SEMFPMPickRoutine.cs 12 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.RT.Routine;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using Aitex.Sorter.Common;
  8. using MECF.Framework.Common.DBCore;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.Schedulers;
  11. using MECF.Framework.Common.SubstrateTrackings;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
  13. using System;
  14. using System.Collections.Generic;
  15. using System.Linq;
  16. using System.Text;
  17. using System.Threading.Tasks;
  18. using System.Windows;
  19. using System.Windows.Interop;
  20. using Venus_Core;
  21. using Venus_RT.Devices;
  22. using Venus_RT.Devices.IODevices;
  23. using Venus_RT.Modules.PMs;
  24. namespace Venus_RT.Modules.TM.VenusEntity
  25. {
  26. public class SEMFPMPickRoutine : ModuleRoutineBase, IRoutine
  27. {
  28. private enum PickStep
  29. {
  30. WaitPMReady,
  31. WaitforControlPressure,
  32. PMPrepare,
  33. ArmExtend,
  34. QueryAWC,
  35. DropDownWafer,
  36. PickDelay,
  37. ArmRetract,
  38. SavePickeData,
  39. NotifyDone,
  40. CloseSlitDoor,
  41. CloseLinerDoor,
  42. EndDelay
  43. }
  44. private readonly HongHuTM _tm;
  45. private readonly ITransferRobot _robot;
  46. private int _pickdelay = 0;
  47. private ModuleName _targetModule;
  48. private Hand _hand;
  49. private int _targetSlot;
  50. private PMEntity _pmModule;
  51. private int _ExtendTimeout = 120 * 1000;
  52. private int _RetractTimeout = 120 * 1000;
  53. private JetPMBase _chamber;
  54. private bool NeedControlPressure;
  55. private int _controlPressureSetPoint = 90;
  56. private int _controlFlowSetPoint = 10;
  57. //private DateTime _starttime;
  58. private bool _queryAwc;
  59. private bool havelinerdoor;
  60. public SEMFPMPickRoutine(HongHuTM honghutm, ITransferRobot robot) : base(ModuleName.TMRobot)
  61. {
  62. _tm = honghutm;
  63. _robot = robot;
  64. _queryAwc = false;
  65. }
  66. public RState Start(params object[] objs)
  67. {
  68. //_starttime = DateTime.Now;
  69. if (!_robot.IsHomed)
  70. {
  71. LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
  72. return RState.Failed;
  73. }
  74. var pickItem = (Queue<MoveItem>)objs[0];
  75. _targetModule = pickItem.Peek().SourceModule;
  76. _targetSlot = pickItem.Peek().SourceSlot;
  77. _hand = pickItem.Peek().RobotHand;
  78. _chamber = DEVICE.GetDevice<JetPMBase>(_targetModule.ToString());//(JetChamber)SC.GetValue<int>($"{_targetModule}.ChamberType");
  79. if ( _chamber.ChamberType== JetChamber.VenusDE)
  80. {
  81. havelinerdoor = true;
  82. }
  83. else
  84. {
  85. havelinerdoor = false;
  86. }
  87. if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
  88. {
  89. _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);
  90. }
  91. else
  92. {
  93. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for picking action");
  94. return RState.Failed;
  95. }
  96. if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand))
  97. {
  98. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer");
  99. return RState.Failed;
  100. }
  101. if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
  102. {
  103. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer");
  104. return RState.Failed;
  105. }
  106. var wafer = WaferManager.Instance.GetWafer(_targetModule, _targetSlot);
  107. LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from {_targetModule} {_targetSlot + 1} to TM Robot {_hand}");
  108. _ExtendTimeout = SC.GetValue<int>("SETM.ExtendTimeout") * 1000;
  109. _RetractTimeout = SC.GetValue<int>("SETM.RetractTimeout") * 1000;
  110. _pickdelay = SC.GetValue<int>($"{_targetModule}.PickDelayTime");
  111. if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline)
  112. {
  113. NeedControlPressure = true;
  114. }
  115. else
  116. {
  117. NeedControlPressure = false;
  118. }
  119. Reset();
  120. return Runner.Start(Module, $"Pick from {_targetModule}");
  121. }
  122. public RState Monitor()
  123. {
  124. Runner.Wait(PickStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)
  125. .RunIf(PickStep.WaitforControlPressure, NeedControlPressure, StartControlPressure, IsPressureReady, _delay_60s)
  126. .Run(PickStep.PMPrepare, ModulePrepare, IsModulePrepareReady)
  127. .Run(PickStep.ArmExtend, ArmExtend, WaitRobotExtendDone, _ExtendTimeout)
  128. .Run(PickStep.QueryAWC, QueryAWC, WaitRobotQueryDone, _delay_1s)
  129. .Run(PickStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown)
  130. .Delay(PickStep.PickDelay, _pickdelay)
  131. .Run(PickStep.ArmRetract, ArmRetract, WaitRobotRetractDone, _RetractTimeout)
  132. .Run(PickStep.SavePickeData, RecordAWCData, NullFun)
  133. .Run(PickStep.NotifyDone, NotifyPMDone, _delay_50ms)
  134. .Delay(PickStep.PickDelay, _delay_50ms)
  135. .Run(PickStep.CloseSlitDoor, PMDoorClose, WaitPMDoorClose)
  136. .RunIf(PickStep.CloseLinerDoor, havelinerdoor, PMLinerDoorClose, WaitPMLinerDoorClose)
  137. .End(PickStep.EndDelay, NullFun, _delay_50ms);
  138. return Runner.Status;
  139. }
  140. private bool ModulePrepare()
  141. {
  142. _pmModule.PostMsg(PMEntity.MSG.PreparePick);
  143. //_tm.TurnSlitDoor(_targetModule, true);
  144. return true;
  145. }
  146. private bool IsModulePrepareReady()
  147. {
  148. return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick && _pmModule.IsSlitDoorOpen;
  149. }
  150. private bool ArmExtend()
  151. {
  152. if (!_pmModule.IsSlitDoorOpen)
  153. {
  154. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Door is not Open");
  155. return false;
  156. }
  157. return _robot.PickExtend(_targetModule, _targetSlot, _hand);
  158. }
  159. private bool ArmRetract()
  160. {
  161. return _robot.PickRetract(_targetModule, _targetSlot, _hand);
  162. }
  163. private bool WaitRobotExtendDone()
  164. {
  165. if (_robot.Status == RState.Running)
  166. {
  167. return false;
  168. }
  169. else if (_robot.Status == RState.End)
  170. {
  171. WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);
  172. return true;
  173. }
  174. else
  175. {
  176. Runner.Stop($"TM Robot Pick Extend failed, {_robot.Status}");
  177. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  178. return true;
  179. }
  180. }
  181. private bool IsPressureReady()
  182. {
  183. double ControlPressure = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
  184. //double PMPressure = Singleton<RouteManager>.Instance.GetPM(_targetModule).ChamberPressure;
  185. double PMPressure = (double)DATA.Poll($"{_targetModule}.ChamberPressure");
  186. double range = SC.GetValue<int>($"{_targetModule}.ControlPressureOffset");
  187. if ((PMPressure >= (ControlPressure - range)) && (PMPressure <= (ControlPressure + range)))
  188. {
  189. //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "current pmpressure"+PMPressure);
  190. //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "DATA current pmpressure"+DATA.Poll($"{_targetModule}.ChamberPressure"));
  191. //string reason = $"{Module} and TM pressure difference exceeds the max limit {maxPressureDifference}, TMPressure:{TMPressure}, {Module}Pressure:{PMPressure}";
  192. //LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  193. return true;
  194. }
  195. else return false;
  196. }
  197. private bool StartControlPressure()
  198. {
  199. _chamber = DEVICE.GetDevice<JetPMBase>(_targetModule.ToString());
  200. _controlPressureSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
  201. _controlFlowSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureN2FlowSetPoint");
  202. _chamber.StartControlPressure(_controlPressureSetPoint, _controlFlowSetPoint);
  203. return true;
  204. }
  205. private bool QueryAWC()
  206. {
  207. if (!_queryAwc)
  208. return true;
  209. else
  210. return _robot.QueryAwc(); ;
  211. }
  212. private bool WaitRobotQueryDone()
  213. {
  214. if (!_queryAwc)
  215. return true;
  216. if (_robot.Status == RState.Running)
  217. {
  218. return false;
  219. }
  220. else if (_robot.Status == RState.End)
  221. {
  222. return true;
  223. }
  224. else
  225. {
  226. Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}");
  227. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  228. return true;
  229. }
  230. }
  231. private bool RecordAWCData()
  232. {
  233. if (!_queryAwc)
  234. return true;
  235. return true;
  236. }
  237. private bool NotifyPMPickWafer()
  238. {
  239. _pmModule.PostMsg(PMEntity.MSG.DropDownWafer);
  240. return true;
  241. }
  242. private bool WaitPMWaferDropDown()
  243. {
  244. return _pmModule.Status == PMEntity.PMStatus.Exchange_Ready;
  245. }
  246. private bool WaitRobotRetractDone()
  247. {
  248. if (_robot.Status == RState.Running)
  249. {
  250. return false;
  251. }
  252. else if (_robot.Status == RState.End)
  253. {
  254. return true;
  255. }
  256. else
  257. {
  258. Runner.Stop($"TM Robot Pick Retract failed, {_robot.Status}");
  259. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  260. return true;
  261. }
  262. }
  263. private bool NotifyPMDone()
  264. {
  265. _pmModule.PostMsg(PMEntity.MSG.PickReady);
  266. return true;
  267. }
  268. private bool PMDoorClose()
  269. {
  270. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Close Door Again");
  271. return _tm.TurnSlitDoor(_targetModule, false);
  272. }
  273. private bool PMLinerDoorClose()
  274. {
  275. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Close Liner Door Again");
  276. return _chamber.SetLinerDoor(false, out _);
  277. }
  278. private bool WaitPMDoorClose()
  279. {
  280. if (_tm.CheckSlitValveClose(_targetModule))
  281. {
  282. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check Door Close");
  283. return true;
  284. }
  285. else
  286. {
  287. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check not Close Door");
  288. return false;
  289. }
  290. }
  291. private bool WaitPMLinerDoorClose()
  292. {
  293. if (_chamber.CheckLinerDoorClose())
  294. {
  295. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check LinerDoor Close");
  296. return true;
  297. }
  298. else
  299. {
  300. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check not Close LinerDoor");
  301. return false;
  302. }
  303. }
  304. public void Abort()
  305. {
  306. _robot.Halt();
  307. }
  308. }
  309. }