SEMFPlaceRoutine.cs 7.3 KB

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  1. using Aitex.Core.RT.Log;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Aitex.Core.Util;
  5. using Aitex.Sorter.Common;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.Schedulers;
  8. using MECF.Framework.Common.SubstrateTrackings;
  9. using System;
  10. using System.Collections.Generic;
  11. using System.Linq;
  12. using System.Text;
  13. using System.Threading.Tasks;
  14. using Venus_Core;
  15. using Venus_RT.Devices;
  16. using Venus_RT.Devices.PreAligner;
  17. using Venus_RT.Devices.VCE;
  18. using Venus_RT.Modules.VCE;
  19. namespace Venus_RT.Modules.TM.VenusEntity
  20. {
  21. public class SEMFPlaceRoutine : ModuleRoutineBase, IRoutine
  22. {
  23. private enum PlaceStep
  24. {
  25. seWaitModuleReady,
  26. sePrepareModule,
  27. sePlacing,
  28. seNotifyDone
  29. }
  30. private HongHuTM _tm;
  31. private ITransferRobot _robot;
  32. private IPreAlign _vpa;
  33. private VceEntity _vceModule;
  34. private ModuleName _targetModule;
  35. private int _targetSlot;
  36. private int _placingTimeout;
  37. public int currentStepNo;
  38. Hand _hand;
  39. public SEMFPlaceRoutine(HongHuTM tm, ITransferRobot robot, IPreAlign vpa) : base(ModuleName.SETM)
  40. {
  41. _tm = tm;
  42. _robot = robot;
  43. _vpa = vpa;
  44. }
  45. public RState Start(params object[] objs)
  46. {
  47. if (!_robot.IsHomed)
  48. {
  49. LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
  50. return RState.Failed;
  51. }
  52. //MoveItem placeItem = (MoveItem)objs[0];
  53. var placeItem = (Queue<MoveItem>)objs[0];
  54. _targetModule = placeItem.Peek().DestinationModule;
  55. _targetSlot = placeItem.Peek().DestinationSlot;
  56. _hand = placeItem.Peek().RobotHand;
  57. //如果目标是Vce 获取vce
  58. if (ModuleHelper.IsVCE(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
  59. {
  60. _vceModule = Singleton<RouteManager>.Instance.GetVCE(_targetModule);
  61. //如果vce有错误 报错
  62. if (_vceModule.IsError)
  63. {
  64. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} is Error! Please solve Error first!");
  65. return RState.Failed;
  66. }
  67. if (_targetSlot < 0)
  68. {
  69. LOG.Write(eEvent.ERR_TM, Module, $"VCE target slot cannot be {_targetSlot}. Please check it first.");
  70. return RState.Failed;
  71. }
  72. if (_tm.VCESlitDoorClosed)
  73. {
  74. LOG.Write(eEvent.ERR_TM, Module, $"cannot place cause vce slitdoor not open.");
  75. return RState.Failed;
  76. }
  77. //如果VCE门是关闭的 说明还未进行pump 无法取片等
  78. //if (_tm.VCESlitDoorClosed)
  79. //{
  80. // LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} slitdoor not open! Please pump down vce and open it first!");
  81. // return RState.Failed;
  82. //}
  83. }
  84. //如果目标又不是VPA 报错
  85. else if (!ModuleHelper.IsVPA(_targetModule))
  86. {
  87. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for placing action");
  88. return RState.Failed;
  89. }
  90. //检查目标手臂上有wafer
  91. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, (int)_hand))
  92. {
  93. LOG.Write(eEvent.ERR_TM, Module, $"Cannot place as TM Robot Arm: {_hand} has no wafer");
  94. return RState.Failed;
  95. }
  96. //检查目标槽位上没有wafer
  97. if (WaferManager.Instance.CheckHasWafer(_targetModule, _targetSlot))
  98. {
  99. LOG.Write(eEvent.ERR_TM, Module, $"Cannot place as {_targetModule} Slot {_targetSlot + 1} has a wafer");
  100. return RState.Failed;
  101. }
  102. //2023/10/13 朱永吉 atm mode的判断不允许自动pump vent 信号不满足手动pump vent
  103. //if (RouteManager.IsATMMode && _targetModule == ModuleName.VCE1)
  104. //{
  105. // if (!_tm.IsVCEATM)
  106. // {
  107. // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but VCE is not ATM!");
  108. // return RState.Failed;
  109. // }
  110. //
  111. // if (!_tm.IsTMATM)
  112. // {
  113. // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but TM is not ATM!");
  114. // return RState.Failed;
  115. // }
  116. //}
  117. //else
  118. //{
  119. // if (_tm.IsVCEATM)
  120. // {
  121. // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but VCE is ATM!");
  122. // return RState.Failed;
  123. // }
  124. //
  125. // if (_tm.IsTMATM)
  126. // {
  127. // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but TM is ATM!");
  128. // return RState.Failed;
  129. // }
  130. //}
  131. Reset();
  132. _placingTimeout = SC.GetValue<int>($"SETM.PlaceTimeout") * 1000;
  133. return Runner.Start(Module, $"Place to {_targetModule}");
  134. }
  135. public RState Monitor()
  136. {
  137. Runner.Wait(PlaceStep.seWaitModuleReady, CheckModuleReady, _delay_60s)
  138. .Run(PlaceStep.sePrepareModule, PrepareModule, CheckModuleReady)
  139. .Run(PlaceStep.sePlacing, Placing, WaitPlaceDone, _placingTimeout)
  140. .End(PlaceStep.seNotifyDone, NullFun, 500);
  141. return Runner.Status;
  142. }
  143. private bool PrepareModule()
  144. {
  145. switch (_targetModule)
  146. {
  147. case ModuleName.VCE1:
  148. _vceModule.PostMsg(VceMSG.Goto, _targetSlot);
  149. return true;//移动到目标槽位
  150. case ModuleName.VPA:
  151. return true;//10/17暂时为true 后可能要求旋转
  152. default:
  153. return false;
  154. }
  155. }
  156. private bool WaitPlaceDone()
  157. {
  158. if (_robot.Status == RState.Running)
  159. {
  160. return false;
  161. }
  162. else if (_robot.Status == RState.End)
  163. {
  164. WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot);
  165. return true;
  166. }
  167. // timeout failed
  168. else
  169. {
  170. Runner.Stop($"TM Robot Placing failed, {_robot.Status}");
  171. return true;
  172. }
  173. }
  174. private bool Placing()
  175. {
  176. return _robot.Place(_targetModule, 0, _hand);
  177. }
  178. private bool CheckModuleReady()
  179. {
  180. switch (_targetModule)
  181. {
  182. case ModuleName.VCE1:
  183. return _vceModule.IsIdle;
  184. case ModuleName.VPA:
  185. return _vpa.Status == RState.End;
  186. default:
  187. return false;
  188. }
  189. }
  190. public void Abort()
  191. {
  192. }
  193. }
  194. }