| .. |
|
ISchedulerDBCallback.cs
|
5b037046f9
Add TM/LL modules.
|
лет назад: 2 |
|
SchedulerAligner.cs
|
e61f018b66
Manual Return wafer while running cycle.
|
1 год назад |
|
SchedulerDBCallback.cs
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
месяцев назад: 11 |
|
SchedulerEfemRobot.cs
|
96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
|
1 год назад |
|
SchedulerLoadLock.cs
|
5687e44ebc
Enhance routing algorithm.
|
1 год назад |
|
SchedulerLoadPort.cs
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
месяцев назад: 11 |
|
SchedulerModule.cs
|
b6ab013e1b
fix some miss function in SE/DE Recipe && Improve VenusDispatcher
|
месяцев назад: 11 |
|
SchedulerPM.cs
|
a9d8e56970
1.扩展alarm list
|
1 год назад |
|
SchedulerSETMRobot.cs
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
|
1 год назад |
|
SchedulerTMRobot.cs
|
0af5bc1e75
throughput enhancement.
|
1 год назад |
|
SchedulerVCE.cs
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 год назад |
|
TransferModule.cs
|
f8336dc16b
fix the crash issue in SETMScheduler.
|
1 год назад |
lixiang
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息