| .. |
|
AdLinkEthercat
|
ee26035034
1.添加Ethercat 励兆 Match DeviceData
|
1 gadu atpakaļ |
|
EFEM
|
1931fc55d3
1.根据长鑫要求Process Hietory界面添加eap提供的wafeid与lottype信息
|
8 mēneši atpakaļ |
|
EPD
|
2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
|
1 gadu atpakaļ |
|
EPDs
|
4ffafb6001
EFEM界面优化
|
2 gadi atpakaļ |
|
IODevices
|
f92e6abb17
1.添加Kepler2300 功能代码
|
6 mēneši atpakaļ |
|
PreAligner
|
dba64f7240
1. add the driver of SunWayVPA && the item in config/setmentity
|
9 mēneši atpakaļ |
|
SMIF
|
8436daeb68
Eliminate SE generation warning.
|
1 gadu atpakaļ |
|
TM
|
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
5 mēneši atpakaļ |
|
AIRSYSChiller.cs
|
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
5 mēneši atpakaļ |
|
AdTecRF.cs
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
9 mēneši atpakaļ |
|
AdixenTurboPump.cs
|
f92e6abb17
1.添加Kepler2300 功能代码
|
6 mēneši atpakaļ |
|
CometRF.cs
|
33d0cd73dd
1.修复Pump Counter 显示错误bug
|
1 gadu atpakaļ |
|
DataDefine.cs
|
12fa756895
1. SETM will be Init while While SETM Abort Homing
|
1 gadu atpakaļ |
|
DeviceManager.cs
|
6447434c5b
Venus代码删除
|
7 mēneši atpakaļ |
|
ESC5HighVoltage.cs
|
9e1a79673e
1. add the item of AutoUnLoad for Job
|
9 mēneši atpakaļ |
|
EdwardsPump.cs
|
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
5 mēneši atpakaļ |
|
FinsPlc.cs
|
9163903164
Kepler2200优化
|
1 gadu atpakaļ |
|
JetEPDBase.cs
|
4ffafb6001
EFEM界面优化
|
2 gadi atpakaļ |
|
JetEfem.cs
|
5fc13b3f0c
New Efem design
|
2 gadi atpakaļ |
|
JetKepler2200APM.cs
|
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
5 mēneši atpakaļ |
|
JetKepler2200BPM.cs
|
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
5 mēneši atpakaļ |
|
JetKepler2300PM.cs
|
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
5 mēneši atpakaļ |
|
JetPMBase.cs
|
f92e6abb17
1.添加Kepler2300 功能代码
|
6 mēneši atpakaļ |
|
KeplerSignalTower.cs
|
7a1faeac74
Redesign the EFEM module for thread safe issue.
|
1 gadu atpakaļ |
|
LzMatch_Ethercat.cs
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 gadu atpakaļ |
|
PendulumValve.cs
|
2cdc13a01b
1.Venus与Kepler 代码分开
|
7 mēneši atpakaļ |
|
PlasmaController.cs
|
75710d35d8
RF Match.
|
2 gadi atpakaļ |
|
RevtechMatch.cs
|
2cdc13a01b
1.Venus与Kepler 代码分开
|
7 mēneši atpakaļ |
|
SMCChiller.cs
|
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
5 mēneši atpakaļ |
|
SMCChillerDrive.cs
|
b6309f712c
upload for Venus SE/DE
|
9 mēneši atpakaļ |
|
SMCShareChiller.cs
|
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
5 mēneši atpakaļ |
|
SkyPump.cs
|
f92e6abb17
1.添加Kepler2300 功能代码
|
6 mēneši atpakaļ |
|
TruPlasmaRF.cs
|
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
5 mēneši atpakaļ |
|
TruPlasmaRF_Ethercat.cs
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
1 gadu atpakaļ |
|
TwincatFeedBackManager.cs
|
f92e6abb17
1.添加Kepler2300 功能代码
|
6 mēneši atpakaļ |
|
TwincatIO.cs
|
f92e6abb17
1.添加Kepler2300 功能代码
|
6 mēneši atpakaļ |
lixiang
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警