PumpDownRoutine.cs 10 KB

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  1. using System;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using Venus_Core;
  7. using Aitex.Core.RT.Log;
  8. namespace Venus_RT.Modules.PMs
  9. {
  10. class PumpDownRoutine : PMRoutineBase, IRoutine
  11. {
  12. private enum PumpStep
  13. {
  14. kDelay_2s,
  15. kCloseISOValve,
  16. kSoftPump,
  17. kFastPump,
  18. kHe2ExDelay,
  19. kPVHe2,
  20. kISOValve,
  21. kTurboN2Purge,
  22. kVATValve,
  23. kOpenTurboPumpPurgeGasFinal,
  24. kOpenTurboPump,
  25. kGasFinal,
  26. kFinalStep,
  27. kEnd,
  28. }
  29. //private int _ventTime;
  30. private int _pump_delay = 5000;
  31. private int _roughPumpPressure = 75000;
  32. private int _vHe2FlowPressure = 200;
  33. private int _forelinePressure = 200;
  34. private int _basePressure = 10;
  35. private JetChamber jetChamber = JetChamber.None;
  36. //private bool needsoft = true;
  37. public PumpDownRoutine(JetPMBase chamber) : base(chamber)
  38. {
  39. jetChamber = (JetChamber)SC.GetValue<int>($"{chamber.Name}.ChamberType");
  40. Name = "PumpDown";
  41. //if (jetChamber == JetChamber.VenusDE)
  42. //{
  43. // needsoft = false;
  44. //}
  45. }
  46. public RState Start(params object[] objs)
  47. {
  48. if (CheckLid() &&
  49. CheckSlitDoor())
  50. {
  51. Reset();
  52. _chamber.CloseValves();
  53. _roughPumpPressure = SC.GetValue<int>($"{Module}.Pump.PumpCrossingPressure");
  54. _pump_delay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay") * 1000;
  55. _basePressure = (objs.Length >= 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
  56. _chamber.OpenValve(ValveType.PVN22, true);
  57. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  58. _chamber.TurnPendulumValve(false);
  59. _vHe2FlowPressure = SC.GetValue<int>($"{Module}.Pump.PumpVHe2FlowPressure");
  60. //前端压力值高于某个数值
  61. _forelinePressure = SC.GetValue<int>($"{Module}.Pump.ForelinePressure");
  62. if (!_chamber.IsPumpRunning || _chamber.ForelinePressure > _forelinePressure)
  63. {
  64. LOG.Write(eEvent.ERR_PM,Module, $"Cannot start pumpdown, drypump running:{_chamber.IsPumpRunning}, ForelinePressure:{_chamber.ForelinePressure}=>Target:{_forelinePressure}");
  65. return RState.Failed;
  66. }
  67. return Runner.Start(Module, Name);
  68. }
  69. return RState.Failed;
  70. }
  71. public RState Monitor()
  72. {
  73. switch (jetChamber)
  74. {
  75. //case JetChamber.Venus:
  76. case JetChamber.VenusSE:
  77. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  78. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  79. .Run(PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  80. .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  81. .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  82. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  83. .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  84. .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  85. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  86. .End(PumpStep.kEnd, NullFun, _delay_1s);
  87. break;
  88. case JetChamber.Kepler2300:
  89. case JetChamber.Kepler2200A:
  90. case JetChamber.Kepler2200B:
  91. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  92. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  93. .Run(PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  94. .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  95. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  96. .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  97. .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  98. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  99. .End(PumpStep.kEnd, NullFun, _delay_1s);
  100. break;
  101. case JetChamber.VenusDE:
  102. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  103. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  104. .Run(PumpStep.kFastPump, OpenDEFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  105. .Delay(PumpStep.kHe2ExDelay, 3000)
  106. .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_5s)
  107. .Run(PumpStep.kISOValve, OpenISOValve, _delay_5s)
  108. .Run(PumpStep.kOpenTurboPump, OpenTurboValve, _delay_3s)
  109. .Run(PumpStep.kVATValve, OpenVATValve, _delay_2s)
  110. .Run(PumpStep.kOpenTurboPump, OpenGuageGasFinalValve, _delay_3s)
  111. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  112. .End(PumpStep.kEnd, NullFun, _delay_1s);
  113. break;
  114. }
  115. //if (jetChamber == JetChamber.VenusDE)
  116. //{
  117. // Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  118. // .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  119. // .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_5s)
  120. // .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  121. // .Run(PumpStep.kISOValve, OpenISOValve, _delay_5s)
  122. // .Run(PumpStep.kOpenTurboPump, OpenTurboValve, _delay_3s)
  123. // .Run(PumpStep.kVATValve, OpenVATValve, _delay_2s)
  124. // .Run(PumpStep.kOpenTurboPump, OpenGuageGasFinalValve, _delay_3s)
  125. // .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  126. // .End(PumpStep.kEnd, NullFun, _delay_1s);
  127. //}
  128. //else
  129. //{
  130. // Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  131. // .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  132. // .RunIf(PumpStep.kSoftPump, needsoft, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  133. // .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  134. // .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  135. // .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  136. // .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  137. // .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  138. // .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  139. // .End(PumpStep.kEnd, NullFun, _delay_1s);
  140. //}
  141. return Runner.Status;
  142. }
  143. private bool OpenTurboPumpPurgeGasFinalValve()
  144. {
  145. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  146. _chamber.OpenValve(ValveType.GasFinal, true);
  147. return true;
  148. }
  149. private bool OpenTurboValve()
  150. {
  151. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  152. return true;
  153. }
  154. private bool OpenGuageGasFinalValve()
  155. {
  156. _chamber.OpenValve(ValveType.GasFinal, true);
  157. _chamber.OpenValve(ValveType.Guage, true);
  158. return true;
  159. }
  160. private bool OpenFastPump()
  161. {
  162. _chamber.OpenValve(ValveType.SoftPump, false);
  163. _chamber.OpenValve(ValveType.FastPump, true);
  164. return true;
  165. }
  166. private bool OpenDEFastPump()
  167. {
  168. //_chamber.OpenValve(ValveType.SoftPump, false);
  169. _chamber.OpenValve(ValveType.PVHe2, false);
  170. _chamber.OpenValve(ValveType.FastPump, true);
  171. return true;
  172. }
  173. private bool OpenHe2Valve()
  174. {
  175. _chamber.OpenValve(ValveType.FastPump, false);
  176. _chamber.OpenValve(ValveType.PVHe2, true);
  177. return true;
  178. }
  179. private bool OpenISOValve()
  180. {
  181. _chamber.OpenValve(ValveType.FastPump, false);
  182. _chamber.OpenValve(ValveType.PVHe2, false);
  183. // ISO Valve
  184. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  185. return true;
  186. }
  187. private bool OpenVATValve()
  188. {
  189. return _chamber.TurnPendulumValve(true);
  190. }
  191. private bool FinalStep()
  192. {
  193. _chamber.OpenValve(ValveType.Guage, true);
  194. //2023/04/25修改
  195. //_chamber.OpenValve(ValveType.TurboPumpPurge, true);
  196. //_chamber.OpenValve(ValveType.GasFinal, true);
  197. return true;
  198. }
  199. public void Abort()
  200. {
  201. CloseAllValves();
  202. }
  203. }
  204. }