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EventDefine.cs
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a5245356d0
source files
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3 gadi atpakaļ |
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GasBoxLeakCheckRoutine.cs
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a5813eb09d
1.修改chamber wafer样式
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2 gadi atpakaļ |
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GasFlowRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 gadi atpakaļ |
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LLPickRoutine.cs
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d3c29df415
Venus修复传片bug
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2 gadi atpakaļ |
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LLPlaceRoutine.cs
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6dd42b5fb0
添加process数据分析功能
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2 gadi atpakaļ |
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LoadLockLeakCheckRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 gadi atpakaļ |
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LoadLockPumpRoutine.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 gadi atpakaļ |
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LoadLockPurgeRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 gadi atpakaļ |
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LoadLockVentRoutine.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 gadi atpakaļ |
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PMEntity.cs
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a5813eb09d
1.修改chamber wafer样式
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2 gadi atpakaļ |
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PMGasVerificationRoutine.cs
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93b4531b7b
robot 不能home问题提交
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2 gadi atpakaļ |
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PMGaslinePurgeRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 gadi atpakaļ |
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PMHomeRoutine.cs
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8f80478982
1.添加IoSwitch
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2 gadi atpakaļ |
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PMLeakCheckRoutine.cs
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a5813eb09d
1.修改chamber wafer样式
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2 gadi atpakaļ |
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PMPartialPressureRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 gadi atpakaļ |
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PMProcessRoutine.cs
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93b4531b7b
robot 不能home问题提交
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2 gadi atpakaļ |
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PMProcess_FA.cs
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c8473cb60c
1.增加Fa模块事件上报相关接口FaEvet，与recipejob,loadportjob事件上报接口
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2 gadi atpakaļ |
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PMPurgeRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 gadi atpakaļ |
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PMRoutineBase.cs
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de406b964e
1.添加EFEM等ui界面
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2 gadi atpakaļ |
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PMVATPerformanceRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 gadi atpakaļ |
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Process.cs
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3cad102221
更新 RT
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3 gadi atpakaļ |
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ProcessDefine.cs
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16f00701e5
Redesign Recipe module.
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2 gadi atpakaļ |
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PumpDownRoutine.cs
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a5813eb09d
1.修改chamber wafer样式
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2 gadi atpakaļ |
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RFPowerSwitchRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 gadi atpakaļ |
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StartDryPumpRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 gadi atpakaļ |
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StartTurboPumpRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 gadi atpakaļ |
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VentRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 gadi atpakaļ |
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VenusRecipeFileContext.cs
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2b930e56b9
Log output for exception.
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2 gadi atpakaļ |
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VenusSequenceFileContext.cs
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2b930e56b9
Log output for exception.
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2 gadi atpakaļ |
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VirgoRecipeFileContext.cs
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896c7407de
优化log功能
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3 gadi atpakaļ |
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VirgoSequenceFileContext.cs
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896c7407de
优化log功能
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3 gadi atpakaļ |
