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EFEM
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b253c8fadd
1.添加旋转动画
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1 year ago |
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LLs
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2694bdc96c
Enhance the Pre-rotation function
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1 year ago |
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LPs
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03063bae6a
Enhance the routine framework.
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1 year ago |
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PMs
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81bc054dc3
fix bugs
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1 year ago |
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Schedulers
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0a0308458e
Enable drag wafer while module offline.
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1 year ago |
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TM
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2694bdc96c
Enhance the Pre-rotation function
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1 year ago |
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VCE
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a980a39acf
add read delay in IoCylinder && add unknown error codes with VPA driver && add VceEntity
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1 year ago |
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AutoCycle.cs
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a8ee956c5e
Fixed the Cycle Wafer Count and throughput calculation bugs.
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1 year ago |
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Autotransfer_LP_FA.cs
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60e9a04892
Simulator LP3 Update
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1 year ago |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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2 years ago |
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ManualTransfer.cs
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501997ac38
TM/EFEM robot single arm option.
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1 year ago |
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ResourceMonitor.cs
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0ed42d17d1
fix bugs for WaferOffset
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1 year ago |
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RouteManager.cs
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1e7c808d19
add VenusSE tm related module in ui rt simulator && fix efem backround bug
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1 year ago |
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TMCycle.cs
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03063bae6a
Enhance the routine framework.
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1 year ago |
lixiang
b253c8fadd
1.添加旋转动画