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EFEM
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8020492bf4
fix action list buffer not reset while swap wafer.
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1 year ago |
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LLs
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cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
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1 year ago |
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LPs
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aaff066e93
EFEM Align UI RT 更新
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1 year ago |
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PMs
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ad6fa7b5dc
1.添加chamber界面创建wafer，开关门功能
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1 year ago |
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Schedulers
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501997ac38
TM/EFEM robot single arm option.
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1 year ago |
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TM
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cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
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1 year ago |
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VCE
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a980a39acf
add read delay in IoCylinder && add unknown error codes with VPA driver && add VceEntity
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1 year ago |
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AutoCycle.cs
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501997ac38
TM/EFEM robot single arm option.
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1 year ago |
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Autotransfer_LP_FA.cs
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60e9a04892
Simulator LP3 Update
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1 year ago |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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2 years ago |
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ManualTransfer.cs
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501997ac38
TM/EFEM robot single arm option.
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1 year ago |
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RouteManager.cs
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a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
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1 year ago |
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TMCycle.cs
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9ba5d70aff
fix abort manual transfer bug.
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1 year ago |
lixiang
ad6fa7b5dc
1.添加chamber界面创建wafer，开关门功能