNING_SENSOR_N2PRESSURE = 1283,
- WARNING_SENSOR_GASBOXDOOR = 1284,
- WARNING_SENSOR_GASBOXPRESSURE = 1285,
- WARNING_SENSOR_CHBWALLOTSWALARM = 1286,
- WARNING_SENSOR_GASBOXN2FLOW = 1287,
- WARNING_SENSOR_PVPURGEPRESSUREALARM = 1288,
- WARNING_SENSOR_N2PURGEPRESSURE = 1289,
- ERR_SENSOR_WATERFLOW_STOP_CURRENTPROCESS = 1290,
- ERR_SENSOR_WATERFLOW_STOP_NEXTPROCESS = 1291,
- ERR_TM = 2000,
- INFO_TM = 2001,
- WARN_TM = 2002,
- ERR_TM_MFC1FLOWOVERRANGE = 2003,
- ERR_TM_MFCPRESSURE = 2004,
- ERR_TM_PLC_HEARTBEAT_FAIL = 2005,
- ERR_TM_ROBOT = 2100,
- INFO_TM_ROBOT = 2101,
- ERR_TM_ROBOT_PICKSLOTOVERRANGE = 2102,
- ERR_TM_ROBOT_PLACESLOTOVERRange = 2103,
- ERR_TM_ROBOT_SETINTLOCKWAF_SEN = 2104,
- ERR_TM_ROBOT_SETINTLOCKRZ = 2105,
- ERR_TM_ROBOT_SETINTLOCK = 2106,
- ERR_TM_ROBOT_SETIOECHO = 2107,
- ERR_TM_ROBOT_SETIOSTATE = 2108,
- ERR_TM_ROBOT_LLAWCOVERRANGE = 2109,
- ERR_TM_ROBOT_PMAWCOVERRANGE = 2110,
- EV_EFEM_COMMON_INFO = 4000,
- WARN_EFEM_COMMON_WARN = 4001,
- ERR_EFEM_COMMON_FAILED = 4002,
- ERR_EFEM_VAC_SOURCE_PRESSURE_LOW = 4003,
- ERR_EFEM_IONIZER_COMPRESSED_AIR = 4004,
- ERR_EFEM_COMPRESSED_AIR_PRESSURE_LOW = 4005,
- ERR_EFEM_FLOW_GUAGE_SENSOR = 4006,
- ERR_EFEM_LEAKAGE = 4007,
- ERR_EFEM_IONIZER = 4008,
- ERR_EFEM_FFU = 4009,
- ERR_EFEM_SWITCH_TO_MAINTAIN_MODE = 4010,
- EV_EFEM_ROBOT = 4100,
- WARN_EFEM_ROBOT = 4101,
- ERR_EFEM_ROBOT = 4102,
- EV_VCE_COMMON_INFO = 4200,
- WARN_VCE_COMMON_WARN = 4201,
- ERR_VCE_COMMON_Failed = 4202,
- ERR_FA = 5003,
- WARN_FA = 5004,
- ERR_LL = 6000,
- INFO_LL = 6001,
- WARN_LL = 6002,
- ERR_LLA_MFC1FLOWOVERRANGE = 6003,
- ERR_LLB_MFC1FLOWOVERRANGE = 6004,
- ERR_LLA_MFCPRESSURE = 6005,
- ERR_LLB_MFCPRESSURE = 6006,
- INFO_TROUGHPUT_ENHANCE_TRACE = 8888,
- }
- }
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