namespace Aitex.Core.RT.Log{ public enum eEvent{ EV_LOGOFF_INFO = 1, EV_LOGOUT_INFO = 2, ERR_LOGOFF_ERROR = 3, ERR_UPDATE_PW_ERROR = 4, ERR_DELETE_USER_ERROR = 5, ERR_UPDATE_USER_ERROR = 6, ERR_WCF_OPEN_ERROR = 9, EV_ROUTINE_NOTIFY = 10, WARN_DEFAULT_WARN = 11, ERR_ROUTINE_FAILED = 12, ERR_SIGNAL_TOWER_UNDEFINE = 13, ERR_SIGNAL_TOWER_INVALID_CFG = 14, ERR_PLC_HEARTBEAT_FAIL = 15, EV_DEVICE_INFO = 16, ERR_DEVICE_INFO = 17, ERR_EXCEPTION = 18, WARN_DEVICE_INFO = 19, EV_WAFER_MANAGER_NOTIFY = 20, WARN_WAFER_MANAGER_WARN = 21, ERR_WAFER_MANAGER_FAILED = 22, EV_FSM_NOTIFY = 23, WARN_FSM_WARN = 24, ERR_FSM_FAILED = 25, EV_ROUTER = 26, WARN_ROUTER = 27, ERR_ROUTER = 28, EV_WAFER_MOVED = 29, EV_WAFER_CREATE = 30, EV_WAFER_DELETE = 31, EV_SEQUENCE = 32, WARN_SEQUENCE = 33, ERR_SEQUENCE = 34, ERR_INTERLOCK_FAIL = 35, EV_SYSTEM_CONFIG = 36, WARN_SYSTEM_CONFIG = 37, EV_SCHEDULER = 38, WARN_SCHEDULER = 39, EXCEP_FSM = 40, EV_WAFER_DUPLICATED = 41, INFO_DEVICE_ENTITY = 42, WARN_DEVICE_ENTITY = 43, ERR_DEVICE_ENTITY = 44, INFO_WINRESOURCE = 45, WARN_WINRESOURCE = 46, ERR_WINRESOURCE = 47, ERR_PM_SCRUBBER_NOOK_STOPTRANSFER = 48, INFO_DEVICE_IO_HEATER = 1000, WARN_DEVICE_IO_HEATER = 1001, ERR_DEVICE_IO_HEATER = 1002, ERR_DRY_PUMP = 1003, ERR_PENDULUM_VALVE = 1004, ERR_ESC_HV = 1005, ERR_TURBO_PUMP = 1006, ERR_RF = 1007, INFO_DEVICE_CHILLER = 1008, WARN_DEVICE_CHILLER = 1009, ERR_DEVICE_CHILLER = 1010, WARN_RF = 1011, ERR_ENDPOINT = 1012, INFO_ENDPOINT = 1013, WARN_ENDPOINT = 1014, ERR_BACKSIDE_HE = 1015, INFO_BACKSIDE_HE = 1016, WARN_BACKSIDE_HE = 1017, ERR_PROCESS = 1018, INFO_PROCESS = 1019, WARN_PROCESS = 1020, ERR_IoGasValve = 1021, WARN_State = 1022, ERR_PM = 1023, INFO_PM = 1024, WARN_PM = 1025, INFO_Sensor = 1026, WARN_Sensor = 1027, ERR_Sensor = 1028, INFO_FA = 1029, INFO_IOCYLINDER = 1030, INFO_IO_VALVE = 1031, WARN_IO_VALVE = 1032, ERR_IO_VALVE = 1033, ERR_MATCH = 1034, WARN_MATCH = 1035, INFO_MATCH = 1036, INFO_RF = 1037, INFO_RFBox = 1038, WARN_RFBox = 1039, ERR_RFBox = 1040, INFO_HighTemperatureHeater = 1041, WARN_HighTemperatureHeater = 1042, ERR_HighTemperatureHeater = 1043, WARN_PM_TOLERANCE = 1044, ERR_PM_TOLERANCE = 1045, ERR_PM_PLC_HEARTBEAT_FAIL = 1046, ERR_PM_PROCESSNOWAFER = 1050, ERR_PM_CLEANWITHWAFER = 1051, ERR_PM_SCRUBBER_NOOK_STOPPROCESS = 1052, ERR_PM_SCRUBBER_NOOK_CONTINUEPROCESS = 1053, WARN_PM_SCRUBBER_NOOK = 1054, INFO_RF_Connect = 1100, ERR_RF_Connect = 1101, ERR_RF_WaterFlow = 1102, ERR_RF_RFGInterlock = 1103, ERR_RF_GASOFF = 1104, ERR_PV_INTERLOCK_FORELINRPRESSURE = 1180, ERR_PV_INTERLOCK_TURBOPUMPNOTATSPEED = 1182, ERR_PV_PARITY = 1183, ERR_MFC_MFC1FLOWOVERRANGE = 1220, ERR_MFC_MFC2FLOWOVERRANGE = 1221, ERR_MFC_MFC3FLOWOVERRANGE = 1222, ERR_MFC_MFC4FLOWOVERRANGE = 1223, ERR_MFC_MFC5FLOWOVERRANGE = 1224, ERR_MFC_MFC6FLOWOVERRANGE = 1225, ERR_MFC_MFC7FLOWOVERRANGE = 1226, ERR_MFC_MFC8FLOWOVERRANGE = 1227, ERR_MFC_N2FLOWOVERRANGE = 1228, ERR_MFC1_PRESSURE = 1229, ERR_MFC2_PRESSURE = 1230, ERR_MFC3_PRESSURE = 1231, ERR_MFC4_PRESSURE = 1232, ERR_MFC5_PRESSURE = 1233, ERR_MFC6_PRESSURE = 1234, ERR_MFC7_PRESSURE = 1235, ERR_MFC8_PRESSURE = 1238, ERR_N2_PRESSURE = 1239, ERR_HighTemperatureHeater_SetRatio_OverRange = 1240, ERR_HighTemperatureHeater_SetTemperature_OverRange = 1241, WARN_HighTemperatureHeater_N2 = 1242, ERR_HighTemperatureHeater_GoPosition1TimeOut = 1246, ERR_HighTemperatureHeater_GoPosition2TimeOut = 1247, ERR_HighTemperatureHeater_GoPosition3TimeOut = 1248, ERR_HighTemperatureHeater_GoPosition4TimeOut = 1249, ERR_HighTemperatureHeater_GoPosition5TimeOut = 1250, ERR_HighTemperatureHeater_TransferPosition = 1251, ERR_HighTemperatureHeater_LiftDriverAlarm = 1252, ERR_HighTemperatureHeater_LiftPosiModuleAlarm = 1253, ERR_HighTemperatureHeater_LiftORGAlarm = 1254, ERR_HighTemperatureHeater_GoOriginTimeOut = 1255, INFO_DEVICE_IO_MAGNET = 1260, WARNING_SENSOR_WATERLEAK = 1280, WARNING_SENSOR_WATERFLOW = 1281, WARNING_SENSOR_CDAPRESSURE = 1282, WARNING_SENSOR_N2PRESSURE = 1283, WARNING_SENSOR_GASBOXDOOR = 1284, WARNING_SENSOR_GASBOXPRESSURE = 1285, WARNING_SENSOR_CHBWALLOTSWALARM = 1286, WARNING_SENSOR_GASBOXN2FLOW = 1287, WARNING_SENSOR_PVPURGEPRESSUREALARM = 1288, WARNING_SENSOR_N2PURGEPRESSURE = 1289, ERR_SENSOR_WATERFLOW_STOP_CURRENTPROCESS = 1290, ERR_SENSOR_WATERFLOW_STOP_NEXTPROCESS = 1291, ERR_TM = 2000, INFO_TM = 2001, WARN_TM = 2002, ERR_TM_MFC1FLOWOVERRANGE = 2003, ERR_TM_MFCPRESSURE = 2004, ERR_TM_PLC_HEARTBEAT_FAIL = 2005, ERR_TM_ROBOT = 2100, INFO_TM_ROBOT = 2101, ERR_TM_ROBOT_PICKSLOTOVERRANGE = 2102, ERR_TM_ROBOT_PLACESLOTOVERRange = 2103, ERR_TM_ROBOT_SETINTLOCKWAF_SEN = 2104, ERR_TM_ROBOT_SETINTLOCKRZ = 2105, ERR_TM_ROBOT_SETINTLOCK = 2106, ERR_TM_ROBOT_SETIOECHO = 2107, ERR_TM_ROBOT_SETIOSTATE = 2108, ERR_TM_ROBOT_LLAWCOVERRANGE = 2109, ERR_TM_ROBOT_PMAWCOVERRANGE = 2110, EV_EFEM_COMMON_INFO = 4000, WARN_EFEM_COMMON_WARN = 4001, ERR_EFEM_COMMON_FAILED = 4002, ERR_EFEM_VAC_SOURCE_PRESSURE_LOW = 4003, ERR_EFEM_IONIZER_COMPRESSED_AIR = 4004, ERR_EFEM_COMPRESSED_AIR_PRESSURE_LOW = 4005, ERR_EFEM_FLOW_GUAGE_SENSOR = 4006, ERR_EFEM_LEAKAGE = 4007, ERR_EFEM_IONIZER = 4008, ERR_EFEM_FFU = 4009, ERR_EFEM_SWITCH_TO_MAINTAIN_MODE = 4010, EV_EFEM_ROBOT = 4100, WARN_EFEM_ROBOT = 4101, ERR_EFEM_ROBOT = 4102, EV_VCE_COMMON_INFO = 4200, WARN_VCE_COMMON_WARN = 4201, ERR_VCE_COMMON_Failed = 4202, ERR_FA = 5003, WARN_FA = 5004, ERR_LL = 6000, INFO_LL = 6001, WARN_LL = 6002, ERR_LLA_MFC1FLOWOVERRANGE = 6003, ERR_LLB_MFC1FLOWOVERRANGE = 6004, ERR_LLA_MFCPRESSURE = 6005, ERR_LLB_MFCPRESSURE = 6006, INFO_TROUGHPUT_ENHANCE_TRACE = 8888, } }