| .. |
|
EventDefine.cs
|
a5245356d0
source files
|
2 years ago |
|
Fdc.cs
|
d33079596b
1.优化新版跑片动画
|
1 year ago |
|
GasBoxLeakCheckRoutine.cs
|
7556c43a4c
1.Gas漏气检测结束ui界面不更新bug修复
|
10 months ago |
|
GasFlowRoutine.cs
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 year ago |
|
LLPickRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
1 year ago |
|
LLPlaceRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
1 year ago |
|
LoadLockLeakCheckRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
1 year ago |
|
LoadLockPumpRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
1 year ago |
|
LoadLockPurgeRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
1 year ago |
|
LoadLockVentRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
1 year ago |
|
PMEntity.cs
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
8 months ago |
|
PMGasVerificationRoutine.cs
|
e2836bfbda
1.Chamber DE process enhance
|
1 year ago |
|
PMGaslinePurgeRoutine.cs
|
3aee4d6673
1. Add the function of StatsDataManager in UI,RT
|
1 year ago |
|
PMHeatRoutine.cs
|
c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
|
1 year ago |
|
PMHomeRoutine.cs
|
99d939492e
1.加登出界面
|
1 year ago |
|
PMLeakCheckRoutine.cs
|
a9d8e56970
1.扩展alarm list
|
10 months ago |
|
PMPartialPressureRoutine.cs
|
3aee4d6673
1. Add the function of StatsDataManager in UI,RT
|
1 year ago |
|
PMProcessRoutine.cs
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
8 months ago |
|
PMProcess_FA.cs
|
774c804aa9
fixed pm event occurs carrierid is null
|
1 year ago |
|
PMPurgeRoutine.cs
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
1 year ago |
|
PMRoutineBase.cs
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 year ago |
|
PMVATPerformanceRoutine.cs
|
b6309f712c
upload for Venus SE/DE
|
8 months ago |
|
Process.cs
|
3cad102221
更新 RT
|
2 years ago |
|
ProcessDefine.cs
|
4666252058
补充recipe界面不显示heliumpump的问题
|
8 months ago |
|
PumpDownRoutine.cs
|
b6309f712c
upload for Venus SE/DE
|
8 months ago |
|
RFPowerSwitchRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
1 year ago |
|
StartDryPumpRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
1 year ago |
|
StartTurboPumpRoutine.cs
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
1 year ago |
|
VentRoutine.cs
|
10c22069fe
1.添加EFEM光栅报警开关
|
9 months ago |
|
VenusRecipeFileContext.cs
|
7d93bf0076
Job Clean function, not finished.
|
1 year ago |
|
VenusSequenceFileContext.cs
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
|
1 year ago |
|
VenusVentRoutine.cs
|
b6309f712c
upload for Venus SE/DE
|
8 months ago |
|
VirgoRecipeFileContext.cs
|
896c7407de
优化log功能
|
2 years ago |
|
VirgoSequenceFileContext.cs
|
896c7407de
优化log功能
|
2 years ago |
